Abstract: A polishing pad for chemical mechanical polishing (CMP) contains a lower polishing pad layer including a bottom surface of the polishing pad, an upper polishing pad layer including a top surface of the polishing pad, tunnels vertically spaced from the top surface of the polishing pad and from the bottom surface of the polishing pad, such that each of the tunnels laterally extends continuously to a respective opening in a peripheral sidewall of the polishing pad, and perforation holes vertically extending from the tunnels to the top surface of the polishing pad.

Abstract: A filler for reinforcement joint that ensures excellent fluidity and retention thereof, exhibiting appropriate length change ratio and high strength performance; and a method of reinforcement joint filling operation using the same. There are provided a filler for reinforcement joint containing a cement, an expanding material, a pozzolana micropowder, a water reducing agent and a sand, and a method of reinforcement joint filling operation using the same, characterized in that the expanding material is a calcium aluminoferrite expanding material, and that the pozzolana micropowder is a silicious micropowder having a silicon dioxide (SiO2) content of 90% or higher and having a hydrogen ion concentration falling in an acid region, and that the water reducing agent is a polycarboxylic acid water reducing agent. The calcium aluminoferrite expanding material preferably has a value of Brain specific surface area of 2000 to 6000 cm2/g. The sand is preferably a weighty sand of 3.0 g/cm3 or higher density.

Abstract: A filler for reinforcement joint that ensures excellent fluidity and retention thereof, exhibiting appropriate length change ratio and high strength performance; and a method of reinforcement joint filling operation using the same. There are provided a filler for reinforcement joint containing a cement, an expanding material, a pozzolana micropowder, a water reducing agent and a sand, and a method of reinforcement joint filling operation using the same, characterized in that the expanding material is a calcium aluminoferrite expanding material, and that the pozzolana micropowder is a silicious micropowder having a silicon dioxide (SiO2) content of 90% or higher and having a hydrogen ion concentration falling in an acid region, and that the water reducing agent is a polycarboxylic acid water reducing agent. The calcium aluminoferrite expanding material preferably has a value of Brain specific surface area of 2000 to 6000 cm2/g. The sand is preferably a weighty sand of 3.0 g/cm3 or higher density.