Patents by Inventor Tooru Komizo

Tooru Komizo has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Reflective mask blank and reflective mask, and methods for manufacturing reflective mask blank and reflective mask
    Patent number: 9448468
    Abstract: A reflective mask blank, a reflective mask, and methods for manufacturing those, which suppress reflectance at a light-shielding frame. The reflective mask includes a substrate, a multilayered reflective layer formed on the substrate, an absorption layer formed on the multilayered reflective layer, and a frame-shaped light-shielding frame area at which the absorption layer has a film thickness larger than a film thickness at other areas. The multilayered reflective layer is diffused and mixed at the light-shielding frame area through melting.
    Type: Grant
    Filed: March 27, 2014
    Date of Patent: September 20, 2016
    Assignee: TOPPAN PRINTING CO., LTD.
    Inventors: Masahito Tanabe, Norihito Fukugami, Yo Sakata, Tooru Komizo, Takashi Haraguchi
  • REFLECTIVE MASK BLANK AND REFLECTIVE MASK, AND METHODS FOR MANUFACTURING REFLECTIVE MASK BLANK AND REFLECTIVE MASK
    Publication number: 20140212795
    Abstract: A reflective mask blank, a reflective mask, and methods for manufacturing those, which suppress reflectance at a light-shielding frame. The reflective mask includes a substrate, a multilayered reflective layer formed on the substrate, an absorption layer formed on the multilayered reflective layer, and a frame-shaped light-shielding frame area at which the absorption layer has a film thickness larger than a film thickness at other areas. The multilayered reflective layer is diffused and mixed at the light-shielding frame area through melting.
    Type: Application
    Filed: March 27, 2014
    Publication date: July 31, 2014
    Applicant: TOPPAN PRINTING CO., LTD.
    Inventors: Masahito TANABE, Norihito Fukugami, Yo Sakata, Tooru Komizo, Takashi Haraguchi