Patents by Inventor Toshiaki Sumitani

Toshiaki Sumitani has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Data collection system for vacuum processing apparatus
    Patent number: 9054142
    Abstract: A control device of a transfer module and a process module in a vacuum processing apparatus collects state data from the modules. The control device has a state data set including data on the entire module, updates its own state data in the set of its own state data acquired at acquisition timing and transmits it to a data collection device at transmission timing. A plurality of control devices is connected in a loop or in a chain to the data collection device; a data transmission interval is shorter than a data collection interval, and entire transmission synchronization is set to be less than twice an interval of acquisition timing.
    Type: Grant
    Filed: June 21, 2011
    Date of Patent: June 9, 2015
    Assignee: Canon Anelva Corporation
    Inventors: Yugui Zhen, Kiyohisa Katsumata, Toshiaki Sumitani, Yoshinori Azuma
  • DATA COLLECTION SYSTEM FOR VACUUM PROCESSING APPARATUS
    Publication number: 20110313562
    Abstract: A control device of a transfer module and a process module in a vacuum processing apparatus collects state data from the modules. The control device has a state data set including data on the entire module, updates its own state data in the set of its own state data acquired at acquisition timing and transmits it to a data collection device at transmission timing. A plurality of control devices is connected in a loop or in a chain to the data collection device; a data transmission interval is shorter than a data collection interval, and entire transmission synchronization is set to be less than twice an interval of acquisition timing.
    Type: Application
    Filed: June 21, 2011
    Publication date: December 22, 2011
    Applicant: CANON ANELVA CORPORATION
    Inventors: Yugui Zhen, Kiyohisa Katsumata, Toshiaki Sumitani, Yoshinori Azuma