Abstract: A conventional substrate processing apparatus for generating plasma cannot generate plasma with high density and thus throughput of substrate processing is low. In order to solve this problem, provided is a substrate processing apparatus including a reaction vessel having a tubular shape and provided with a coil installed at an outer circumference thereof; a cover installed at a first end of the reaction vessel; a gas introduction port installed at the cover; a first plate installed between the gas introduction port and an upper end of the coil; a second plate installed between the first plate and the upper end of the coil; a substrate processing chamber installed at a second end of the reaction vessel; and a gas exhaust part connected to the substrate processing chamber.

Abstract: An anchor bolt (40) according to the present invention has a taper member (7) threadably engaged with the rod (4), and three or five abutment parts (12) fitted over the taper member (7). The taper member (7) has a cross section in a form of an equilateral triangle or pentagon, and three or five inclined surfaces (10) at respective sides of the triangle or pentagon. The inclined surfaces (10) are inclined closer to a central axis of the taper member (7) toward a base end of the anchor bolt (40). Each abutment part (12) has an inner surface (11) which is inclined closer to the central axis of the taper member (7) toward the base end and which abuts the inclined surface (10) of the taper member (7).

Abstract: An anchor bolt which is surely fixed to, for example, a rock wall and is easy to carry and store is provided. The anchor bolt according to the present invention has expandable devices (5) which are disposed at three locations of a rod (3). When the anchor bolt is inserted into a bore (2), a free end of an abutment part (16) of the expandable device (5) abuts an inner peripheral surface (26) of the bore (2), and expandable members (13) are held in the bore (2). In this state, when a taper member (12) is moved toward a base end of the anchor bolt along with the rod (3), an inclined surface (15) of the taper member (12) surface-contacts an inner surface (19) of the abutment part (16), and an outer peripheral surface (20) of the abutment part (16) is pressed against an inner peripheral surface 26 of the bore (2).

Abstract: An anchor bolt (40) according to the present invention has a taper member (7) threadably engaged with the rod (4), and three or five abutment parts (12) fitted over the taper member (7). The taper member (7) has a cross section in a form of an equilateral triangle or pentagon, and three or five inclined surfaces (10) at respective sides of the triangle or pentagon. The inclined surfaces (10) are inclined closer to a central axis of the taper member (7) toward a base end of the anchor bolt (40). Each abutment part (12) has an inner surface (11) which is inclined closer to the central axis of the taper member (7) toward the base end and which abuts the inclined surface (10) of the taper member (7).

Abstract: An anchor bolt which is surely fixed to, for example, a rock wall and is easy to carry and store is provided. The anchor bolt according to the present invention has expandable devices (5) which are disposed at three locations of a rod (3). When the anchor bolt is inserted into a bore (2), a free end of an abutment part (16) of the expandable device (5) abuts an inner peripheral surface (26) of the bore (2), and expandable members (13) are held in the bore (2). In this state, when a taper member (12) is moved toward a base end of the anchor bolt along with the rod (3), an inclined surface (15) of the taper member (12) surface-contacts an inner surface (19) of the abutment part (16), and an outer peripheral surface (20) of the abutment part (16) is pressed against an inner peripheral surface 26 of the bore (2).