Patents by Inventor Torsten FANKHAENEL

Torsten FANKHAENEL has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • System and method for maintenance of rotation-lift assembly
    Patent number: 11774306
    Abstract: Embodiments of the present disclosure generally relate to apparatus and methods for semiconductor processing, more particularly, to a system and method for monitoring a rotation-lift assembly of a process chamber. The rotation-lift assembly outputs a torque feedback signal which is processed by a controller to determine if the rotation-lift assembly has a fault or is near failure. The controller determines torque data from the torque feedback signal, compares the torque data to preexisting torque data, and, based on the comparison, issue a notice of a state of the rotation-lift assembly.
    Type: Grant
    Filed: June 25, 2019
    Date of Patent: October 3, 2023
    Assignee: Applied Materials, Inc.
    Inventors: Thomas Ackermann, Torsten Fankhaenel
  • SYSTEM AND METHOD FOR MAINTENANCE OF ROTATION-LIFT ASSEMBLY
    Publication number: 20190393060
    Abstract: Embodiments of the present disclosure generally relate to apparatus and methods for semiconductor processing, more particularly, to a system and method for monitoring a rotation-lift assembly of a process chamber. The rotation-lift assembly outputs a torque feedback signal which is processed by a controller to determine if the rotation-lift assembly has a fault or is near failure. The controller determines torque data from the torque feedback signal, compares the torque data to preexisting torque data, and, based on the comparison, issue a notice of a state of the rotation-lift assembly.
    Type: Application
    Filed: June 25, 2019
    Publication date: December 26, 2019
    Inventors: Thomas ACKERMANN, Torsten FANKHAENEL