Patents by Inventor Toru MASUNO

Toru MASUNO has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20200080189
    Abstract: A flow resistant part having a rod shape is disposed in a raw liquid introduction path in a manner such that the raw liquid is sprayed onto a vaporization plate to reduce the conductance of the raw liquid introduction path with respect to the raw liquid. Because the pressure on an outlet side of the liquid mass flow controller is increased, and the pressure difference from the pressure on the inlet side of the liquid mass flow controller is reduced, the occurrence of cavitation can be prevented. A plurality of the flow resistant parts can be provided.
    Type: Application
    Filed: September 11, 2019
    Publication date: March 12, 2020
    Applicants: ULVAC, INC., SHARP KABUSHIKI KAISHA, SAKAI DISPLAY PRODUCTS CORPORATION
    Inventors: Yuko KATO, Satohiro OKAYAMA, Shuichi OKANO, Takahiro YAJIMA, Takashi OCHI, Takeshi HIRASE, Tsuyoshi SENZAKI, Takuji KATO, Katsuhiko KISHIMOTO, Toru MASUNO