Patents by Inventor Toshiaki Kitahara

Toshiaki Kitahara has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 7378690
    Abstract: Provided is a technique of improving the properties of a bipolar transistor. Described specifically, upon formation of a collector electrode around a base mesa by the lift-off method, a resist film is formed over connection portions between the outer periphery of a region OA1 and a region in which the base mesa 4a is formed, followed by successive formation of gold germanium (AuGe), nickel (Ni) and Au in the order of mention over the entire surface of a substrate so that the stacked film of them will not become an isolated pattern. As a result, the stacked film over the base mesa 4a is connected to a stacked film at the outer periphery of the region OA1, facilitating peeling of the stacked film over the base mesa 4a. In addition, generation of side etching upon formation of a via hole extending from the back side of the substrate to a backside via electrode is reduced by forming the backside via electrode using a material such as WSi which hardly reacts with an n type GaAs layer or n type InGaAs layer.
    Type: Grant
    Filed: March 26, 2007
    Date of Patent: May 27, 2008
    Assignee: Renesas Technology Corp.
    Inventors: Atsushi Kurokawa, Hiroshi Inagawa, Toshiaki Kitahara, Yoshinori Imamura
  • Publication number: 20070176207
    Abstract: Provided is a technique of improving the properties of a bipolar transistor. Described specifically, upon formation of a collector electrode around a base mesa by the lift-off method, a resist film is formed over connection portions between the outer periphery of a region OA1 and a region in which the base mesa 4a is formed, followed by successive formation of gold germanium (AuGe), nickel (Ni) and Au in the order of mention over the entire surface of a substrate so that the stacked film of them will not become an isolated pattern. As a result, the stacked film over the base mesa 4a is connected to a stacked film at the outer periphery of the region OA1, facilitating peeling of the stacked film over the base mesa 4a. In addition, generation of side etching upon formation of a via hole extending from the back side of the substrate to a backside via electrode is reduced by forming the backside via electrode using a material such as WSi which hardly reacts with an n type GaAs layer or n type InGaAs layer.
    Type: Application
    Filed: March 26, 2007
    Publication date: August 2, 2007
    Inventors: Atsushi Kurokawa, Hiroshi Inagawa, Toshiaki Kitahara, Yoshinori Imamura
  • Patent number: 7214558
    Abstract: Provided is a technique of improving the properties of a bipolar transistor. Described specifically, upon formation of a collector electrode around a base mesa by the lift-off method, a resist film is formed over connection portions between the outer periphery of a region OA1 and a region in which the base mesa 4a is formed, followed by successive formation of gold germanium (AuGe), nickel (Ni) and Au in the order of mention over the entire surface of a substrate so that the stacked film of them will not become an isolated pattern. As a result, the stacked film over the base mesa 4a is connected to a stacked film at the outer periphery of the region OA1, facilitating peeling of the stacked film over the base mesa 4a. In addition, generation of side etching upon formation of a via hole extending from the back side of the substrate to a backside via electrode is reduced by forming the backside via electrode using a material such as WSi which hardly reacts with an n type GaAs layer or n type InGaAs layer.
    Type: Grant
    Filed: October 25, 2005
    Date of Patent: May 8, 2007
    Assignee: Renesas Technology Corp.
    Inventors: Atsushi Kurokawa, Hiroshi Inagawa, Toshiaki Kitahara, Yoshinori Imamura
  • Publication number: 20070059853
    Abstract: The present invention achieves the enhancement of a manufacturing yield factor and the reduction of manufacturing cost in a manufacturing method of a semiconductor device having a hetero junction bipolar transistor (HBT), a Schottky diode and a resistance element. The present invention is directed to the manufacturing method of a semiconductor device in which respective semiconductor layers which become a sub collector layer, a collector layer, a base layer, a wide gap emitter layer and an emitter layer are sequentially formed over one surface of a semiconductor substrate and, thereafter, respective semiconductor layers are processed to form the hetero junction bipolar transistor, the Schottky diode and the resistance element in a monolithic manner. An emitter electrode of the hetero junction bipolar transistor, a Schottky electrode of the Schottky diode and a resistance film of the resistance element are simultaneously formed using a same material (for example, WSiN).
