Patents by Inventor Toru Fujii

Toru Fujii has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 11029674
    Abstract: An information processing device determines, based on a preset threshold, whether the production index belongs to either a first section or a second section contained in one maintenance cycle of the member, wherein a change in the production index is larger in the second section than in the first section. The information processing device executes at least one of first processing in which the production index determined to belong to the first section is used and second processing in which the production index determined to belong to the second section is used.
    Type: Grant
    Filed: June 12, 2018
    Date of Patent: June 8, 2021
    Assignee: OMRON Corporation
    Inventors: Takayoshi Matsuyama, Reiko Hattori, Toru Fujii, Hideki Yachiku, Hiroshi Kuribayashi
  • Publication number: 20200211826
    Abstract: A plasma processing apparatus includes a processing vessel; a placing table, serving as a lower electrode, disposed within the processing vessel; an upper electrode serving as a facing electrode of the placing table; a plasma processor configured to form a gas within the processing vessel into plasma by supplying a high frequency power and to process a processing target object on the placing table with the plasma; a cover member configured to cover the upper electrode from thereabove; a cooler provided within the cover member and configured to cool the upper electrode with a coolant having a temperature lower than a dew point temperature of exterior air outside the processing vessel; and a gas supply configured to supply a low-dew point gas having a dew point temperature lower than the dew point temperature of the exterior air into a space surrounded by the cover member and the upper electrode.
    Type: Application
    Filed: December 23, 2019
    Publication date: July 2, 2020
    Inventors: Toru Fujii, Yoshitomo Konta, Kohei Otsuki
  • Patent number: 10639759
    Abstract: There are provided a load state diagnosis device and a load state diagnosis method for a servomotor. A PLC diagnoses the load state of the servomotor which rotationally drives a rotary tool in a predetermined rotational drive direction at a constant speed. The PLC includes a detection part that detects the rotational direction of a torque acting on the servomotor, a determination part that determines whether the rotational direction of the torque detected by the detection part is consistent with the predetermined rotational drive direction, and a load index output part that outputs a load index indicating the load state of the servomotor based on a determination result of the determination part.
    Type: Grant
    Filed: October 17, 2018
    Date of Patent: May 5, 2020
    Assignee: OMRON Corporation
    Inventors: Reiko Hattori, Takayoshi Matsuyama, Toru Fujii
  • Patent number: 10591824
    Abstract: According to one embodiment, an illumination optical apparatus comprises: a light splitting device which splits the beam into a plurality of beams with respective polarization states different from each other; a spatial light modulation device which is arranged on at least one of a first optical path in which a first beam out of the plurality of beams travels and a second optical path in which a second beam out of the plurality of beams travels, and which has a plurality of optical elements arranged two-dimensionally and driven individually; and a control device which controls the spatial modulation device to combine the first beam and the second beam at least in part.
    Type: Grant
    Filed: March 28, 2016
    Date of Patent: March 17, 2020
    Assignee: NIKON CORPORATION
    Inventor: Toru Fujii
  • Patent number: 10554035
    Abstract: An arc detector includes a current sensor, a power spectrum conversion unit that converts an output from the current sensor to a power spectrum, a section value obtaining unit that divides an arc measurement section for the power spectrum into a plurality of regions, and obtains, from region values for the plurality of regions excluding a maximum one of the region values, a region value to be a section value of the arc measurement section, and an arc determination unit that determines a presence of an arc by comparing the section value with a threshold.
    Type: Grant
    Filed: July 24, 2017
    Date of Patent: February 4, 2020
    Assignee: OMRON Corporation
    Inventors: Kohei Tomita, Toru Fujii, Reiko Hattori, Takeshi Ashida
  • Publication number: 20190184511
    Abstract: There are provided a load state diagnosis device and a load state diagnosis method for a servomotor. A PLC diagnoses the load state of the servomotor which rotationally drives a rotary tool in a predetermined rotational drive direction at a constant speed. The PLC includes a detection part that detects the rotational direction of a torque acting on the servomotor, a determination part that determines whether the rotational direction of the torque detected by the detection part is consistent with the predetermined rotational drive direction, and a load index output part that outputs a load index indicating the load state of the servomotor based on a determination result of the determination part.
