Patents by Inventor Toshiaki Kinoyama

Toshiaki Kinoyama has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Ion source, method of operating the same, and ion source system
    Patent number: 6844556
    Abstract: In an ion source, within a support body which supports a plasma production chamber for producing a plasma on the basis of an ion source flange, a cavity is provided ranging from a position near the plasma production chamber to a position near the ion source flange. The cavity serves as a cooling medium passage which introduces a cooling medium to a position near the plasma production chamber to cool the plasma production chamber. The plasma production chamber is cooled at a position very near it by the cooling medium. Therefore, temperature of the plasma production chamber at the time of plasma production is kept at low temperatures.
    Type: Grant
    Filed: May 21, 2003
    Date of Patent: January 18, 2005
    Assignee: Nissin Electronics Co., Ltd.
    Inventor: Toshiaki Kinoyama
  • Ion source, method of operating the same, and ion source system
    Publication number: 20030218429
    Abstract: In an ion source, within a support body which supports a plasma production chamber for producing a plasma on the basis of an ion source flange, a cavity is provided ranging from a position near the plasma production chamber to a position near the ion source flange. The cavity serves as a cooling medium passage which introduces a cooling medium to a position near the plasma production chamber to cool the plasma production chamber. The plasma production chamber is cooled at a position very near it by the cooling medium. Therefore, temperature of the plasma production chamber at the time of plasma production is kept at low temperatures.
    Type: Application
    Filed: May 21, 2003
    Publication date: November 27, 2003
    Applicant: NISSIN ELECTRIC CO., LTD.
    Inventor: Toshiaki Kinoyama