Patents by Inventor Torsten Rudolf Kaack

Torsten Rudolf Kaack has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Metrology system, method, and computer program product employing automatic transitioning between utilizing a library and utilizing regression for measurement processing
    Patent number: 10190868
    Abstract: A metrology system, method, and computer program product that employ automatic transitioning between utilizing a library and utilizing regression for measurement processing are provided. In use, it is determined, by the metrology system, that a predetermined condition has been met. In response to determining that the predetermined condition has been met, the metrology system automatically transitions between utilizing a library and utilizing regression for measurement processing.
    Type: Grant
    Filed: August 13, 2015
    Date of Patent: January 29, 2019
    Assignee: KLA-Tencor Corporation
    Inventors: Liequan Lee, Raphael Jean Michel Marie Getin, Meng Cao, Leonid Poslavsky, Torsten Rudolf Kaack, Hong Qiu
  • METROLOGY SYSTEM, METHOD, AND COMPUTER PROGRAM PRODUCT EMPLOYING AUTOMATIC TRANSITIONING BETWEEN UTILIZING A LIBRARY AND UTILIZING REGRESSION FOR MEASUREMENT PROCESSING
    Publication number: 20160320315
    Abstract: A metrology system, method, and computer program product that employ automatic transitioning between utilizing a library and utilizing regression for measurement processing are provided. In use, it is determined, by the metrology system, that a predetermined condition has been met. In response to determining that the predetermined condition has been met, the metrology system automatically transitions between utilizing a library and utilizing regression for measurement processing.
    Type: Application
    Filed: August 13, 2015
    Publication date: November 3, 2016
    Inventors: Liequan Lee, Raphael Jean Michel Marie Getin, Meng Cao, Leonid Poslavsky, Torsten Rudolf Kaack, Hong Qiu