Patents by Inventor Toshiaki Saijo

Toshiaki Saijo has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Plasma processing apparatus and plasma processing method
    Patent number: 12205801
    Abstract: In a plasma processing apparatus, a controller specifies a time point when a current starts to flow between an edge ring and a DC power supply after beginning an application of a negative DC voltage to the edge ring from the DC power supply. The controller specifies, from a voltage measurement value indicating a voltage of the edge ring at the time point, an estimate of a self-bias voltage of the edge ring generated by a supply of a radio frequency power. The controller sets a sum of an absolute value of the estimate of the self-bias voltage and a set value as an absolute value of the negative DC voltage to be applied to the edge ring by the DC power supply.
    Type: Grant
    Filed: September 8, 2021
    Date of Patent: January 21, 2025
    Assignee: TOKYO ELECTRON LIMITED
    Inventors: Toshiaki Saijo, Jun Abe, Shogo Shoji, Junya Kato
  • PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD
    Publication number: 20220076930
    Abstract: In a plasma processing apparatus, a controller specifies a time point when a current starts to flow between an edge ring and a DC power supply after beginning an application of a negative DC voltage to the edge ring from the DC power supply. The controller specifies, from a voltage measurement value indicating a voltage of the edge ring at the time point, an estimate of a self-bias voltage of the edge ring generated by a supply of a radio frequency power. The controller sets a sum of an absolute value of the estimate of the self-bias voltage and a set value as an absolute value of the negative DC voltage to be applied to the edge ring by the DC power supply.
    Type: Application
    Filed: September 8, 2021
    Publication date: March 10, 2022
    Inventors: Toshiaki Saijo, Jun Abe, Shogo Shoji, Junya Kato