Abstract: A module, including at least one first component in the form of a semiconductor component including multiple stress measuring cells situated in a distributed manner for detecting stress measured values at different measuring positions of the semiconductor component, at least one second component which is mechanically coupled to the semiconductor component, and an evaluation unit, which is designed to ascertain at least one location-dependent stress distribution in the semiconductor component based on the stress measured values detected at one measuring point in time, and to ascertain a deformation state of the at least one second component at the measuring point in time on the basis of the at least one ascertained location-dependent stress distribution in the semiconductor component. A corresponding method for monitoring environmental influences on a module is also described.

Abstract: A stress and/or strain measurement cell for a stress and/or strain measurement system. The cell includes a reference contact, a sensor contact and a first current mirror circuit which is integrated into a semiconductor material and has a first conduction path connectable or connected to the reference contact and a second conduction path connectable or connected to the sensor contact. The first conduction path includes a first transistor and the second conduction path includes a second transistor. A first crystal direction of the semiconductor material oriented perpendicular to a first inversion channel of the first transistor is definable for the first inversion channel and a second crystal direction of the semiconductor material oriented perpendicular to a second inversion channel of the second transistor is definable for the second inversion channel. The first crystal direction of the semiconductor material is inclined relative to the second crystal direction of the semiconductor material.

Abstract: A method for calibrating a sensor of a sensor system. A plurality of sensors structurally identical to the sensor of the sensor system and a general sensor model are provided. An inner optimization step is subsequently carried out for each of the structurally identical sensors. During the inner optimization step, a sensor-specific sensor model is initialized using the general sensor model and a sensor-specific model parameter is subsequently optimized based on measured data of the sensor. The sensor-specific sensor model is adapted with the aid of the sensor-specific model parameter. An outer optimization step is then carried out. In this step, the sensor-specific sensor models adapted for each sensor are used in order to optimize the general sensor model. The general sensor model is stored in a memory of the sensor system.

Abstract: An optical gyroscope assembly for measuring a rotation rate. The optical gyroscope assembly includes a first multimode interferometer with an input for receiving light and two outputs, each connected to a second light guide; a ring resonator on each of the second light guides; a second multimode interferometer with two inputs, each connected to one of the second light guides, and two outputs, each connected to a third light guide; and a third multimode interferometer with two inputs, each connected to one of the third light guides, and two outputs, each connected to a fourth light guide.

Abstract: An optical rotation rate sensor. The sensor includes a laser light source for generating weak light pulses, optically connected to a photonic waveguide, optically connected to a first interference coupler that includes a first input and two first outputs, optically connected to a second interference coupler that includes two second inputs and two second outputs, optically connected to at least one first sensor waveguide for showing the Sagnac effect, optically connected to a third interference coupler that includes two third inputs and two third outputs, optically connected to two photodetectors, the photonic waveguide, the first interference coupler, the second interference coupler, the third interference coupler and the sensor waveguide being integrated on a shared substrate.

Abstract: A module, including at least one first component in the form of a semiconductor component including multiple stress measuring cells situated in a distributed manner for detecting stress measured values at different measuring positions of the semiconductor component, at least one second component which is mechanically coupled to the semiconductor component, and an evaluation unit, which is designed to ascertain at least one location-dependent stress distribution in the semiconductor component based on the stress measured values detected at one measuring point in time, and to ascertain a deformation state of the at least one second component at the measuring point in time on the basis of the at least one ascertained location-dependent stress distribution in the semiconductor component. A corresponding method for monitoring environmental influences on a module is also described.

Abstract: A stress and/or strain measurement cell for a stress and/or strain measurement system. The cell includes a reference contact, a sensor contact and a first current mirror circuit which is integrated into a semiconductor material and has a first conduction path connectable or connected to the reference contact and a second conduction path connectable or connected to the sensor contact. The first conduction path includes a first transistor and the second conduction path includes a second transistor. A first crystal direction of the semiconductor material oriented perpendicular to a first inversion channel of the first transistor is definable for the first inversion channel and a second crystal direction of the semiconductor material oriented perpendicular to a second inversion channel of the second transistor is definable for the second inversion channel. The first crystal direction of the semiconductor material is inclined relative to the second crystal direction of the semiconductor material.

Abstract: A method for ascertaining a user input of a user of a first element and of a second element, the first element and the second element being electronic media devices or components of electronic media devices or of an electronic media device, the first element including an inertial sensor unit, in particular a rotation rate sensor unit. The method includes: outputting a sensor signal, by the inertial sensor unit, as a function of a motion of the first element; ascertaining a relative motion of the first element with reference to the second element by utilizing the output sensor signal, an overall motion of the first element being composed of an absolute motion and the relative motion, and the absolute motion of the first element being at least partially compensated for by utilizing the output sensor signal; and ascertaining the user input as a function of the ascertained relative motion.

Abstract: A micromechanical system which includes a movably suspended mass. The micromechanical system includes a damping system, the damping system including a movably suspended damping structure, the damping structure being deflectable by applying a voltage. The damping structure is designed in such a way that a frequency response and/or a damping of the movably suspended mass are/is changeable with the aid of a deflection of the damping structure.

