Patents by Inventor Toru Ihara
Toru Ihara has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 11594427Abstract: A substrate processing apparatus performs increasing a pressure within a processing vessel up to a processing pressure higher than a threshold pressure of a processing fluid by supplying the processing fluid into the processing vessel in which a substrate having thereon a liquid is accommodated; and supplying the processing fluid into the processing vessel and draining the processing fluid while maintaining the pressure within the processing vessel at a level allowing the processing fluid to be maintained in a supercritical state. The increasing of the pressure includes: increasing the pressure to a first pressure; and increasing the pressure to the processing pressure from the first pressure. A temperature of the substrate is controlled to a first temperature in the increasing of the pressure to the first pressure, and is controlled to a second temperature higher than the first temperature in the increasing of the pressure to the processing pressure.Type: GrantFiled: November 24, 2020Date of Patent: February 28, 2023Assignee: TOKYO ELECTRON LIMITEDInventors: Toru Ihara, Gentaro Goshi, Masami Yamashita
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Publication number: 20230022814Abstract: A substrate processing method of drying a substrate by using a processing fluid in a supercritical state is performed by a substrate processing apparatus. The substrate processing apparatus includes a fluid discharge unit, a supply line, a fluid drain unit, a drain line and a flow control device. The substrate processing method includes: flowing the processing fluid from the fluid discharge unit to the fluid drain unit such that the processing fluid flows along a surface of the substrate. The flowing of the processing fluid includes flowing the processing fluid in a first flow mode and flowing the processing fluid in a second flow mode. Between the first flow mode and the second flow mode, a flow direction distribution of the processing fluid is different, and a switchover between the first flow mode and the second flow mode is performed by the flow control device.Type: ApplicationFiled: July 22, 2022Publication date: January 26, 2023Inventors: Saya Inoue, Satoru Tanaka, Shinichiro Shimomura, Toru Ihara, Satoshi Biwa
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Publication number: 20220130690Abstract: A substrate processing apparatus configured to dry a substrate with a processing fluid in a supercritical state includes: a processing vessel; a substrate holder configured to hold the substrate horizontally within the processing vessel; a first supply line connected to a first fluid supply provided at the processing vessel and configured to supply the processing fluid into the processing vessel; a drain line connected to a drain unit provided at the processing vessel and configured to drain the processing fluid from the processing vessel; a bypass line branched off from the first supply line and connected to the drain line, the bypass line being configured to allow at least a part of the processing fluid flowing in the first supply line to be drained into the drain line without passing through the processing vessel; and a bypass opening/closing valve configured to open or close the bypass line.Type: ApplicationFiled: October 22, 2021Publication date: April 28, 2022Inventors: Toru Ihara, Satoru Tanaka, Gentaro Goshi, Masami Yamashita, Reijiro Yamanaka, Hideaki Kumashiro
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Publication number: 20210159095Abstract: A substrate processing apparatus performs increasing a pressure within a processing vessel up to a processing pressure higher than a threshold pressure of a processing fluid by supplying the processing fluid into the processing vessel in which a substrate having thereon a liquid is accommodated; and supplying the processing fluid into the processing vessel and draining the processing fluid while maintaining the pressure within the processing vessel at a level allowing the processing fluid to be maintained in a supercritical state. The increasing of the pressure includes: increasing the pressure to a first pressure; and increasing the pressure to the processing pressure from the first pressure. A temperature of the substrate is controlled to a first temperature in the increasing of the pressure to the first pressure, and is controlled to a second temperature higher than the first temperature in the increasing of the pressure to the processing pressure.Type: ApplicationFiled: November 24, 2020Publication date: May 27, 2021Inventors: Toru Ihara, Gentaro Goshi, Masami Yamashita
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Patent number: 10851468Abstract: A substrate processing apparatus includes a holding device that includes a conductive member and holds a substrate, a conduction path structure that includes a conductive material and positioned such that the conduction path structure is in contact with the holding device, a supply device that supplies a processing liquid to the substrate held by the holding device, and a grounding structure including a variable resistance device that changes a resistance such that the grounding structure has a first end portion connected the conduction path structure and a second end portion connected to a ground potential.Type: GrantFiled: March 14, 2017Date of Patent: December 1, 2020Assignee: TOKYO ELECTRON LIMITEDInventors: Tadashi Iino, Toru Ihara, Yoshihiro Kai, Yoichi Tokunaga