    Type: Application
    Filed: October 17, 2018
    Publication date: June 20, 2019
    Applicant: OMRON Corporation
    Inventors: Reiko HATTORI, Takayoshi MATSUYAMA, Toru FUJII
  • Publication number: 20190181025
    Abstract: A monitoring system according to an aspect may construct a predictive model that predicts a value of a removal amount depending on values of an accumulated operating time and an accumulated number of processed wafers, based on learning data; acquires actual values of the accumulated operating time, the accumulated number of processed wafers, and the removal amount with respect to a wet etching apparatus when it is in operation; calculates a predicted value of the removal amount by inputting the acquired actual values of the accumulated operating time and the accumulated number of processed wafers to the predictive model; calculates the difference between the predicted value and the actual value of the removal amount, as an indicator value serving as a measure of how necessary it is to replace a chemical solution; and outputs information regarding replacement of the chemical solution based on the calculated indicator value.
    Type: Application
    Filed: September 17, 2018
    Publication date: June 13, 2019
    Applicant: OMRON Corporation
    Inventors: Yuya OTA, Toru FUJII, Shin EGAMI, Kosuke TSURUTA, Hiroki KOYAMA
  • Publication number: 20190072945
    Abstract: An information processing device determines, based on a preset threshold, whether the production index belongs to either a first section or a second section contained in one maintenance cycle of the member, wherein a change in the production index is larger in the second section than in the first section. The information processing device executes at least one of first processing in which the production index determined to belong to the first section is used and second processing in which the production index determined to belong to the second section is used.
    Type: Application
    Filed: June 12, 2018
    Publication date: March 7, 2019
    Applicant: OMRON Corporation
    Inventors: Takayoshi MATSUYAMA, Reiko HATTORI, Toru FUJII, Hideki YACHIKU, Hiroshi KURIBAYASHI
  • Patent number: 9823180
    Abstract: An evaluation subject formed by a cut sample of a conveyor belt is mounted on a flat substrate with an inner periphery-side cover rubber layer located on the upper side, a support roller mounted in a frame is horizontally pulled and rolled in the longitudinal direction of the evaluation subject by pulling the frame by a wire while the support roller is pressed vertically downward against the upper surface of the evaluation subject at a preset pressure using a pneumatic cylinder without substantial deformation of the outer peripheral surface thereof, and tensile force in a horizontal direction measured at this time by a tensile force sensor connected to the wire is evaluated as resistance to moving over the support roller.
    Type: Grant
    Filed: June 12, 2013
    Date of Patent: November 21, 2017
    Assignee: The Yokohama Rubber Co., LTD.
    Inventors: Shigehiko Amano, Gang Hou, Toru Fujii, Kazuya Okubo
  • Publication number: 20170324236
    Abstract: An arc detector includes a current sensor, a power spectrum conversion unit that converts an output from the current sensor to a power spectrum, a section value obtaining unit that divides an arc measurement section for the power spectrum into a plurality of regions, and obtains, from region values for the plurality of regions excluding a maximum one of the region values, a region value to be a section value of the arc measurement section, and an arc determination unit that determines a presence of an arc by comparing the section value with a threshold.
    Type: Application
    Filed: July 24, 2017
    Publication date: November 9, 2017
    Applicant: OMRON Corporation
    Inventors: Kohei TOMITA, Toru FUJII, Reiko HATTORI, Takeshi ASHIDA
  • Patent number: 9709820
    Abstract: A refractive Fresnel lens used for an optical system including an image plane, which includes a plurality of zone lens surfaces disposed concentrically and a plurality of side wall surfaces each formed between adjacent zone lens surfaces, is characterized in that the side wall surfaces are modulated so as to spatially spread in the image plane noise light due to reflection and/or refraction at the side wall surfaces.
