Abstract: In a method for protecting heat exchanger pipe in boiler systems having at least one heat exchanger pipe, which is surrounded by a ceramic component, into which flue gas is directed from at least two opposite sides, gas is introduced between the heat exchanger pipe and the ceramic component.

Abstract: The invention relates to a method of running a conduit in an incineration plant as well as a device with a conduit, in which the conduit is surrounded by a ceramic component onto which flue gas flows from at least two opposite directions, wherein between the conduit and ceramic component a protective fluid space with a protective fluid inlet and/or heat exchanger pipes is provided.

Abstract: In a method for protecting heat exchanger pipe in boiler systems having at least one heat exchanger pipe, which is surrounded by a ceramic component, into which flue gas is directed from at least two opposite sides, gas is introduced between the heat exchanger pipe and the ceramic component.

Abstract: In order to protect heat exchanger pipes (1) in steam boiler systems, special casing elements (2) made of fiber-reinforced ceramic are proposed. The casing elements prevent or reduce the formation of films and corrosion on the heat exchanger pipes and thus enable higher steam parameters of the boiler system and a correspondingly increased thermal efficiency.

Abstract: A device for high-precision machining of the surface of an object, such as for polishing and lapping semiconductor substrates, in which the object is held on an accommodation surface for its machining. The accommodation surface can be deformed by means of a actuators connected to the surface in a positive-lock and/or non-positive-lock manner. The actuators are provided between a base plate and an accommodation plate that are mechanically biased relative to one another. The accommodation plate is configured, on its inside, with concentric grooves forming rigid rings in the axial direction. The individual rings are connected by solid substance joints. Piezo-stacks configured as actuator-sensor elements, as well as springs, are disposed between the faces of the rings and the base plates and are offset relative to one another by 120°.

Abstract: The aim the invention is to machine the surface of objects using a universal device as economically as possible and in a significantly reduced amount of time, even in the event of process variations, material non-homogeneities etc., with high reproducible precision. The this end, the pressure distribution on the surface which is decisive for the machining process is determined by temporarily weighting the object to be machined—said object being fixed to a receiving surface (17)—and measuring the thus occurring change in position of the receiving surface (17) by means of actuator-sensor elements (180 from the calculated pressure distribution. The invention can generally be applied to the surface machining of objects beyond the lapping or polishing of the above-mentioned semiconductor substrates.