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Publication number: 20170283977Abstract: A substrate processing apparatus includes a holding device that includes a conductive member and holds a substrate, a conduction path structure that includes a conductive material and positioned such that the conduction path structure is in contact with the holding device, a supply device that supplies a processing liquid to the substrate held by the holding device, and a grounding structure including a variable resistance device that changes a resistance such that the grounding structure has a first end portion connected the conduction path structure and a second end portion connected to a ground potential.Type: ApplicationFiled: March 14, 2017Publication date: October 5, 2017Applicant: TOKYO ELECTRON LIMITEDInventors: Tadashi IINO, Toru IHARA, Yoshihiro KAI, Yoichi TOKUNAGA
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Patent number: 7965871Abstract: A moving-state determining device acquires a first overhead image from a bird's-eye image obtained at first image pickup timing and acquires a second overhead image, which can be regarded as the same road surface area as that of the first overhead image, for each of moving directions assumed for the moving body from a bird's-eye image obtained at second image pickup timing different from the first image pickup timing by a predetermined time period. The device compares a degree of similarity between the first overhead image and each of a plurality of second overhead images to acquire the second overhead image with the largest similarity degree as the same road surface area as that of the first overhead image. The device acquires the moving direction and a lateral displacement amount in the moving from a coordinate conversion condition based on which the second overhead image has been obtained.Type: GrantFiled: July 13, 2007Date of Patent: June 21, 2011Assignees: Mitsubishi Fuso Truck and Bus Corporation, Keio UniversityInventors: Toru Ihara, Keiichi Yamamoto, Tomoaki Teshima, Hideo Saito, Shinji Ozawa
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Publication number: 20090177359Abstract: A collision damage reducing apparatus for lessening vehicle collision damage, includes: designated obstacle detecting means detecting an object having a collision possibility to be a obstacle; calculating means obtaining a continuous detecting period, for which the object is detected as the obstacle; monitoring target acknowledging means, according to the continuous detecting period, deciding whether or not the obstacle is regarded as a monitoring target, and deciding whether or not the obstacle is regarded as an activation cause; reliability determining means judging a collision possibility if the continuous detecting period is longer than a threshold value, and defining a reliability level coefficient indicating obstacle's reliability if a result of the judging of the collision possibility is positive; attentiveness determining means defining attentiveness coefficient decreased according to attentiveness deterioration; and detecting period threshold value adjusting means decreasing the threshold value accorType: ApplicationFiled: December 16, 2008Publication date: July 9, 2009Inventors: Toru Ihara, Keiichi Yamamoto
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Publication number: 20090125237Abstract: A monitoring target detecting apparatus, which is associated with a collision damage reducing apparatus, includes designated obstacle detecting means, which is equipped with the vehicle, detecting an object being positioned in the moving direction and having a possibility of a collision with the vehicle to be a designated obstacle; detecting period calculating means obtaining a continuous detecting period, for which the object has been uninterruptedly detected as the designated obstacle; and monitoring target acknowledging means, according to the continuous detecting period obtained by the detecting period calculating means, deciding whether or not the designated obstacle is regarded as a monitoring target that is to be monitored by the damage reducing apparatus, and deciding whether or not the designated obstacle is regarded as an activation cause to activate the equipment activated under control by the damage reducing apparatus.Type: ApplicationFiled: October 29, 2008Publication date: May 14, 2009Inventors: Tetsuya Kitagawa, Keiichi Yamamoto, Toru Ihara
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Patent number: 7388967Abstract: A vehicle running state judging apparatus calculates the edge detecting position of the first pixel group detected by the first gray value detection section, the edge detecting position of the second pixel group based on the gray value at that position, and the gray value at that position and judges meandering of a vehicle by comparing the edge detecting position of the second pixel group detected by the second gray value detection section and the gray value at that position, with the edge detecting position of the second pixel group calculated by the calculation section and the gray value at that position.Type: GrantFiled: March 28, 2005Date of Patent: June 17, 2008Assignee: Mitsubishi Fuso Truck and Bus CorporationInventors: Toru Ihara, Keiichi Yamamoto