    Type: Grant
    Filed: May 29, 2015
    Date of Patent: July 18, 2017
    Assignees: Essilor International (Compagnie Generale D'Optique), Nikon Corporation
    Inventors: Toru Fujii, Alain Goulet
  • Publication number: 20160209758
    Abstract: According to one embodiment, an illumination optical apparatus comprises: a light splitting device which splits the beam into a plurality of beams with respective polarization states different from each other; a spatial light modulation device which is arranged on at least one of a first optical path in which a first beam out of the plurality of beams travels and a second optical path in which a second beam out of the plurality of beams travels, and which has a plurality of optical elements arranged two-dimensionally and driven individually; and a control device which controls the spatial modulation device to combine the first beam and the second beam at least in part.
    Type: Application
    Filed: March 28, 2016
    Publication date: July 21, 2016
    Applicant: NIKON CORPORATION
    Inventor: Toru FUJII
  • Patent number: 9315608
    Abstract: A conjugated diene polymer rubber is provided that includes component (A) and component (B) below, component (A) having a content, with the total amount of component (A) and component (B) as 100% by weight, of from 5% to 90% by weight, and component (B) having a content of from 95% to 10% by weight, Component (A): a conjugated diene polymer rubber component modified with a carbonyl group- and substituted amino group-containing compound Component (B): a conjugated diene polymer rubber component modified with a compound represented by formula (IIa) below (R21O)mSi(R22A)nR234-m-n??(IIa) wherein m denotes a number from 1 to 3, n denotes a number from 1 to 3, m+n is from 2 to 4, R21 and R23 denote a hydrocarbyl group, R22 denotes a hydrocarbylene group, A denotes a substituted amino group or an optionally substituted hydrocarbyloxy group, when there are a plurality of R21s the plurality of R21s may be identical to or different from each other, when there are a plurality of R22s the plurality of R22s may be iden
    Type: Grant
    Filed: March 19, 2014
    Date of Patent: April 19, 2016
    Assignee: SUMITOMO CHEMICAL COMPANY, LIMITED
    Inventors: Toru Fujii, Takuya Sudo, Mayumi Oshima, Katsunari Inagaki
  • Patent number: 9310604
    Abstract: An illumination optical apparatus includes a light splitting device which splits the beam into a plurality of beams with respective polarization states different from each other, a spatial light modulation device which is arranged on at least one of a first optical path in which a first beam out of the plurality of beams travels and a second optical path in which a second beam out of the plurality of beams travels, and which has a plurality of optical elements arranged two-dimensionally and driven individually and a control device which controls the spatial modulation device to combine the first beam and the second beam at least in part.
    Type: Grant
    Filed: June 12, 2012
    Date of Patent: April 12, 2016
    Assignee: NIKON CORPORATION
    Inventor: Toru Fujii
  • Patent number: 9188177
    Abstract: A brake disc is provided capable of effectively reducing the generation of noise such as brake noise by making specifications relating to lightening holes different from each other between two brake disc plates. In the brake disc, two brake disc plates are laminated so as to slide on each other by vibration during braking, and specifications relating to one or more selected from lightening holes, plate thickness, diameter, and warpage are made different from each other between the brake disc plates. In addition, lightening holes are formed on at least one of the brake disc plates, and one or more specifications selected from the number of lightening holes, the shapes of the lightening holes, the sizes of the lightening holes, and the arrangement positions of the lightening holes are made different from each other between the brake disc plates.
    Type: Grant
    Filed: February 16, 2012
    Date of Patent: November 17, 2015
    Assignees: SUNSTAR ENGINEERING INC., THE DOSHISHA
    Inventors: Toru Fujii, Kazuya Okubo, Kiyotaka Obunai, Yoshihisa Kubota, Hideaki Okada, Tsuyoshi Nakatsuji
  • Publication number: 20150261008
    Abstract: A refractive Fresnel lens used for an optical system including an image plane, which includes a plurality of zone lens surfaces disposed concentrically and a plurality of side wall surfaces each formed between adjacent zone lens surfaces, is characterized in that the side wall surfaces are modulated so as to spatially spread in the image plane noise light due to reflection and/or refraction at the side wall surfaces.
