Patents by Inventor Tooru KAKUDA

Tooru KAKUDA has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Substrate processing method, substrate processing apparatus, method of manufacturing semiconductor device and non-transitory computer-readable recording medium
    Patent number: 9502239
    Abstract: There is provided a substrate processing method, including: (a) loading a substrate into a processing vessel having a pre-baked film containing a silazane bond; (b) heating the substrate to a first temperature and supplying a process gas to the heated substrate; and (c) heating the substrate to which the process gas has been supplied, to a second temperature which is higher than the first temperature and less than or equal to a temperature at which the pre-bake has been performed.
    Type: Grant
    Filed: May 8, 2015
    Date of Patent: November 22, 2016
    Assignees: HITACHI KOKUSAI ELECTRIC INC., AZ ELECTRONIC MATERIALS (LUXEMBOURG) S.A.R.L.
    Inventors: Masahisa Okuno, Tooru Kakuda, Hideto Tateno, Takuya Joda, Masamichi Kurokawa
  • SUBSTRATE PROCESSING METHOD, SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND NON-TRANSITORY COMPUTER-READABLE RECORDING MEDIUM
    Publication number: 20150262817
    Abstract: There is provided a substrate processing method, including: (a) loading a substrate into a processing vessel having a pre-baked film containing a silazane bond; (b) heating the substrate to a first temperature and supplying a process gas to the heated substrate; and (c) heating the substrate to which the process gas has been supplied, to a second temperature which is higher than the first temperature and less than or equal to a temperature at which the pre-bake has been performed.
    Type: Application
    Filed: May 8, 2015
    Publication date: September 17, 2015
    Inventors: Masahisa OKUNO, Tooru KAKUDA, Hideto TATENO, Takuya JODA, Masamichi KUROKAWA