    Type: Application
    Filed: October 31, 2006
    Publication date: March 15, 2007
    Inventors: Atsushi KUROKAWA, Toshiaki Kitahara, Hiroshi Inagawa, Yoshinori Imamura
  • Patent number: 7132320
    Abstract: The present invention achieves the enhancement of a manufacturing yield factor and the reduction of manufacturing cost in a manufacturing method of a semiconductor device having a hetero junction bipolar transistor (HBT), a Schottky diode and a resistance element. The present invention is directed to the manufacturing method of a semiconductor device in which respective semiconductor layers which become a sub collector layer, a collector layer, a base layer, a wide gap emitter layer and an emitter layer are sequentially formed over one surface of a semiconductor substrate and, thereafter, respective semiconductor layers are processed to form the hetero junction bipolar transistor, the Schottky diode and the resistance element in a monolithic manner. An emitter electrode of the hetero junction bipolar transistor, a Schottky electrode of the Schottky diode and a resistance film of the resistance element are simultaneously formed using a same material (for example, WSiN).
    Type: Grant
    Filed: November 4, 2005
    Date of Patent: November 7, 2006
    Assignee: Renesas Technology Corp.
    Inventors: Atsushi Kurokawa, Toshiaki Kitahara, Hiroshi Inagawa, Yoshinori Imamura
  • Patent number: 7029938
    Abstract: Upon formation of a collector electrode around a base mesa by the lift-off method, a resist film is formed over connection portions between the outer periphery of a region OA1 and a region in which the base mesa is formed, followed by successive formation of gold germanium, nickel and Au in this order over the entire surface of a substrate, so that the resulting stacked film will not become an isolated pattern. Thus, the stacked film over the base mesa is connected to a stacked film at the outer periphery of the region OA1, facilitating peeling of the stacked film over the base mesa. Generation of side etching upon formation of a via hole extending from the back side of the substrate to a backside via electrode is reduced by forming the backside via electrode using a material which hardly reacts with an n-type GaAs layer or n-type InGaAs layer.
    Type: Grant
    Filed: March 26, 2004
    Date of Patent: April 18, 2006
    Assignee: Renesas Technology Corp.
    Inventors: Atsushi Kurokawa, Hiroshi Inagawa, Toshiaki Kitahara, Yoshinori Imamura
  • Publication number: 20060057789
    Abstract: The present invention achieves the enhancement of a manufacturing yield factor and the reduction of manufacturing cost in a manufacturing method of a semiconductor device having a hetero junction bipolar transistor (HBT), a Schottky diode and a resistance element. The present invention is directed to the manufacturing method of a semiconductor device in which respective semiconductor layers which become a sub collector layer, a collector layer, a base layer, a wide gap emitter layer and an emitter layer are sequentially formed over one surface of a semiconductor substrate and, thereafter, respective semiconductor layers are processed to form the hetero junction bipolar transistor, the Schottky diode and the resistance element in a monolithic manner. An emitter electrode of the hetero junction bipolar transistor, a Schottky electrode of the Schottky diode and a resistance film of the resistance element are simultaneously formed using a same material (for example, WSiN).
    Type: Application
    Filed: November 4, 2005
    Publication date: March 16, 2006
    Inventors: Atsushi Kurokawa, Toshiaki Kitahara, Hiroshi Inagawa, Yoshinori Imamura
  • Publication number: 20060032762
    Abstract: Provided is a technique of improving the properties of a bipolar transistor. Described specifically, upon formation of a collector electrode around a base mesa by the lift-off method, a resist film is formed over connection portions between the outer periphery of a region OA1 and a region in which the base mesa 4a is formed, followed by successive formation of gold germanium (AuGe), nickel (Ni) and Au in the order of mention over the entire surface of a substrate so that the stacked film of them will not become an isolated pattern. As a result, the stacked film over the base mesa 4a is connected to a stacked film at the outer periphery of the region OA1, facilitating peeling of the stacked film over the base mesa 4a. In addition, generation of side etching upon formation of a via hole extending from the back side of the substrate to a backside via electrode is reduced by forming the backside via electrode using a material such as WSi which hardly reacts with an n type GaAs layer or n type InGaAs layer.
