Abstract: In the present invention, a high-purity metallic tin suitable for use in an EUV exposure device is provided through use of an oxidation-resistant metallic tin, the oxidation-resistant metallic tin containing 99.995 mass % or more of tin, and unavoidable impurities, and the thickness of an oxide film being 2.0 nm or less when the surface of a cut face of the oxidation-resistant metallic tin is measured by AES.

Abstract: A substrate processing apparatus, includes: a process chamber accommodating a substrate; a vaporizer vaporizing a liquid precursor to generate reaction gas and deliver a processing gas containing the reaction gas and a carrier gas, the vaporizer including: a vaporization vessel; and a heater heating the liquid precursor introduced into the vessel; a carrier gas flow rate controller controlling flow rate of the carrier gas supplied to the vaporizer; a liquid precursor flow rate controller controlling flow rate of the liquid precursor; a processing gas supply pipe introducing the processing gas delivered from the vaporizer into the process chamber; and a gas concentration sensor detecting a gas concentration of the reaction gas contained in the processing gas delivered from the vaporizer into the processing gas supply pipe.

Abstract: A liquid crystal display device restraining display defects even in a structure having a potential difference between an externally-connected electrode potential and the mean potential of the drive waveform of a liquid crystal material. An electrostatic charge stored in the vicinity of a liquid crystal layer of the liquid crystal display device as a result of the potential difference between an externally-connected electrode potential and the mean potential of the drive waveform of the liquid crystal material is dispersed by employing a capacitor or an arrester connected to ground. Accordingly, discharge of the stored charge is facilitated, and occurrence of display defects is restrained.

Abstract: A liquid crystal display device restraining display defects even in a structure having a potential difference between an externally-connected electrode potential and the mean potential of the drive waveform of a liquid crystal material. An electrostatic charge stored in the vicinity of a liquid crystal layer of the liquid crystal display device as a result of the potential difference between an externally-connected electrode potential and the mean potential of the drive waveform of the liquid crystal material is dispersed by employing a capacitor or an arrester connected to ground. Accordingly, discharge of the stored charge is facilitated, and occurrence of display defects is restrained.