Abstract: An opaque quartz glass having high absorption in the near infrared range and a method for producing same. A composite material having a matrix which is made of quartz glass and in which regions of a silicon-containing phase and regions of a silicon carbide-containing phase are embedded. A use of the composite material for producing a part for components of process chambers in which semiconductor wafers are processed into chips, for systems in which high-temperature processes are carried out, for components which are heated by means of radiation and for components which block thermal radiation.

Abstract: A composite material comprising a matrix which is made of quartz glass and into which regions of a silicon carbide-containing phase are embedded. A method for producing the composite material having the following method steps: providing a mixture comprising amorphous quartz glass particles and a silicon carbide-containing powder as a suspension; forming a shaped body by means of a slip casting method starting from the suspension produced to obtain a green body; drying the green body; and, sintering the dried green body. A use of a composite material for producing a part for components of process chambers in which semiconductor wafers are processed into chips, for systems in which high-temperature processes are carried out, for components which are heated by means of radiation and for components which block thermal radiation.

Abstract: An electrode insert that has: (a) an intermediate wall made of an electrically insulating material, (b) a cathode-side assembly which is mounted on a front side of the intermediate wall and comprises a cathode, a cathode window and a light emission window, (c) an anode-side assembly which is mounted on a rear side of the intermediate wall and comprises an anode and at least one diaphragm, which together with the light emission window defines an optical axis along which a beam generated by discharge is emitted out of the light emission window, wherein at least the anode and the diaphragm are grouped to form a component ensemble, and wherein at least one retaining profile for retaining the component ensemble projects from the rear of the intermediate wall.

Abstract: An electrode insert that has: (a) an intermediate wall made of an electrically insulating material, (b) a cathode-side assembly which is mounted on a front side of the intermediate wall and comprises a cathode, a cathode window and a light emission window, (c) an anode-side assembly which is mounted on a rear side of the intermediate wall and comprises an anode and at least one diaphragm, which together with the light emission window defines an optical axis along which a beam generated by discharge is emitted out of the light emission window, wherein at least the anode and the diaphragm are grouped to form a component ensemble, and wherein at least one retaining profile for retaining the component ensemble projects from the rear of the intermediate wall.

Abstract: A semiconductor-based UV light source for a spectral analysis device is provided. The semiconductor-based UV light source includes a housing, in which at least one semiconductor-based emitter for emitting UV light is accommodated, and in which a beam path is formed between the semiconductor-based emitter and a beam exit point for a working beam. To provide a light source having a semiconductor-based emitter which is capable of covering at least a majority of the UV spectrum of 200 to 400 nm with its emission, the semiconductor-based emitter is designed to emit UV excitation light having an average wavelength in the range of 150 to 270 nm, and that a phosphor be provided in the beam path, which partially absorbs the UV excitation light and emits a phosphor radiation in such a way that UV excitation light and phosphor radiation are overlaid to form a working beam, which has a spectral bandwidth of at least 50 nm in the wavelength range of 200 to 400 nm.

Abstract: A known lamp module for spectral analysis devices includes a lamp receptacle body having a cavity for receiving a deuterium lamp having a lamp bulb made of synthetic quartz glass. The cavity has a beam outlet opening closed with an optical transmission element. In order to provide a lamp module having a deuterium lamp with an ozone filter that exhibits a long service life, that can be manufactured economically, and that ensures a high intensity in a wavelength range between 190 nm and 250 nm, such a known lamp module is provided with a VUV edge filter in the beam outlet opening on the side of the optical transmission element facing the deuterium lamp.

Abstract: A gas-discharge lamp (deuterium lamp) is provided having a lamp bulb (26) filled with gas, an anode (12) disposed inside the lamp bulb, a cathode (10) spaced from the anode inside the lamp bulb, a housing having a molded body (18), a rear housing wall (24), and a housing base made at least partially of electrically nonconductive material. The housing base includes a housing front (16), an intermediate housing wall (22), a cathode space (28), and a cathode shielding window (20). The cathode shielding window is insulated from the molded body and/or is made of an insulating material. The gas-discharge lamp is particularly applicable for analytical purposes.

Abstract: A known lamp module for spectral analysis devices includes a lamp receptacle body having a cavity for receiving a deuterium lamp having a lamp bulb made of synthetic quartz glass. The cavity has a beam outlet opening closed with an optical transmission element. In order to provide a lamp module having a deuterium lamp with an ozone filter that exhibits a long service life, that can be manufactured economically, and that ensures a high intensity in a wavelength range between 190 nm and 250 nm, such a known lamp module is provided with a VUV edge filter in the beam outlet opening on the side of the optical transmission element facing the deuterium lamp.

Abstract: A deuterium lamp is provided having a lamp base (1) including electrode feedthroughs (2, 3, 4), having a bulb (10) made of glass and having a housing assembly (11) including an anode (12), cathode (14), and aperture (15), wherein at least one part of the bulb forms a beam discharge surface, and wherein the lamp base and bulb enclose a gas compartment (9). The bulb has a gas diffusion barrier layer (13) on the surface facing the gas compartment at least at the beam discharge surface.

Abstract: A gas-discharge lamp (deuterium lamp) is provided having a lamp bulb (26) filled with gas, an anode (12) disposed inside the lamp bulb, a cathode (10) spaced from the anode inside the lamp bulb, a housing having a molded body (18), a rear housing wall (24), and a housing base made at least partially of electrically nonconductive material. The housing base includes a housing front (16), an intermediate housing wall (22), a cathode space (28), and a cathode shielding window (20). The cathode shielding window is insulated from the molded body and/or is made of an insulating material. The gas-discharge lamp is particularly applicable for analytical purposes.