Abstract: An arrangement planning device includes: a collection unit that collects state information indicative of a present-time state of each of storage batteries; a prediction calculation unit that calculates a performance indicator of a degree of wear of each of the storage batteries from the state information; an amount-of-operation acquisition unit that obtains a required amount of operation of the storage batteries at each of places of use, the storage batteries being to be placed in the places of use; a policy acquisition unit that obtains an operation policy for each of the storage batteries; and a placement location determination unit that determines a placement location for each of the storage batteries from the places of use, wherein the placement location determination unit determines the placement location for each of the storage batteries based on the required amount of operation, the performance indicator, and the operation policy.

Abstract: An arrangement planning device includes: a collection unit that collects state information indicative of a present-time state of each of storage batteries; a prediction calculation unit that calculates a performance indicator of a degree of wear of each of the storage batteries from the state information; an amount-of-operation acquisition unit that obtains a required amount of operation of the storage batteries at each of places of use, the storage batteries being to be placed in the places of use; a policy acquisition unit that obtains an operation policy for each of the storage batteries; and a placement location determination unit that determines a placement location for each of the storage batteries from the places of use, wherein the placement location determination unit determines the placement location for each of the storage batteries based on the required amount of operation, the performance indicator, and the operation policy.

Abstract: An electric power demand/supply management device includes: a state information acquisition unit that obtains state information indicating the current state of a battery which is mounted on, for example, a vehicle; a performance calculation unit that calculates a performance index indicating the consumption degree of the battery from the state information; and an incentive imparting unit that imparts an incentive according to a value of the performance index to a provider who provides the battery as electric power demand/supply adjustment means of an electric power transmission/distribution system.

Abstract: A method for producing a pellicle according to the one embodiment of the present invention produces a pellicle including a pellicle film and a pellicle frame supporting an outer peripheral portion of the pellicle film. The method includes forming the pellicle film on a substrate, and bonding a pressure-sensitive adhesive sheet, that is elastic and has a pressure-sensitive adhesive force thereof decreased upon receipt of external stimulation, to each of two surfaces of the substrate; making a notch inside a part of the substrate, the part having the pressure-sensitive adhesive sheets bonded thereto; separating a substrate outer peripheral portion outer to the notch of the substrate, in a state where the pressure-sensitive adhesive sheets are bonded to the substrate, to form a pellicle frame; and stimulating the pressure-sensitive adhesive sheets to peel off the pressure-sensitive adhesive sheets.

Abstract: An electric power demand/supply management device includes: a state information acquisition unit that obtains state information indicating the current state of a battery which is mounted on, for example, a vehicle; a performance calculation unit that calculates a performance index indicating the consumption degree of the battery from the state information; and an incentive imparting unit that imparts an incentive according to a value of the performance index to a provider who provides the battery as electric power demand/supply adjustment means of an electric power transmission/distribution system.

Abstract: Provided are a pellicle for extreme ultraviolet light lithography, a method for producing the same, and an exposure method. A pellicle according to the present invention includes a first frame having a pellicle film located thereon; a second frame supporting the first frame; a through-hole running through the first frame; and a filter covering the through-hole on the side of a surface of the first frame on which the pellicle film is located. The through-hole may run through the pellicle film; and the filter may be located on the pellicle film. The filter may be located, adjacent to the pellicle film, on the first frame.

Abstract: Provided are a pellicle for extreme ultraviolet light lithography, a production method thereof, and an exposure method. A pellicle according to the present invention includes a first frame having a pellicle film located thereon; a second frame including a thick portion including a first surface carrying a surface of the first frame opposite to a surface on which the pellicle film is located, and also including a second surface connected with the first surface and carrying a side surface of the first frame, the second frame enclosing the pellicle film and the first frame; a through-hole provided in the thick portion of the second frame; and a filter located on an outer side surface of the second frame and covering the through-hole, the outer side surface crossing the surface of the first frame on which the pellicle film is located.

Abstract: A pellicle frame containing a frame body, the frame body having a groove formed in one end surface of the frame body, the one end surface being an end surface in a thickness direction of the frame body that is located at a side configured to support a pellicle membrane, and a through-hole that penetrates through a portion between an outer circumferential surface of the frame body and a wall surface of the groove formed in the one end surface.

Abstract: A pellicle frame containing a frame body, the frame body having a groove formed in one end surface of the frame body, the one end surface being an end surface in a thickness direction of the frame body that is located at a side configured to support a pellicle membrane, and a through-hole that penetrates through a portion between an outer circumferential surface of the frame body and a wall surface of the groove formed in the one end surface.

Abstract: A method for producing a pellicle according to the one embodiment of the present invention produces a pellicle including a pellicle film and a pellicle frame supporting an outer peripheral portion of the pellicle film. The method includes forming the pellicle film on a substrate, and bonding a pressure-sensitive adhesive sheet, that is elastic and has a pressure-sensitive adhesive force thereof decreased upon receipt of external stimulation, to each of two surfaces of the substrate; making a notch inside a part of the substrate, the part having the pressure-sensitive adhesive sheets bonded thereto; separating a substrate outer peripheral portion outer to the notch of the substrate, in a state where the pressure-sensitive adhesive sheets are bonded to the substrate, to form a pellicle frame; and stimulating the pressure-sensitive adhesive sheets to peel off the pressure-sensitive adhesive sheets.