    Type: Application
    Filed: October 25, 2005
    Publication date: February 16, 2006
    Inventors: Atsushi Kurokawa, Hiroshi Inagawa, Toshiaki Kitahara, Yoshinori Imamura
  • Patent number: 6989301
    Abstract: The present invention achieves the enhancement of a manufacturing yield factor and the reduction of manufacturing cost in a manufacturing method of a semiconductor device having a hetero junction bipolar transistor (HBT), a Schottky diode and a resistance element. The present invention is directed to the manufacturing method of a semiconductor device in which respective semiconductor layers which become a sub collector layer, a collector layer, a base layer, a wide gap emitter layer and an emitter layer are sequentially formed over one surface of a semiconductor substrate and, thereafter, respective semiconductor layers are processed to form the hetero junction bipolar transistor, the Schottky diode and the resistance element in a monolithic manner. An emitter electrode of the hetero junction bipolar transistor, a Schottky electrode of the Schottky diode and a resistance film of the resistance element are simultaneously formed using a same material (for example, WSiN).
    Type: Grant
    Filed: September 30, 2003
    Date of Patent: January 24, 2006
    Assignee: Renesas Technology Corp.
    Inventors: Atsushi Kurokawa, Toshiaki Kitahara, Hiroshi Inagawa, Yoshinori Imamura
  • Patent number: 6912015
    Abstract: A parallel scanning circuit outputs a parallel scanning signal for making forward and backward scanning lines parallel. A vertical correlation detection circuit detects a portion where the change in luminance in the vertical direction exceeds a predetermined value on the basis of a luminance signal, and outputs a movement control signal representing the distance of movement on the screen of the scanning line. A retrace period reversion circuit reverses the lime axis of the movement control signal in a retrace period. A clamping circuit clamps the movement control signal to a predetermined DC voltage at the timing of horizontal synchronizing signal. A synthesizing circuit synthesizes the parallel scanning signal and the movement control signal, and feeds a synthesized signal as a vertical velocity modulation signal to a vertical velocity modulation coil.
    Type: Grant
    Filed: June 7, 1999
    Date of Patent: June 28, 2005
    Assignee: Matsushita Electric Industrial Co., Ltd.
    Inventors: Hideyo Uwabata, Katsumi Terai, Minoru Miyata, Toshiaki Kitahara, Naoji Okumura, Kazuto Tanaka
  • Patent number: 6867079
    Abstract: The present invention achieves the enhancement of a manufacturing yield factor and the reduction of manufacturing cost in a manufacturing method of a semiconductor device having a hetero junction bipolar transistor (HBT), a Schottky diode and a resistance element. The present invention is directed to the manufacturing method of a semiconductor device in which respective semiconductor layers which become a sub collector layer, a collector layer, a base layer, a wide gap emitter layer and an emitter layer are sequentially formed over one surface of a semiconductor substrate and, thereafter, respective semiconductor layers are processed to form the hetero junction bipolar transistor, the Schottky diode and the resistance element in a monolithic manner. An emitter electrode of the hetero junction bipolar transistor, a Schottky electrode of the Schottky diode and a resistance film of the resistance element are simultaneously formed using a same material (for example, WSiN).
    Type: Grant
    Filed: September 30, 2003
    Date of Patent: March 15, 2005
    Assignee: Renesas Technology Corp.
    Inventors: Atsushi Kurokawa, Toshiaki Kitahara, Hiroshi Inagawa, Yoshinori Imamura
  • Patent number: 6848755
    Abstract: An accumulator (1) capable of suppressing a hydraulic pressure vibrating noise in the range of a sealed gas pressure or below and being reduced in size, wherein an operating member (5) having a bellows (6) is disposed in a housing (2) to partition the inside of the housing (2) into a pressure sealed chamber (8) and a pressure inflow chamber (9) and a fluid inlet (15) for leading pressure fluid from a system side to the pressure inflow chamber (9) is formed in the end wall part (3a) of the housing (2), a chamber forming member (17) is fixed to the inside of the housing (2), and a chamber (18) and a choke (19) are provided between the chamber forming member (17) and the end will part (3a) of the housing (2).
