Patents by Inventor Toshiaki Hirota

Toshiaki Hirota has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 10895805
    Abstract: A method for producing a pellicle according to the one embodiment of the present invention produces a pellicle including a pellicle film and a pellicle frame supporting an outer peripheral portion of the pellicle film. The method includes forming the pellicle film on a substrate, and bonding a pressure-sensitive adhesive sheet, that is elastic and has a pressure-sensitive adhesive force thereof decreased upon receipt of external stimulation, to each of two surfaces of the substrate; making a notch inside a part of the substrate, the part having the pressure-sensitive adhesive sheets bonded thereto; separating a substrate outer peripheral portion outer to the notch of the substrate, in a state where the pressure-sensitive adhesive sheets are bonded to the substrate, to form a pellicle frame; and stimulating the pressure-sensitive adhesive sheets to peel off the pressure-sensitive adhesive sheets.
    Type: Grant
    Filed: October 26, 2017
    Date of Patent: January 19, 2021
    Assignees: MITSUI CHEMICALS, INC., TAZMO CO., LTD.
    Inventors: Kazuo Kohmura, Daiki Taneichi, Yosuke Ono, Hisako Ishikawa, Tsuneaki Biyajima, Yasuyuki Sato, Toshiaki Hirota
  • Publication number: 20200091752
    Abstract: An electric power demand/supply management device includes: a state information acquisition unit that obtains state information indicating the current state of a battery which is mounted on, for example, a vehicle; a performance calculation unit that calculates a performance index indicating the consumption degree of the battery from the state information; and an incentive imparting unit that imparts an incentive according to a value of the performance index to a provider who provides the battery as electric power demand/supply adjustment means of an electric power transmission/distribution system.
    Type: Application
    Filed: July 26, 2019
    Publication date: March 19, 2020
    Inventors: Shigeaki Esaka, Toshiaki Hirota, Keiichi Iguchi, Shuji Nakayama, Makoto Takano
  • Patent number: 10585348
    Abstract: Provided are a pellicle for extreme ultraviolet light lithography, a method for producing the same, and an exposure method. A pellicle according to the present invention includes a first frame having a pellicle film located thereon; a second frame supporting the first frame; a through-hole running through the first frame; and a filter covering the through-hole on the side of a surface of the first frame on which the pellicle film is located. The through-hole may run through the pellicle film; and the filter may be located on the pellicle film. The filter may be located, adjacent to the pellicle film, on the first frame.
    Type: Grant
    Filed: March 9, 2017
    Date of Patent: March 10, 2020
    Assignee: MITSUI CHEMICALS, INC.
    Inventors: Kazuo Kohmura, Daiki Taneichi, Takashi Kozeki, Yosuke Ono, Hisako Ishikawa, Tsuneaki Biyajima, Atsushi Okubo, Yasuyuki Sato, Toshiaki Hirota
  • Patent number: 10488751
    Abstract: Provided are a pellicle for extreme ultraviolet light lithography, a production method thereof, and an exposure method. A pellicle according to the present invention includes a first frame having a pellicle film located thereon; a second frame including a thick portion including a first surface carrying a surface of the first frame opposite to a surface on which the pellicle film is located, and also including a second surface connected with the first surface and carrying a side surface of the first frame, the second frame enclosing the pellicle film and the first frame; a through-hole provided in the thick portion of the second frame; and a filter located on an outer side surface of the second frame and covering the through-hole, the outer side surface crossing the surface of the first frame on which the pellicle film is located.
    Type: Grant
    Filed: March 9, 2017
    Date of Patent: November 26, 2019
    Assignee: MITSUI CHEMICALS, INC.
    Inventors: Kazuo Kohmura, Daiki Taneichi, Yosuke Ono, Hisako Ishikawa, Tsuneaki Biyajima, Atsushi Okubo, Yasuyuki Sato, Toshiaki Hirota
  • Patent number: 10216081
    Abstract: A pellicle frame containing a frame body, the frame body having a groove formed in one end surface of the frame body, the one end surface being an end surface in a thickness direction of the frame body that is located at a side configured to support a pellicle membrane, and a through-hole that penetrates through a portion between an outer circumferential surface of the frame body and a wall surface of the groove formed in the one end surface.
    Type: Grant
    Filed: April 27, 2015
    Date of Patent: February 26, 2019
    Assignee: MITSUI CHEMICALS, INC.