Abstract: Provided is a support frame for pellicles which includes an aluminum alloy-made frame body with a pellicle film bonded to a front surface of the frame body, and with a glass substrate bonded to a back surface of the frame body. A front-side recessed groove extending in a circumferential direction of the frame body is formed on the front surface of the frame body, and a front-side suction hole extending from an outer peripheral surface of the frame body to an inner surface of the front-side recessed groove is formed on the frame body.

Abstract: Provided is a support frame for pellicles which includes an aluminum alloy-made frame body with a pellicle film bonded to a front surface of the frame body, and with a glass substrate bonded to a back surface of the frame body. A front-side recessed groove extending in a circumferential direction of the frame body is formed on the front surface of the frame body, and a front-side suction hole extending from an outer peripheral surface of the frame body to an inner surface of the front-side recessed groove is formed on the frame body.

Abstract: A pellicle frame containing a frame body, the frame body having a groove formed in one end surface of the frame body, the one end surface being an end surface in a thickness direction of the frame body that is located at a side configured to support a pellicle membrane, and a through-hole that penetrates through a portion between an outer circumferential surface of the frame body and a wall surface of the groove formed in the one end surface.

Abstract: Provided are a pellicle for extreme ultraviolet light lithography, a method for producing the same, and an exposure method. A pellicle according to the present invention includes a first frame having a pellicle film located thereon; a second frame supporting the first frame; a through-hole running through the first frame; and a filter covering the through-hole on the side of a surface of the first frame on which the pellicle film is located. The through-hole may run through the pellicle film; and the filter may be located on the pellicle film. The filter may be located, adjacent to the pellicle film, on the first frame.

Abstract: Provided are a pellicle for extreme ultraviolet light lithography, a production method thereof, and an exposure method. A pellicle according to the present invention includes a first frame having a pellicle film located thereon; a second frame including a thick portion including a first surface carrying a surface of the first frame opposite to a surface on which the pellicle film is located, and also including a second surface connected with the first surface and carrying a side surface of the first frame, the second frame enclosing the pellicle film and the first frame; a through-hole provided in the thick portion of the second frame; and a filter located on an outer side surface of the second frame and covering the through-hole, the outer side surface crossing the surface of the first frame on which the pellicle film is located.

Abstract: The present invention provides a vehicle control system, which easily carries out modifications such as updating and improvement of the system, improving the transmission efficiency of the data and responsiveness of the system, and allowing the redundancy to be effectively used even during normal operation of the network. In the vehicle control system, an electric control device is formed comprising a cooperative control ECU which acts as a server apparatus and a plurality of subsystems which are connected to this cooperative control ECU and act as client apparatuses. The plurality of subsystems comprise, for example, a motor control ECU, a reactive gas supply control ECU, an electrical power distribution control ECU, and a cell voltage detection control ECU.

Abstract: The present invention provides a vehicle control system, which easily carries out modifications such as updating and improvement of the system, improving the transmission efficiency of the data and responsiveness of the system, and allowing the redundancy to be effectively used even during normal operation of the network. In the vehicle control system, an electric control device is formed comprising a cooperative control ECU which acts as a server apparatus and a plurality of subsystems which are connected to this cooperative control ECU and act as client apparatuses. The plurality of subsystems comprise, for example, a motor control ECU, a reactive gas supply control ECU, an electrical power distribution control ECU, and a cell voltage detection control ECU.

Abstract: A fuel metering control system for an internal combustion engine including a feedback loop having an adaptive controller and an adaptation mechanism that estimates controller parameters .theta.. The adaptive controller corrects the quantity of fuel injection to bring a controlled variable obtained at least based on an output of said air/fuel ratio sensor, to a desired value. The adaptation mechanism is input with the controlled variable once per prescribed crank angle such as a TDC of a certain cylinder and estimates the controller parameters. Using the controller parameters, it is discriminated whether system operates stably.

Abstract: A fuel metering control system for an internal combustion engine having a plurality of cylinders. The system includes an air/fuel ratio sensor and engine operating condition detecting means for detecting engine operating conditions such as engine speed and engine load. The basic quantity of fuel injection is determined by retrieving mapped data according to the detected parameters. A plurality of controllers are provided all using outputs of the air/fuel ratio sensor. The controllers are configured to receive the sensor outputs through filters having different cutout frequency so as to avoid control interference therebetween.

Abstract: A fuel metering control system for an internal combustion engine having a plurality of cylinders. The system includes an air/fuel ratio sensor and engine operating condition detecting means for detecting engine operating conditions at least including engine speed and engine load. The basic quantity of fuel injection is determined by retrieving mapped data according to the engine speed and engine load. An adaptive controller is provided to calculate a first feedback correction coefficient to correct the quantity of basic fuel injection such that the detected air/fuel ratio is brought to a desired value, and second feedback loop is provided for calculating feedback correction coefficients to correct the quantity of fuel injection. The desired air/fuel ratio is corrected by a second air/fuel ratio installed downstream of a catalytic converter.