Patents by Inventor Toshiaki Akasaka

Toshiaki Akasaka has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 7702475
    Abstract: An inspecting method includes registering a pre-obtained relationship between contact time of probes with a target object having a predetermined temperature and tip positions of the probes which vary in accordance with the contact time. The method further includes inspecting one or more chips at a time by estimating the tip positions of the probes based on the relationship and the contact time of the probes with the one or more chips and then correcting the tip positions of the probes from previous tip positions based on the estimated tip positions until the probes are stable without being extended or contracted.
    Type: Grant
    Filed: May 23, 2008
    Date of Patent: April 20, 2010
    Assignee: Tokyo Electron Limited
    Inventors: Hideaki Tanaka, Toshiaki Akasaka
  • Publication number: 20090002011
    Abstract: An inspecting method includes registering a pre-obtained relationship between contact time of the probes with the target object having the predetermined temperature and tip positions of the probes which vary in accordance with the contact time. The method further includes inspecting the chips by estimating the tip positions of the probes based on the relationship and the contact time of the probes with the chips upon the inspection and then correcting the tip positions of the probes from previous tip positions based on the estimated values until the probes are stable without being extended or contracted during the inspection.
    Type: Application
    Filed: May 23, 2008
    Publication date: January 1, 2009
    Applicant: TOKYO ELECTRON LIMITED
    Inventors: Hideaki Tanaka, Toshiaki Akasaka
  • Publication number: 20060258047
    Abstract: At least one exemplary embodiment is directed to a method of cutting a member by irradiating the member with a laser beam including the steps of forming an internal processing area in the depth direction of the member by focusing the laser beam inside the member and forming a melt area extending in the depth direction of the member by focusing the laser beam on the surface of the member or inside the member.
    Type: Application
    Filed: May 2, 2006
    Publication date: November 16, 2006
    Applicant: Canon Kabushiki Kaisha
    Inventors: Masayuki Nishiwaki, Junichiro Iri, Toshiaki Akasaka, Sadayuki Sugama
  • Patent number: 6490537
    Abstract: A data communication method comprises the steps of transmitting, in a batch, measurement data necessary for measurement of electrical characteristics of a plurality of objects to be tested from a probing apparatus to a tester, prior to conducting a test of the electrical characteristics of the objects, the probing apparatus being connected to the tester and measuring the electrical characteristics of the objects, and transmitting, in a batch, measurement result data on two or more of the objects from the tester to the probing apparatus after the electrical characteristics of the two or more of the objects have been measured.
    Type: Grant
    Filed: November 2, 2000
    Date of Patent: December 3, 2002
    Assignee: Tokyo Electron Limited
    Inventor: Toshiaki Akasaka