Abstract: A motor control circuit for a wire bonding apparatus for manufacturing semiconductor devices, etc. using a feedback gain circuit which performs feedback control of a synthesized signal that drives a Z-axis motor for moving a capillary up and down. The gain value of the feedback gain circuit is controlled by a computer, thus allowing smooth and stable control of the motor operation even after rotational speed change of the Z-axis motor, and assuring a stable wire bonding.

Abstract: A wire bonding method used in a bonding apparatus manufacturing, for example, semiconductor devices makes a correction of the ultrasonic output of a transducer using one of three correction timing patterns: a first correction timing pattern which makes the ultrasonic output correction prior to a first bonding by a first bonding wire to a single IC device, a second correction timing pattern which makes the output correction prior to a first bonding by a bonding wire, and a third correction timing pattern which makes the output correction prior to a first bonding and prior to a second bonding. By selecting one of the three patterns, the ultrasonic oscillation output is corrected at an appropriate timing regardless of the differences in the characteristics of the transducers used.

Abstract: An ultrasonic wire bonding method that uses an ultrasonic oscillation output from a non-rotatable form, wherein the ultrasonic oscillation output used for bonding the leads that extend in an X-direction which is perpendicular to the axial direction of a horn is set to be larger than the ultrasonic oscillation output used for bonding the leads extending in a Y-direction which coincides with the axial direction of the horn.

Abstract: An apparatus for determining the polarities of bonding points to locate false bonding connections including an applied voltage output circuit which outputs positive and negative voltages, a switching circuit which after a wire is connected to a bonding point impresses voltage from the applied voltage output circuit to the bonding wire, a D/A converter which outputs standard positive and negative voltages, a polarity determining comparator which determines the polarity of the bonding point by comparing the voltage detected on the bonding wire with the standard voltage, and a memory which stores such a determination result for each bonding point.

Abstract: In a bonding apparatus for semiconductor devices, etc., a linear sensor is mounted on a bonding head frame. An arm holder which has a bonding capillary at one end is pivotally mounted to the bonding head frame, and the linear sensor is positioned so that it faces a middle portion of the arm holder which locates an opposite side of pivotal point of the arm holder from the capillary. The linear sensor detects the gap between the arm holder and the bonding head frame when the arm holder pivots, thus determining the bonding surface level of a workpiece by the capillary which comes into contact with the workpiece.

Abstract: In a bonding method and apparatus, a vertical movement of a bonding arm holder that has a capillary at the tip end is detected by a linear sensor and data based upon such a detection is outputted by the sensor. The output date in a predetermined range is checked if it is within a permissible range. If the output data is within the permissible range, it is determined that the capillary has come into contact with a bonding surface, and such a determination can be made without being affected by noises that often occur in bonding apparatus caused by vibrations.