Abstract: An optical modulator includes a relay substrate having signal conductor patterns that connect input signal terminals and signal electrodes of an optical modulation element and ground conductor patterns, and a housing that accommodates the optical modulation element and the relay substrate. Regarding at least one signal conductor pattern, the two ground conductor patterns sandwiching the signal conductor pattern are formed in an asymmetrical shape in a plan view in a rectangular connection area including a signal connection portion at which the signal conductor pattern and the input signal terminal are connected. The connection area is centered on the at least one signal conductor pattern in a width direction, and has a width equal to a distance to the nearest adjacent signal conductor pattern and a height equal to a distance from an end of the signal connection portion farthest from a signal input side to the signal input side.

Abstract: An optical modulator includes an optical modulation element having a plurality of signal electrodes, a plurality of signal input terminals, a relay substrate on which a plurality of signal conductor patterns that electrically connect the signal input terminals and the signal electrodes and a plurality of ground conductor patterns are formed, and a housing. A signal input side and signal output side of the relay substrate face each other in a plan view, and electromagnetic wave propagation suppressing units that are made of a material that absorbs electromagnetic waves and have a height protruding from a surface of the relay substrate are provided, along at least one side of an end portion of the signal input side and an end portion of the signal output side in the plan view.

Abstract: An optical modulator includes: an optical modulation element that is configured to generate two modulated light beams, each of which is modulated by two sets of electrical signals, and that includes a plurality of signal electrodes; a plurality of signal input terminals, each of which inputs an electrical signal; a relay substrate on which a plurality of signal conductor patterns and a plurality of ground conductor patterns are formed, the relay substrate being configured to propagate the two sets of electrical signals by two pairs of the adjacent signal conductor patterns; and a housing, in which the at least two signal conductor patterns including at least one parts mounting part including electrical circuit elements are configured such that first signal propagation directions, which are signal propagation directions at the parts mounting parts, are different from each other.

Abstract: In an optical waveguide device having a plurality of intersections between a convex optical waveguide and a signal electrode, the generation of disturbance modulation at the intersections is effectively reduced, thereby achieving good operating characteristics. An optical waveguide device includes a substrate on which an optical waveguide is formed, an intermediate layer formed on the substrate, and a signal electrode and a ground electrode formed on the intermediate layer, in which the optical waveguide includes a protruding portion extending on the substrate, the signal electrode has an action portion that extends along the optical waveguide and controls a light wave propagating through the optical waveguide, and an intersection that crosses over the optical waveguide, and the intermediate layer is formed such that a thickness at the intersection is thicker than a thickness at the action portion.

Abstract: An optical waveguide device including: an optical waveguide composed of a protruding portion extending on a substrate; a signal electrode that is formed on the substrate and controls light waves propagating through the optical waveguide, in which the optical waveguide includes a Mach-Zehnder optical waveguide including two parallel waveguides having curved portions, the signal electrode includes two signal lines for transmitting a differential signal, respectively intersecting the two parallel waveguides at the curved portions, and in an intersection region, which is a region on the substrate where the two signal lines and the two parallel waveguides intersect, at least one of the two signal lines has a signal propagation velocity faster than in a portion other than the intersection region or one of the two signal lines has a signal propagation velocity faster than an other signal line.

Abstract: In an optical waveguide device having a plurality of intersections between a convex optical waveguide and a signal electrode, the occurrence of disturbance modulation at the intersections is effectively reduced, thereby achieving good operating characteristics. The optical waveguide device includes an optical waveguide composed of a protruding portion extending on the substrate, and a signal electrode formed on the substrate and controlling a light wave propagating through the optical waveguide. The optical waveguide includes a Mach-Zehnder optical waveguide including two parallel waveguides having a curved portions, the signal electrode includes two signal lines intersecting the two parallel waveguides at the curved portions and transmitting a differential signal, and each of the two signal lines is configured such that the intersection lengths on the two parallel waveguides are the same as each other.

Abstract: An optical modulator includes an optical waveguide device including an optical waveguide and a signal electrode for controlling a light wave propagating through the optical waveguide, a drive circuit that outputs two high-frequency signals, and two termination resistors for respectively terminating the two high-frequency signals, in which one high-frequency signal among the high-frequency signals output from the drive circuit propagates through the signal electrode of the optical waveguide device and is terminated by a first termination resistor that is one of the termination resistors, an other high-frequency signal among the high-frequency signals output from the drive circuit is terminated by a second termination resistor that is an other one of the termination resistors, a resistance value of the first termination resistor is lower than a resistance value of the second termination resistor, and the signal electrode includes a plurality of sections having constant impedances different from each other.

