Patents by Inventor Torsten Fahr

Torsten Fahr has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • METHOD AND SYSTEM FOR MATERIAL CHARACTERIZATION IN SEMICONDUCTOR PRODUCTION PROCESSES BASED ON FTIR WITH VARIABLE ANGLE OF INCIDENCE
    Publication number: 20100243903
    Abstract: During the processing of complex semiconductor devices, dielectric material systems comprising a patterned structure may be analyzed in a non-destructive manner by using an FTIR technique in combination with a plurality of angles of incidence. In this manner, topography-related information may be obtained and/or data analysis may be made more efficient due to the increased amount of information obtained by the plurality of angles of incidence.
    Type: Application
    Filed: March 22, 2010
    Publication date: September 30, 2010
    Inventors: Torsten Fahr, Matthias Schaller, Wolfgang Buchholtz