Abstract: A scanning probe microscope provided with a cantilever 21 having a probe 20 facing a sample 12, a measurement unit 24 measuring a physical quantity occurring between the probe and sample, and movement mechanisms 11, 29 changing a positional relationship between the probe and sample to cause a scanning operation and making the probe scan the surface of the sample by the movement mechanism and measure the surface of the sample by the measurement unit.

Abstract: A probe is made by attaching a carbon nanotube 12 to a mounting base end 13, which eliminates the effects of a carbon contamination film, to increase the bonding strength, increase the conductivity of the probe, and strengthen the bonding performance thereof by coating the entire circumference of the nanotube and the base with a coating film, rather than coating just one side. The work of mounting the carbon nanotube and mounting base end are performed under observation by a microscope. Further, the carbon contamination film 14 formed by an electron microscope is stripped off at a stage before bonding by the coating film.

Abstract: The probe tip movement control method of the scanning probe microscope is used for a scanning probe microscope provided with a cantilever 21 having a probe tip 20 facing a sample 12. The atomic force occurring between the probe tip and sample is measured when the probe tip scans the surface of the sample. X-, Y-, and Z-fine movement mechanisms 23, 29, and 30 are used to relatively change the positions of the probe tip and sample. It is possible to maintain a high measurement accuracy and enable scan movement of a probe tip on a sample surface by simple control when measuring a part having a gradient in measurement of an uneven shape on a sample surface.

Abstract: A scanning probe microscope has a cantilever with a probe facing a sample and a measurement section for measuring a physical quantity occurring between the probe and the sample when the probe scans a surface of the sample, holding the physical quantity constant to measure the surface of the sample. The above microscope further has a probe tilt mechanism, an optical microscope etc. for detecting a position of the probe when the probe is tilted, and a control section for setting the probe in a first tilt posture and second tilt posture, measuring a surface of the sample by the measurement section at each tilt posture, detecting the position of the probe at least at the second tilt posture by the optical microscope etc., and making a measurement location at the second tilt posture match with a measurement location at the first tilt posture for measurement.

Abstract: A probe replacement method for a scanning probe microscope for measuring the surface of a sample, having a cantilever (21) having a probe (20), and a measurement unit for measuring a physical quantity between the probe and sample. The scanning probe microscope is provided with a cantilever mount (22), a cantilever cassette (30), an XY stage (14) and Z stage (15) for moving the cantilever cassette, and an optical microscope (18). In a first step, a cantilever is selected from the cantilever cassette and is mounted on the cantilever mount. In a second step, an optical microscope is moved and the mounted cantilever is set in a prescribed position in the field of view after the cantilever is mounted in the scanning probe microscope. In the second step, a step is provided for moving the optical microscope side or the cantilever side and performing positional adjustment.

Abstract: A method of producing a probe by attaching a carbon nanotube etc. to a mounting base end and bonding it there using a carbon film etc., which method of producing a probe eliminates the effects of a carbon contamination film to increase the bonding strength, increases the conductivity of the probe, and strengthens the bonding performance by coating the entire circumference rather than coating one side, the probe, and a scanning probe microscope are provided. The method of producing a probe is a method of producing a probe comprised of a carbon nanotube 12, a mounting base ends 13 holding this carbon nanotube, and a coating film 17 bonding the carbon nanotube to a mounting base, comprising performing the mounting work of the carbon nanotube and mounting base end under observation by a microscope and stripping off the carbon contamination film 14 formed by an electron microscope at a stage before bonding by the coating film.

Abstract: The probe tip movement control method of the scanning probe microscope is used for a scanning probe microscope provided with a cantilever 21 having a probe tip 20 facing a sample 12. The atomic force occurring between the probe tip and sample is measured when the probe tip scans the surface of the sample. X-, Y-, and Z-fine movement mechanisms 23, 29, and 30 are used to relatively change the positions of the probe tip and sample. It is possible to maintain a high measurement accuracy and enable scan movement of a probe tip on a sample surface by simple control when measuring a part having a gradient in measurement of an uneven shape on a sample surface.

Abstract: A scanning probe microscope has a cantilever with a probe facing a sample and a measurement section for measuring a physical quantity occurring between the probe and the sample when the probe scans a surface of the sample, holding the physical quantity constant to measure the surface of the sample. The above microscope further has a probe tilt mechanism, an optical microscope etc. for detecting a position of the probe when the probe is tilted, and a control section for setting the probe in a first tilt posture and second tilt posture, measuring a surface of the sample by the measurement section at each tilt posture, detecting the position of the probe at least at the second tilt posture by the optical microscope etc., and making a measurement location at the second tilt posture match with a measurement location at the first tilt posture for measurement.

Abstract: A hydraulic excavator 1 has an area limiting excavation control function for controlling operation of a front working device so as to form a target work plane. A remote control terminal 102 for wirelessly maneuvering the hydraulic excavator 1 is provided in a management office so that entry of setting information of a target excavation plane and remote maneuvering can be performed from the side of the remote control terminal 102. A display unit 71b for displaying a positional relationship between the hydraulic excavator 1 and the target excavation plane is further provided in the remote control terminal. An operator can remotely set the target excavation plane while looking at a screen of the display unit 71b, and also form the target excavation plane by remotely maneuvering the front working device 7 using a joystick 72 with the aid of a control function of an area limiting excavation controller.

Abstract: A hydraulic excavator 1 has an area limiting excavation control function for controlling operation of a front working device so as to form a target work plane. A remote control terminal 102 for wirelessly maneuvering the hydraulic excavator 1 is provided in a management office so that entry of setting information of a target excavation plane and remote maneuvering can be performed from the side of the remote control terminal 102. A display unit 71b for displaying a positional relationship between the hydraulic excavator 1 and the target excavation plane is further provided in the remote control terminal. An operator can remotely set the target excavation plane while looking at a screen of the display unit 71b, and also form the target excavation plane by remotely maneuvering the front working device 7 using a joystick 72 with the aid of a control function of an area limiting excavation controller.

Abstract: An automatically operated shovel has a shovel and an automatic operation controller arranged on the shovel to store by a teaching operation plural working positions of the shovel, which comprises at least a digging position, and also to cause by a reproduction operation the shovel to repeatedly perform a series of reproduction operations on the basis of the stored plural working positions. The automatic operation controller is provided with servo control means for outputting, as a servo control quantity, a sum of a compliance control quantity and a pressure control quantity. The compliance control quantity is obtained by multiplying with a stiffness gain a difference between a target position of each operational element of the shovel, the target position comprising angle information indicative of an operational target of the operational element, and a current position of the operational element, the current position comprising current angle information on the operational element.

Abstract: A profiling control system for a multiple-degree-of-freedom working machine having at least two degrees of freedom has at least one force control loop. The control loop has a detector for detecting the force applied to a working tool from a work surface, an error detector for determining the difference between the detected force and a command f.sub.ro of urging force of the working took, a processor for computing a velocity command u.sub.z of the working tool on the basis of the determined error, a drive system for moving the multiple-degree-of-freedom working machine on the basis of the velocity command. Further, the multiple-degree-of-freedom working machine is moved on the basis of a velocity command u.sub.x. The control system provides a moving velocity v.sub.zof in an urging direction of the working tool, which occurs as the result of a gradient tan .alpha. of the work surface with respect to a feed direction when the working tool is fed with the velocity command u.sub.