    Type: Grant
    Filed: August 2, 2001
    Date of Patent: February 1, 2005
    Assignee: NOK Corporation
    Inventors: Akio Yuda, Toshiaki Kitahara
  • Publication number: 20040188707
    Abstract: Provided is a technique of improving the properties of a bipolar transistor. Described specifically, upon formation of a collector electrode around a base mesa by the lift-off method, a resist film is formed over connection portions between the outer periphery of a region OA1 and a region in which the base mesa 4a is formed, followed by successive formation of gold germanium (AuGe), nickel (Ni) and Au in the order of mention over the entire surface of a substrate so that the stacked film of them will not become an isolated pattern. As a result, the stacked film over the base mesa 4a is connected to a stacked film at the outer periphery of the region OA1, facilitating peeling of the stacked film over the base mesa 4a. In addition, generation of side etching upon formation of a via hole extending from the back side of the substrate to a backside via electrode is reduced by forming the backside via electrode using a material such as WSi which hardly reacts with an n type GaAs layer or n type InGaAs layer.
    Type: Application
    Filed: March 26, 2004
    Publication date: September 30, 2004
    Inventors: Atsushi Kurokawa, Hiroshi Inagawa, Toshiaki Kitahara, Yoshinori Imamura
  • Publication number: 20040063259
    Abstract: The present invention achieves the enhancement of a manufacturing yield factor and the reduction of manufacturing cost in a manufacturing method of a semiconductor device having a hetero junction bipolar transistor (HBT), a Schottky diode and a resistance element. The present invention is directed to the manufacturing method of a semiconductor device in which respective semiconductor layers which become a sub collector layer, a collector layer, a base layer, a wide gap emitter layer and an emitter layer are sequentially formed over one surface of a semiconductor substrate and, thereafter, respective semiconductor layers are processed to form the hetero junction bipolar transistor, the Schottky diode and the resistance element in a monolithic manner. An emitter electrode of the hetero junction bipolar transistor, a Schottky electrode of the Schottky diode and a resistance film of the resistance element are simultaneously formed using a same material (for example, WSiN).
    Type: Application
    Filed: September 30, 2003
    Publication date: April 1, 2004
    Applicant: Hitachi, Ltd.
    Inventors: Atsushi Kurokawa, Toshiaki Kitahara, Hiroshi Inagawa, Yoshinori Imamura
  • Publication number: 20040063292
    Abstract: The present invention achieves the enhancement of a manufacturing yield factor and the reduction of manufacturing cost in a manufacturing method of a semiconductor device having a hetero junction bipolar transistor (HBT), a Schottky diode and a resistance element. The present invention is directed to the manufacturing method of a semiconductor device in which respective semiconductor layers which become a sub collector layer, a collector layer, a base layer, a wide gap emitter layer and an emitter layer are sequentially formed over one surface of a semiconductor substrate and, thereafter, respective semiconductor layers are processed to form the hetero junction bipolar transistor, the Schottky diode and the resistance element in a monolithic manner. An emitter electrode of the hetero junction bipolar transistor, a Schottky electrode of the Schottky diode and a resistance film of the resistance element are simultaneously formed using a same material (for example, WSiN).
    Type: Application
    Filed: September 30, 2003
    Publication date: April 1, 2004
    Applicant: Hitachi, Ltd.
    Inventors: Atsushi Kurokawa, Toshiaki Kitahara, Hiroshi Inagawa, Yoshinori Imamura
  • Publication number: 20040056530
    Abstract: An accumulator (1) capable of suppressing a hydraulic pressure vibrating noise in the range of a sealed gas pressure or below and being reduced in size, wherein an operating member (5) having a bellows (6) is disposed in a housing (2) to partition the inside of the housing (2) into a pressure sealed chamber (8) and a pressure inflow chamber (9) and a fluid inlet (15) for leading pressure fluid from a system side to the pressure inflow chamber (9) is formed in the end wall part (3a) of the housing (2), a chamber forming member (17) is fixed to the inside of the housing (2), and a chamber (18) and a choke (19) are provided between the chamber forming member (17) and the end will part (3a) of the housing (2).