Abstract: An optical modulator includes a relay substrate having signal conductor patterns that connect signal input terminals and signal electrodes of an optical modulation element and ground conductor patterns, and a housing, in which the signal conductor pattern includes a component mounting portion including an electrical circuit element. Two ground conductor patterns sandwiching the signal conductor pattern are formed in an asymmetrical shape in a plan view within a component mounting area having a square shape in the plan view centered on the component mounting portion. A direction of a side of the component mounting area having the square shape is same as the extending direction of the signal conductor pattern and a length of a side of the component mounting area is equal to a distance from a center of the component mounting portion to a portion on an adjacent signal conductor pattern closest to the center.

Abstract: An electrostatic chuck device comprising: a plate-shaped electrostatic chuck part which has an electrostatic adsorption electrode provided therein and has a mounting surface on which a plate-shaped sample is mounted; and a base part which supports the electrostatic chuck part on a support surface thereof from an opposite side of the mounting surface, wherein the base part has a disk shape which has a central axis at a center thereof, and a coolant channel extending along the support surface is provided inside the base part, wherein the coolant channel includes an outer peripheral channel which overlaps an outer edge of the plate-shaped sample when viewed from an axial direction of the central axis, and an inner peripheral channel which is disposed on an inner side in a radical direction than the outer peripheral channel, wherein at least a portion of the inner peripheral channel extends spirally around the central axis, and a channel cross-sectional area of the inner peripheral channel decreases as a distance

Abstract: The optical absorption loss of the optical waveguide and the signal propagation loss of the high-frequency signal electrode are both reduced at a plurality of intersections between the convex optical waveguide and the high-frequency signal electrode, thereby achieving good operating characteristics. An optical waveguide device includes a substrate on which optical waveguides are formed, and an electrode that is formed on the substrate and has intersections crossing over the optical waveguides, in which the optical waveguides are configured by protruding portions extending on the substrate, and an intermediate layer made of a resin is provided at the adjacent intersections along the electrode to fill spaces between the protruding portions along the electrode and covers top of the protruding portions.

Abstract: In an optical waveguide device using a convex optical waveguide, the absorption loss of guided light at an intersection between an optical waveguide and an electrode is reduced, without deteriorating optical characteristics and reducing long-term reliability. Provided is an optical waveguide device including a substrate on which an optical waveguide is formed, and an electrode having an intersection crossing over the optical waveguide on the substrate, in which the optical waveguide is formed with a protruding portion extending on the substrate, a resin layer is provided between the optical waveguide and the electrode at the intersection, the resin layer is formed to cover an upper surface and a side surface of the protruding portion of the optical waveguide, and in a cross section along a width direction of the optical waveguide, a boundary with the electrode is formed with a curve.

Abstract: An optical modulator includes: an optical waveguide element including an optical waveguide formed on a substrate and a signal electrode for controlling a light wave propagating through the optical waveguide; a drive circuit for outputting two high-frequency signals; and two terminating resistors for respectively terminating outputs of the two high-frequency signals from the drive circuit. The output of one of the high-frequency signals of the drive circuit propagates through the signal electrode of the optical waveguide element and is terminated by a first terminating resistor which is one of the terminating resistors. The output of the other of the high-frequency signals of the drive circuit is terminated by a second terminating resistor which is the other of the terminating resistors. A resistance value of the second terminating resistor is greater than a resistance value of the first terminating resistor.

Abstract: An optical modulator includes an optical modulation element including an optical waveguide formed on a substrate and a housing that accommodates the optical modulation element, the housing has a bottom surface wall having a quadrilateral shape in a plan view, first and second long side walls that are connected to two opposite edges of the bottom surface wall, and first and second short side walls that are shorter than the first and second long side walls and are connected to two other opposite edges of the bottom surface wall. An average wall thickness of the second long side wall is equal to or larger than an average wall thickness of the first long side wall. At least one of the first and second short side walls has an average thickness that is thinner than the average thickness of the first long side wall.