    Inventors: Kazuo Kohmura, Yosuke Ono, Daiki Taneichi, Yasuyuki Sato, Toshiaki Hirota
  • Patent number: 10185217
    Abstract: A pellicle frame containing a frame body, the frame body having a groove formed in one end surface of the frame body, the one end surface being an end surface in a thickness direction of the frame body that is located at a side configured to support a pellicle membrane, and a through-hole that penetrates through a portion between an outer circumferential surface of the frame body and a wall surface of the groove formed in the one end surface.
    Type: Grant
    Filed: April 27, 2015
    Date of Patent: January 22, 2019
    Assignee: MITSUI CHEMICALS, INC.
    Inventors: Kazuo Kohmura, Yosuke Ono, Daiki Taneichi, Yasuyuki Sato, Toshiaki Hirota
  • Publication number: 20180046071
    Abstract: A method for producing a pellicle according to the one embodiment of the present invention produces a pellicle including a pellicle film and a pellicle frame supporting an outer peripheral portion of the pellicle film. The method includes forming the pellicle film on a substrate, and bonding a pressure-sensitive adhesive sheet, that is elastic and has a pressure-sensitive adhesive force thereof decreased upon receipt of external stimulation, to each of two surfaces of the substrate; making a notch inside a part of the substrate, the part having the pressure-sensitive adhesive sheets bonded thereto; separating a substrate outer peripheral portion outer to the notch of the substrate, in a state where the pressure-sensitive adhesive sheets are bonded to the substrate, to form a pellicle frame; and stimulating the pressure-sensitive adhesive sheets to peel off the pressure-sensitive adhesive sheets.
    Type: Application
    Filed: October 26, 2017
    Publication date: February 15, 2018
    Applicants: MITSUI CHEMICALS, INC., TAZMO CO., LTD.
    Inventors: Kazuo KOHMURA, Daiki TANEICHI, Yosuke ONO, Hisako ISHIKAWA, Tsuneaki BIYAJIMA, Yasuyuki SATO, Toshiaki HIROTA
  • Patent number: 9841670
    Abstract: Provided is a support frame for pellicles which includes an aluminum alloy-made frame body with a pellicle film bonded to a front surface of the frame body, and with a glass substrate bonded to a back surface of the frame body. A front-side recessed groove extending in a circumferential direction of the frame body is formed on the front surface of the frame body, and a front-side suction hole extending from an outer peripheral surface of the frame body to an inner surface of the front-side recessed groove is formed on the frame body.
    Type: Grant
    Filed: May 11, 2015
    Date of Patent: December 12, 2017
    Assignee: NIPPON LIGHT METAL COMPANY, LTD.
    Inventors: Kazuo Kohmura, Yosuke Ono, Daiki Taneichi, Yasuyuki Sato, Toshiaki Hirota, Kiyokazu Koga
  • Publication number: 20170212418
    Abstract: Provided is a support frame for pellicles which includes an aluminum alloy-made frame body with a pellicle film bonded to a front surface of the frame body, and with a glass substrate bonded to a back surface of the frame body. A front-side recessed groove extending in a circumferential direction of the frame body is formed on the front surface of the frame body, and a front-side suction hole extending from an outer peripheral surface of the frame body to an inner surface of the front-side recessed groove is formed on the frame body.
    Type: Application
    Filed: May 11, 2015
    Publication date: July 27, 2017
    Inventors: Kazuo KOHMURA, Yosuke ONO, Daiki TANEICHI, Yasuyuki SATO, Toshiaki HIROTA, Kiyokazu KOGA
  • Publication number: 20170192349
    Abstract: A pellicle frame containing a frame body, the frame body having a groove formed in one end surface of the frame body, the one end surface being an end surface in a thickness direction of the frame body that is located at a side configured to support a pellicle membrane, and a through-hole that penetrates through a portion between an outer circumferential surface of the frame body and a wall surface of the groove formed in the one end surface.
    Type: Application
    Filed: April 27, 2015
    Publication date: July 6, 2017
    Applicant: Mitsui Chemicals, Inc.
    Inventors: Kazuo KOHMURA, Yosuke ONO, Daiki TANEICHI, Yasuyuki SATO, Toshiaki HIROTA
  • Publication number: 20170184956
    Abstract: Provided are a pellicle for extreme ultraviolet light lithography, a production method thereof, and an exposure method. A pellicle according to the present invention includes a first frame having a pellicle film located thereon; a second frame including a thick portion including a first surface carrying a surface of the first frame opposite to a surface on which the pellicle film is located, and also including a second surface connected with the first surface and carrying a side surface of the first frame, the second frame enclosing the pellicle film and the first frame; a through-hole provided in the thick portion of the second frame; and a filter located on an outer side surface of the second frame and covering the through-hole, the outer side surface crossing the surface of the first frame on which the pellicle film is located.