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Patent number: 7369942Abstract: The present invention provides a vehicle traveling state determining apparatus including a camera which picks up an image of a road surface in a direction in which a vehicle is traveling, and zigzag state detecting section for determining a zigzag amount on the basis of the road surface image picked up using the camera, wherein the zigzag state detecting section is comprised of speed vector calculating section for calculating a speed vector of the road surface image by comparing a last road surface image picked up using the camera with a current road surface image picked up using the camera, and determining section for determining whether or not the vehicle is traveling in a zigzag line on the basis of the speed vector of the road surface image calculated by the speed vector detecting section.Type: GrantFiled: March 9, 2005Date of Patent: May 6, 2008Assignee: Mitsubishi Fuso Truck and Bus CorporationInventors: Toru Ihara, Keiichi Yamamoto
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Publication number: 20080013790Abstract: A moving-state determining device acquires a first overhead image from a bird's-eye image obtained at first image pickup timing and acquires a second overhead image, which can be regarded as the same road surface area as that of the first overhead image, for each of moving directions assumed for the moving body from a bird's-eye image obtained at second image pickup timing different from the first image pickup timing by a predetermined time period. The device compares a degree of similarity between the first overhead image and each of a plurality of second overhead images to acquire the second overhead image with the largest similarity degree as the same road surface area as that of the first overhead image. The device acquires the moving direction and a lateral displacement amount in the moving from a coordinate conversion condition based on which the second overhead image has been obtained.Type: ApplicationFiled: July 13, 2007Publication date: January 17, 2008Inventors: Toru Ihara, Keiichi Yamamoto, Tomoaki Teshima, Hideo Saito, Shinji Ozawa
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Patent number: 7317383Abstract: With the intention of issuing an alert responsive to judgment of dozing at wheel or deviation from the lane, there is provided an alert system installed in a vehicle including driving state detecting device for detecting driving state of the vehicle; a mobile telephone including a camera; holding device for detachably holding the mobile telephone in an interior of the vehicle such that the camera is able to acquire an image ahead of the vehicle; and alert issuing device for issuing an alert from the mobile telephone based on the image ahead of the vehicle obtained by the camera and the driving state detected by the driving state detecting device.Type: GrantFiled: October 24, 2005Date of Patent: January 8, 2008Assignee: Mitsubishi Fuso Truck and Bus CorporationInventors: Toru Ihara, Keiichi Yamamoto
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Publication number: 20070241914Abstract: Awakening degree calculating means calculates an awakening degree at intervals of 15 seconds for example that is shorter than a shortest period of changes of awakening level, and output control means updates and outputs a display output and an alarm sound output based on the awakening degree in accordance to an output condition logic set in advance. When the awakening degree drops less than a predetermined threshold value, the output control means updates the display output of the awakening degree at first time intervals in calculating the awakening degree and outputs the alarm sound output corresponding to a worsened level of the awakening degree. When the awakening degree is not lower than the predetermined threshold value or when the awakening degree recovers by exceeding the predetermined threshold value, the output control means updates the display output at second time intervals that are longer than the first time intervals.Type: ApplicationFiled: March 28, 2007Publication date: October 18, 2007Inventors: Toru Ihara, Keiichi Yamamoto
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Patent number: 7190274Abstract: A consciousness judging apparatus, which detects a vehicle driving state and judges consciousness of a driver, comprising a monotonousness detection section to obtain monotonousness, a camera which captures an image of a road surface in the vehicle running direction, a meander quantity detection section which detects the meander quantity based on the road surface image taken by the camera, a correction section which corrects and increases the monotonousness when the meander quantity detected this time by the meander quantity detection section is larger than the meander quantity detected last time by the meander quantity detection section by the value greater than a predetermined value ?, and a fuzzy inference section which infers a driver's consciousness based on the monotonousness corrected by the correction section and meander quantity.Type: GrantFiled: March 28, 2005Date of Patent: March 13, 2007Assignee: Mitsubishi Fuso Truck and Bus CorporationInventors: Toru Ihara, Keiichi Yamamoto
