Patents by Inventor Toru Mitomo

Toru Mitomo has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method for supplying liquid material and process for forming thin films using the liquid material supplying method
    Patent number: 5552181
    Abstract: A method of supplying, in a gaseous phase, a material which is in a viscous liquid phase at normal temperature. The viscous liquid material is provided in a bubbler and the pressure of the vessel is maintained below atmospheric pressure. A carrier gas is supplied through a nozzle opening in the liquid material inside the vessel. The carrier gas is temporarily dissolved in the liquid and then released to form fine bubbles into which the liquid material is vaporized, so that the vapor of the material is supplied together with the carrier gas.
    Type: Grant
    Filed: December 21, 1993
    Date of Patent: September 3, 1996
    Assignee: Kawasaki Steel Corporation
    Inventors: Eiichi Kondoh, Toru Mitomo, Hiroshi Yamamoto, Tomohiro Ohta