    Type: Application
    Filed: March 9, 2017
    Publication date: June 29, 2017
    Applicant: MITSUI CHEMICALS, INC.
    Inventors: Kazuo KOHMURA, Daiki TANEICHI, Yosuke ONO, Hisako ISHIKAWA, Tsuneaki BIYAJIMA, Atsushi OKUBO, Yasuyuki SATO, Toshiaki HIROTA
  • Publication number: 20170184957
    Abstract: Provided are a pellicle for extreme ultraviolet light lithography, a method for producing the same, and an exposure method. A pellicle according to the present invention includes a first frame having a pellicle film located thereon; a second frame supporting the first frame; a through-hole running through the first frame; and a filter covering the through-hole on the side of a surface of the first frame on which the pellicle film is located. The through-hole may run through the pellicle film; and the filter may be located on the pellicle film. The filter may be located, adjacent to the pellicle film, on the first frame.
    Type: Application
    Filed: March 9, 2017
    Publication date: June 29, 2017
    Applicant: MITSUI CHEMICALS, INC.
    Inventors: Kazuo KOHMURA, Daiki TANEICHI, Takashi KOZEKI, Yosuke ONO, Hisako ISHIKAWA, Tsuneaki BIYAJIMA, Atsushi OKUBO, Yasuyuki SATO, Toshiaki HIROTA
  • Patent number: 6859708
    Abstract: The present invention provides a vehicle control system, which easily carries out modifications such as updating and improvement of the system, improving the transmission efficiency of the data and responsiveness of the system, and allowing the redundancy to be effectively used even during normal operation of the network. In the vehicle control system, an electric control device is formed comprising a cooperative control ECU which acts as a server apparatus and a plurality of subsystems which are connected to this cooperative control ECU and act as client apparatuses. The plurality of subsystems comprise, for example, a motor control ECU, a reactive gas supply control ECU, an electrical power distribution control ECU, and a cell voltage detection control ECU.
    Type: Grant
    Filed: November 21, 2001
    Date of Patent: February 22, 2005
    Assignee: Honda Giken Kogyo Kabushiki Kaisha
    Inventors: Hiroshi Hashimoto, Yuji Nagatani, Yoshiki Tatsutomi, Jyunichi Kobayashi, Toshiaki Hirota, Hiroyuki Abe
  • Publication number: 20020091475
    Abstract: The present invention provides a vehicle control system, which easily carries out modifications such as updating and improvement of the system, improving the transmission efficiency of the data and responsiveness of the system, and allowing the redundancy to be effectively used even during normal operation of the network. In the vehicle control system, an electric control device is formed comprising a cooperative control ECU which acts as a server apparatus and a plurality of subsystems which are connected to this cooperative control ECU and act as client apparatuses. The plurality of subsystems comprise, for example, a motor control ECU, a reactive gas supply control ECU, an electrical power distribution control ECU, and a cell voltage detection control ECU.
    Type: Application
    Filed: November 21, 2001
    Publication date: July 11, 2002
    Applicant: HONDA GIKEN KOGYO KABUSHIKI KAISHA
    Inventors: Hiroshi Hashimoto, Yuji Nagatani, Yoshiki Tatsutomi, Jyunichi Kobayashi, Toshiaki Hirota, Hiroyuki Abe
  • Patent number: 6041279
    Abstract: A fuel metering control system for an internal combustion engine including a feedback loop having an adaptive controller and an adaptation mechanism that estimates controller parameters .theta.. The adaptive controller corrects the quantity of fuel injection to bring a controlled variable obtained at least based on an output of said air/fuel ratio sensor, to a desired value. The adaptation mechanism is input with the controlled variable once per prescribed crank angle such as a TDC of a certain cylinder and estimates the controller parameters. Using the controller parameters, it is discriminated whether system operates stably.
    Type: Grant
    Filed: December 29, 1995
    Date of Patent: March 21, 2000
    Assignee: Honda Giken Kogyo Kabushiki Kaisha
    Inventors: Hidetaka Maki, Shusuke Akazaki, Toshiaki Hirota
  • Patent number: 5908463
    Abstract: A fuel metering control system for an internal combustion engine having a plurality of cylinders. The system includes an air/fuel ratio sensor and engine operating condition detecting means for detecting engine operating conditions such as engine speed and engine load. The basic quantity of fuel injection is determined by retrieving mapped data according to the detected parameters. A plurality of controllers are provided all using outputs of the air/fuel ratio sensor. The controllers are configured to receive the sensor outputs through filters having different cutout frequency so as to avoid control interference therebetween.