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Patent number: 7152000Abstract: The present invention provides zigzag state detecting section which is comprised of white line determining section for determining parts of the road surface which are similar to white lines, white line position detecting section for detecting positions, approximating section for approximating the positions, left-hand zigzag amount determining means for calculating a zigzag amount of a left-hand boundary, right-hand zigzag amount determining section for calculating a zigzag amount of a right-hand boundary, and calculating section for calculating an average zigzag amount of the vehicle on the basis of results of the calculations by the left-hand zigzag amount calculating section and the right-hand zigzag amount calculating section.Type: GrantFiled: March 18, 2005Date of Patent: December 19, 2006Assignee: Mitsubishi Fuso Truck and Bus CorporationInventors: Toru Ihara, Keiichi Yamamoto
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Publication number: 20060217860Abstract: A lane keeping assistant apparatus assists steering force when the vehicle is about to deviate from the lane to provide the driver with improved steering feeling. The lane keeping assistant apparatus includes traveling position detecting means for detecting a traveling position of a vehicle; lane center locating means for locating the width center of a lane on which the vehicle is traveling; lateral deviation amount calculating means for calculating a lateral deviation amount of the traveling position relative to the width center; a power source for providing a steering unit of the vehicle with an assist torque; assist torque determining means for determining the assist torque to be provided by the power source based on the lateral deviation amount, wherein the assist torque determining means gradually reduces the assist torque if the lateral deviation amount is being reduced by a driver's steering operation.Type: ApplicationFiled: March 24, 2006Publication date: September 28, 2006Applicant: Mitsubishi Fuso Truck and Bus CorporationInventor: Toru Ihara
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Publication number: 20060217861Abstract: A lane keeping assistant apparatus alerts the driver when the vehicle deviates from the lane center, and aims at the driver's sure recognition of lateral deviation of the vehicle from the lane and concurrently at the avoidance of driver's overreliance on the apparatus. As a solution, the apparatus generates, on a steering wheel 1 of a vehicle, a pulse-like torque in a shape and, or frequency that does not affect the vehicle dynamics. Since such a frequency input can be haptically perceived by a human with ease, it is possible to make the driver notice the operation carried out by the apparatus without generating a yaw moment on the vehicle.Type: ApplicationFiled: March 24, 2006Publication date: September 28, 2006Applicant: Mitsubishi Fuso Truck and Bus CorporationInventors: Toru Ihara, Keiichi Yamamoto, Andreas Wingert
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Publication number: 20060103513Abstract: With the intention of issuing an alert responsive to judgment of dozing at wheel or deviation from the lane, there is provided an alert system installed in a vehicle including driving state detecting means for detecting driving state of the vehicle; a mobile telephone including a camera; holding means for detachably holding the mobile telephone in an interior of the vehicle such that the camera is able to acquire an image ahead of the vehicle; and alert issuing means for issuing an alert from the mobile telephone based on the image ahead of the vehicle obtained by the camera and the driving state detected by the driving state detecting means.Type: ApplicationFiled: October 24, 2005Publication date: May 18, 2006Inventors: Toru Ihara, Keiichi Yamamoto
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Publication number: 20050251336Abstract: The present invention provides zigzag state detecting section which is comprised of white line determining section for determining parts of the road surface which are similar to white lines, white line position detecting section for detecting positions, approximating section for approximating the positions, left-hand zigzag amount determining means for calculating a zigzag amount of a left-hand boundary, right-hand zigzag amount determining section for calculating a zigzag amount of a right-hand boundary, and calculating section for calculating an average zigzag amount of the vehicle on the basis of results of the calculations by the left-hand zigzag amount calculating section and the right-hand zigzag amount calculating section.Type: ApplicationFiled: March 18, 2005Publication date: November 10, 2005Applicant: Mitsubishi Fuso Truck and Bus CorporationInventors: Toru Ihara, Keiichi Yamamoto