Abstract: A method for ascertaining a user input of a user of a first element and of a second element, the first element and the second element being electronic media devices or components of electronic media devices or of an electronic media device, the first element including an inertial sensor unit, in particular a rotation rate sensor unit. The method includes: outputting a sensor signal, by the inertial sensor unit, as a function of a motion of the first element; ascertaining a relative motion of the first element with reference to the second element by utilizing the output sensor signal, an overall motion of the first element being composed of an absolute motion and the relative motion, and the absolute motion of the first element being at least partially compensated for by utilizing the output sensor signal; and ascertaining the user input as a function of the ascertained relative motion.

Abstract: A micromechanical yaw rate sensor includes a substrate and a rotationally oscillating mass having a rotationally oscillating mass bearing. The rotationally oscillating mass bearing includes a rocker bar, a rocker spring rod which resiliently connects the rocker bar to the substrate, and two support spring rods which resiliently connect, on opposite sides of the rocker spring rod, the rocker bar to the rotationally oscillating mass.

Abstract: A micromechanical rate-of-rotation sensor includes a first Coriolis element. The micromechanical rate-of-rotation sensor further includes a first drive beam arranged along the first Coriolis element. The first drive beam is coupled via a first spring to the first Coriolis element. The micromechanical rate-of-rotation sensor further includes a first drive electrode carrier extending from the first drive beam in a direction opposite to the first Coriolis element. The first drive electrode carrier is configured to carry a multiplicity of first drive electrodes extending parallel to the first drive beam.

Abstract: A micromechanical rate-of-rotation sensor includes a first Coriolis element. The micromechanical rate-of-rotation sensor further includes a first drive beam arranged along the first Coriolis element. The first drive beam is coupled via a first spring to the first Coriolis element. The micromechanical rate-of-rotation sensor further includes a first drive electrode carrier extending from the first drive beam in a direction opposite to the first Coriolis element. The first drive electrode carrier is configured to carry a multiplicity of first drive electrodes extending parallel to the first drive beam.

Abstract: A micromechanical yaw rate sensor includes a substrate and a rotationally oscillating mass having a rotationally oscillating mass bearing. The rotationally oscillating mass bearing includes a rocker bar, a rocker spring rod which resiliently connects the rocker bar to the substrate, and two support spring rods which resiliently connect, on opposite sides of the rocker spring rod, the rocker bar to the rotationally oscillating mass.

Abstract: A method for testing the functionality of a rotation rate sensor, the rotation rate sensor including a substrate and a micromechanical structure oscillatory with respect to the substrate having a first drive element, a second drive element and at least one Coriolis element, the Coriolis element being excitable to at least one oscillation mode by the first drive element and/or by the second drive element, a detection signal being detected as a function of a force action to be detected on the Coriolis element, the rotation rate sensor being operable optionally in a normal mode or in a self-test mode, the first drive element and the second drive element being driven in the normal mode, characterized in that in the self-test mode, the first drive element or the second drive element is driven optionally exclusively.

Abstract: A yaw-rate sensor having a substrate and a plurality of movable substructures that are mounted over a surface of the substrate, the movable substructures being coupled to a shared, in particular, central spring element, means being provided for exciting the movable substructures into a coupled oscillation in a plane that extends parallel to the surface of the substrate, the movable substructures having Coriolis elements, means being provided for detecting deflections of the Coriolis elements induced by a Coriolis force, a first Coriolis element being provided for detecting a yaw rate about a first axis, a second Coriolis element being provided for detecting a yaw rate about a second axis, the second axis being oriented perpendicularly to the first axis.

Abstract: A yaw-rate sensor having a substrate and a plurality of movable substructures that are mounted over a surface of the substrate, the movable substructures being coupled to a shared, in particular, central spring element, means being provided for exciting the movable substructures into a coupled oscillation in a plane that extends parallel to the surface of the substrate, the movable substructures having Coriolis elements, means being provided for detecting deflections of the Coriolis elements induced by a Coriolis force, a first Coriolis element being provided for detecting a yaw rate about a first axis, a second Coriolis element being provided for detecting a yaw rate about a second axis, the second axis being oriented perpendicularly to the first axis.

Abstract: A yaw-rate sensor having a substrate and a plurality of movable substructures that are mounted over a surface of the substrate, the movable substructures being coupled to a shared, in particular, central spring element, means being provided for exciting the movable substructures into a coupled oscillation in a plane that extends parallel to the surface of the substrate, the movable substructures having Coriolis elements, means being provided for detecting deflections of the Coriolis elements induced by a Coriolis force, a first Coriolis element being provided for detecting a yaw rate about a first axis, a second Coriolis element being provided for detecting a yaw rate about a second axis, the second axis being oriented perpendicularly to the first axis.

Abstract: A method for testing the functionality of a rotation rate sensor, the rotation rate sensor including a substrate and a micromechanical structure oscillatory with respect to the substrate having a first drive element, a second drive element and at least one Coriolis element, the Coriolis element being excitable to at least one oscillation mode by the first drive element and/or by the second drive element, a detection signal being detected as a function of a force action to be detected on the Coriolis element, the rotation rate sensor being operable optionally in a normal mode or in a self-test mode, the first drive element and the second drive element being driven in the normal mode, characterized in that in the self-test mode, the first drive element or the second drive element is driven optionally exclusively.

Abstract: A micromechanical spring for an inertial sensor, including segments of a monocrystalline base material, the segments having surfaces which are situated at a right angle to one another with respect to a plane of oscillation of the spring and normal to the plane of oscillation of the spring, the segments being manufactured in a crystal-direction-dependent etching process and each having two different orientations normal to the plane of oscillation, in which the spring includes a defined number of segments situated in a defined manner.