    Type: Application
    Filed: May 29, 2015
    Publication date: September 17, 2015
    Inventors: Toru Fujii, Alain Goulet
  • Publication number: 20150241332
    Abstract: An evaluation subject formed by a cut sample of a conveyor belt is mounted on a flat substrate with an inner periphery-side cover rubber layer located on the upper side, a support roller mounted in a frame is horizontally pulled and rolled in the longitudinal direction of the evaluation subject by pulling the frame by a wire while the support roller is pressed vertically downward against the upper surface of the evaluation subject at a preset pressure using a pneumatic cylinder without substantial deformation of the outer peripheral surface thereof, and tensile force in a horizontal direction measured at this time by a tensile force sensor connected to the wire is evaluated as resistance to moving over the support roller.
    Type: Application
    Filed: June 12, 2013
    Publication date: August 27, 2015
    Applicant: The Yokohama Rubber Co., Ltd.
    Inventors: Shigehiko Amano, Gang Hou, Toru Fujii, Kazuya Okubo
  • Publication number: 20150013907
    Abstract: Disclosed is a microwave plasma processing apparatus. The microwave plasma processing apparatus includes a cooling plate. In addition, the microwave plasma processing apparatus includes an intermediate metal body installed on a processing container side of the cooling plate to be spaced apart from the cooling plate so that a spacing between the intermediate metal body and the cooling plate forms a waveguide of microwaves. The intermediate metal body is in contact with the cooling plate at one or plural convex portions arranged to block a portion of the waveguide. Further, the microwave plasma processing apparatus includes a coaxial waveguide configured to supply microwaves to the waveguide, a slot antenna plate configured to radiate microwaves via the waveguide, a dielectric window installed on the processing container side of the slot antenna plate, and a processing container installed to be sealed by the dielectric window.
    Type: Application
    Filed: July 9, 2014
    Publication date: January 15, 2015
    Applicant: TOKYO ELECTRON LIMITED
    Inventors: Toru FUJII, Toshihiko IWAO, Takahiro SENDA
  • Publication number: 20150013912
    Abstract: A microwave plasma processing apparatus includes an inner slow-wave plate installed above a first slot in an inner waveguide which transmits microwaves to the first slot by transmitting the microwaves in a center side space, which is positioned closer to the center than the convex portion in the space between the slot plate and the intermediate metal body, through the space between the inner conductor and the intermediate conductor. An outer slow-wave plate is installed above a second slot in an outer waveguide which transmits microwaves to the second slot by transmitting the microwaves in an outer periphery side space, which is positioned closer to an outer periphery than the convex portion in the space between the slot antenna plate and the intermediate metal body, sequentially through the space between the intermediate conductor and the outer conductor, and the space between the intermediate metal body and cooling plate.
    Type: Application
    Filed: July 9, 2014
    Publication date: January 15, 2015
    Applicant: TOKYO ELECTRON LIMITED
    Inventors: Toru FUJII, Toshihiko IWAO
  • Publication number: 20140326550
    Abstract: A brake disc is provided capable of effectively reducing the generation of noise such as brake noise by making specifications relating to lightening holes different from each other between two brake disc plates. In the brake disc, two brake disc plates are laminated so as to slide on each other by vibration during braking, and specifications relating to one or more selected from lightening holes, plate thickness, diameter, and warpage are made different from each other between the brake disc plates. In addition, lightening holes are formed on at least one of the brake disc plates, and one or more specifications selected from the number of lightening holes, the shapes of the lightening holes, the sizes of the lightening holes, and the arrangement positions of the lightening holes are made different from each other between the brake disc plates.
    Type: Application
    Filed: February 16, 2012
    Publication date: November 6, 2014
    Applicants: THE DOSHISHA, SUNSTAR ENGINEERING INC.
    Inventors: Toru Fujii, Kazuya Okubo, Kiyotaka Obunai, Yoshihisa Kubota, Hideaki Okada, Tsuyoshi Nakatsuji