    Type: Grant
    Filed: December 29, 1995
    Date of Patent: June 1, 1999
    Assignee: Honda Giken Kogyo Kabushiki Kaisha
    Inventors: Shusuke Akazaki, Yusuke Hasegawa, Isao Komoriya, Hidetaka Maki, Yoichi Nishimura, Toshiaki Hirota
  • Patent number: 5806012
    Abstract: A fuel metering control system for an internal combustion engine having a plurality of cylinders. The system includes an air/fuel ratio sensor and engine operating condition detecting means for detecting engine operating conditions at least including engine speed and engine load. The basic quantity of fuel injection is determined by retrieving mapped data according to the engine speed and engine load. An adaptive controller is provided to calculate a first feedback correction coefficient to correct the quantity of basic fuel injection such that the detected air/fuel ratio is brought to a desired value, and second feedback loop is provided for calculating feedback correction coefficients to correct the quantity of fuel injection. The desired air/fuel ratio is corrected by a second air/fuel ratio installed downstream of a catalytic converter.
    Type: Grant
    Filed: December 29, 1995
    Date of Patent: September 8, 1998
    Assignee: Honda Giken Kogyo Kabushiki Kaisha
    Inventors: Hidetaka Maki, Shusuke Akazaki, Yusuke Hasegawa, Isao Komoriya, Yoichi Nishimura, Toshiaki Hirota
  • Patent number: 5758490
    Abstract: A fuel metering control system for an internal combustion engine having a plurality of cylinders. The system includes an air/fuel ratio sensor and engine operating condition detecting means for detecting engine operating conditions at least including engine speed and engine load. The basic quantity of fuel injection is determined by retrieving mapped data according to the engine speed and engine load. An adaptive controller is provided to calculate a feedback correction coefficient to correct the quantity of basic fuel injection such that the detected air/fuel ratio is brought to a desired value. The desired air/fuel ratio is corrected by a second air/fuel ratio sensor installed downstream of a catalytic converter.
    Type: Grant
    Filed: December 29, 1995
    Date of Patent: June 2, 1998
    Assignee: Honda Giken Kogyo Kabushiki Kaisha
    Inventors: Hidetaka Maki, Shusuke Akazaki, Yusuke Hasegawa, Isao Komoriya, Yoichi Nishimura, Toshiaki Hirota
  • Patent number: 5755094
    Abstract: A fuel metering control system for an internal combustion engine having a plurality of cylinders. The system includes an air/fuel ratio sensor and engine operating condition detecting means for detecting engine operating conditions at least including engine speed and engine load. The basic quantity of fuel injection is determined by retrieving mapped data according to the engine speed and engine load. An adaptive controller is provided to calculate a first feedback correction coefficient to correct the quantity of basic fuel injection such that the detected air/fuel ratio is brought to a desired air/fuel ratio, and second and third feedback loops are provided for calculating feedback correction coefficients to correct the quantity of fuel injection. The output quantity of fuel injection is determined on the basis of the basic quantity of fuel injection and the feedback correction coefficients.
    Type: Grant
    Filed: December 29, 1995
    Date of Patent: May 26, 1998
    Assignee: Honda Giken Kogyo Kabushiki Kaisha
    Inventors: Hidetaka Maki, Shusuke Akazaki, Yusuke Hasegawa, Isao Komoriya, Yoichi Nishimura, Toshiaki Hirota
  • Patent number: 5758308
    Abstract: A fuel metering control system for an internal combustion engine having a plurality of cylinders. The system includes an air/fuel ratio sensor and engine operating condition detecting device for detecting engine operating conditions at least including engine speed and engine load. The basic quantity of fuel injection is determined by retrieving mapped data predetermined based on an effective opening area of a throttle valve, according to the engine speed and engine load. An adaptive controller is provided to calculate a feedback correction coefficient to correct the quantity of basic fuel injection such that the detected air/fuel ratio is brought to a desired value. The output quantity of fuel injection is further corrected by fuel adhered on an intake manifold wall.
    Type: Grant
    Filed: December 29, 1995
    Date of Patent: May 26, 1998
    Assignee: Honda Giken Kogyo Kabushiki Kaisha
    Inventors: Hidetaka Maki, Shusuke Akazaki, Yusuke Hasegawa, Isao Komoriya, Yoichi Nishimura, Toshiaki Hirota