Abstract: An optical modulator has an optical modulation element including optical waveguides and a housing that accommodates the optical modulation element. The housing has a bottom surface wall having a quadrilateral shape in a plan view, first and second long side walls that are connected to two opposite edges of the bottom surface wall, and first and second short side walls, shorter than the long side walls, and connected to two other opposite edges of the bottom surface wall. The optical modulation element is accommodated in a space surrounded by the bottom surface wall and the side walls. The second long side wall has a wall thickness that is equal to or larger than that of the first long side wall, and at least one of the first and second short side walls has a wall thickness that is thinner than that of the first long side wall.

Abstract: An optical modulator includes a relay substrate having signal conductor patterns that connect input signal terminals and signal electrodes of an optical modulation element and ground conductor patterns, and a housing that accommodates the optical modulation element and the relay substrate. Regarding at least one signal conductor pattern, the two ground conductor patterns sandwiching the signal conductor pattern are formed in an asymmetrical shape in a plan view in a rectangular connection area including a signal connection portion at which the signal conductor pattern and the input signal terminal are connected. The connection area is centered on the at least one signal conductor pattern in a width direction, and has a width equal to a distance to the nearest adjacent signal conductor pattern and a height equal to a distance from an end of the signal connection portion farthest from a signal input side to the signal input side.

Abstract: An optical modulator includes: an optical modulation element that is configured to generate two modulated light beams, each of which is modulated by two sets of electrical signals, and that includes a plurality of signal electrodes; a plurality of signal input terminals, each of which inputs an electrical signal; a relay substrate on which a plurality of signal conductor patterns and a plurality of ground conductor patterns are formed, the relay substrate being configured to propagate the two sets of electrical signals by two pairs of the adjacent signal conductor patterns; and a housing, in which the at least two signal conductor patterns including at least one parts mounting part including electrical circuit elements are configured such that first signal propagation directions, which are signal propagation directions at the parts mounting parts, are different from each other.

Abstract: An optical modulator includes: an optical modulation element including a plurality of signal electrodes and generating two modulated light beams, each of which is modulated by two sets of electrical signals; a plurality of signal input terminals, each of which inputs an electrical signal; a relay substrate on which a plurality of signal and ground conductor patterns are formed, the relay substrate propagating the two sets of electrical signals by two pairs of the adjacent signal conductor patterns; and a housing, in which at least one signal conductor pattern includes at least one component mounting portion including at least a parallel circuit of a resistor and a capacitor, and the relay substrate includes a metal body connected on the ground conductor pattern or a substrate removal portion that sandwiches a portion of the signal conductor pattern downstream of the component mounting portion along a propagation direction of the electrical signal.

Abstract: An optical modulator includes a relay substrate having signal conductor patterns that connect signal input terminals and signal electrodes of an optical modulation element and ground conductor patterns, and a housing, in which the signal conductor pattern includes a component mounting portion including an electrical circuit element. Two ground conductor patterns sandwiching the signal conductor pattern are formed in an asymmetrical shape in a plan view within a component mounting area having a square shape in the plan view centered on the component mounting portion. A direction of a side of the component mounting area having the square shape is same as the extending direction of the signal conductor pattern and a length of a side of the component mounting area is equal to a distance from a center of the component mounting portion to a portion on an adjacent signal conductor pattern closest to the center.

Abstract: An optical waveguide element including a substrate, an optical waveguide formed on the substrate, and an electrode for controlling a light wave propagating through the optical waveguide, in which the optical waveguide and the electrode have an intersection in which the optical waveguide and the electrode intersect with each other, and at the intersection, the electrode has a multilayer structure including a plurality of metal layers made of a metal material, and a resin layer made of a resin material is formed between the electrode and the substrate.

Abstract: An optical modulator that can effectively dissipate heat generated from the inside includes: an optical modulation element which includes an optical waveguide and a radio frequency electrode for controlling light waves propagating through the optical waveguide; a termination resistor electrically connected to the radio frequency electrode; a termination resistor board on which the termination resistor is disposed; and a package case, which houses the optical modulation element and the termination resistor board, in which a plurality of protrusion portions are formed on one external surface of the package case, and at least one of the protrusion portions is formed at a position on the external surface of the package case, which faces a position inside the package case where the termination resistor board is disposed with the package case in between.