Abstract: An apparatus for determining the presence or absence of wafers in a cassette, i.e. a wafer mapper, is integrated with a door assembly in a load port interface that separates a process environment from an operator environment. In one orientation, a port cover plate seals an opening that pierces a bulkhead, while a door panel rests horizontally on the operator environment side of the bulkhead. In this position, a cassette of wafers may be placed on an inside surface of the door panel, with the top of the stack being open. As the door rotates to a vertical position, the wafer stack moves through the bulkhead opening thereby entering the process environment. A moveable trolley, connected to or within the door, moves parallel to the wafer stack detecting the presence of wafers by sensing light scattered from wafer edges through a window in a cover plate of the door panel. In this way the apparatus determines each wafer's location and may provide that information to subsequent wafer manufacturing operations.

Abstract: An apparatus for determining the presence or absence of wafers in a cassette, i.e. a wafer mapper, is integrated with a door assembly in a load port interface separating a process environment from an operator environment. A port cover plate and a door are arranged in an L-shape, with both members being able to seal the port in a bulkhead of the load port interface. In one configuration, the port cover plate seals the port, while door panel members rest horizontally on the operator side of the bulkhead. In this position, a wafer stack inside of a cassette may be placed on the inside door panel, with the top of the stack being open. As the door is raised from the horizontal position to a vertical position, the wafer stack is rotated through an opening in the bulkhead so that the wafer stack is now on the process side. The wafer mapper features a moveable trolley connected to, or within, the door.

Abstract: A wafer support featuring a polymer rack formed of parallel, spaced apart comb structures with spaced apart teeth into which wafers can loosely fit and a shank immediately below the teeth which is connected to lifter shafts. A conductive polymer bus bar runs along the shank less than a millimeter below the base of the teeth. The polymer rack will fit through a standard size wafer cassette for wafer transfer. The bus bar is connected to electrical ground, found at metal lifter shafts, by means of conductive polymer cross bars. The bus bar is close enough to one or more wafers to allow arcing from the wafer to the bus bar and then to ground when a wafer becomes highly charged with electrostatic charge, thereby discharging the wafer.