    Type: Application
    Filed: July 18, 2003
    Publication date: March 25, 2004
    Inventors: Akio Yuda, Toshiaki Kitahara
  • Patent number: 6704056
    Abstract: A video signal conversion part of a horizontal deflection circuit deletes a prescribed number of horizontal scanning lines from a vertical blanking interval of an input video signal and assigns a time corresponding to the deleted horizontal scanning lines to horizontal blanking intervals of the remaining horizontal scanning lines thereby extending the horizontal blanking interval of each horizontal scanning line and outputting a video signal. A synchronizing signal separation circuit extracts a horizontal synchronizing signal and a vertical synchronizing signal from the video signal output from the video signal conversion part. An output part of the horizontal deflection circuit supplies a sawtooth horizontal deflection current to a horizontal deflection yoke in synchronization with the horizontal synchronizing signal output from the synchronizing signal separation circuit.
    Type: Grant
    Filed: May 22, 2001
    Date of Patent: March 9, 2004
    Assignee: Matsushita Electric Industrial Co., Ltd.
    Inventors: Toshiaki Kitahara, Hideyo Uwabata, Yutaka Nishikawa, Chikara Gotanda
  • Patent number: 6649458
    Abstract: The present invention achieves the enhancement of a manufacturing yield factor and the reduction of manufacturing cost in a manufacturing method of a semiconductor device having a hetero junction bipolar transistor (HBT), a Schottky diode and a resistance element. The present invention is directed to the manufacturing method of a semiconductor device in which respective semiconductor layers which become a sub collector layer, a collector layer, a base layer, a wide gap emitter layer and an emitter layer are sequentially formed over one surface of a semiconductor substrate and, thereafter, respective semiconductor layers are processed to form the hetero junction bipolar transistor, the Schottky diode and the resistance element in a monolithic manner. An emitter electrode of the hetero junction bipolar transistor, a Schottky electrode of the Schottky diode and a resistance film of the resistance element are simultaneously formed using a same material (for example, WSiN).
    Type: Grant
    Filed: January 22, 2003
    Date of Patent: November 18, 2003
    Assignee: Hitachi, Ltd.
    Inventors: Atsushi Kurokawa, Toshiaki Kitahara, Hiroshi Inagawa, Yoshinori Imamura
  • Publication number: 20030157775
    Abstract: The present invention achieves the enhancement of a manufacturing yield factor and the reduction of manufacturing cost in a manufacturing method of a semiconductor device having a hetero junction bipolar transistor (HBT), a Schottky diode and a resistance element. The present invention is directed to the manufacturing method of a semiconductor device in which respective semiconductor layers which become a sub collector layer, a collector layer, a base layer, a wide gap emitter layer and an emitter layer are sequentially formed over one surface of a semiconductor substrate and, thereafter, respective semiconductor layers are processed to form the hetero junction bipolar transistor, the Schottky diode and the resistance element in a monolithic manner. An emitter electrode of the hetero junction bipolar transistor, a Schottky electrode of the Schottky diode and a resistance film of the resistance element are simultaneously formed using a same material (for example, WSiN).
    Type: Application
    Filed: January 22, 2003
    Publication date: August 21, 2003
    Applicant: Hitachi, Ltd.
    Inventors: Atsushi Kurokawa, Toshiaki Kitahara, Hiroshi Inagawa, Yoshinori Imamura
  • Patent number: 6441860
    Abstract: A video signal processing apparatus which can process video signals with different formats simply by switching between programs for processing video signals. Different system clock signals are sent to the input and output processes by employing a programmable signal processor 4, input synchronizing signal processor 8, programmable signal processor 6 and output synchronizing pulse processor 9. A method for processing the video signal can be flexibly changed simply by switching between signal processing programs for programmable signal processors. In addition, the use of a memory 5 enables the signal, which is processed using the system clock signal in the input process, to be processed using the system clock signal in the output process. The present invention thus allows the processing of video signals with many different signal formats. The design of efficient circuitry will greatly reduce costs and production processes.
    Type: Grant
    Filed: May 7, 1997
    Date of Patent: August 27, 2002
    Assignee: Matsushita Electric Industrial Co., Ltd.
    Inventors: Takashi Yamaguchi, Yutaka Nio, Toshiaki Kitahara