Patents by Inventor Toshiaki TOYOMAKI
Toshiaki TOYOMAKI has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 11923232Abstract: A positioning apparatus includes a stage configured to hold a substrate, a first pin configured to hold an edge ring and a second pin separately provided from the first pin and configured to hold the edge ring. The positioning apparatus further includes a rotation mechanism configured to rotate the stage and the first pin, an elevating mechanism configured to raise and lower at least one of the first pin and the second pin and a detection mechanism configured to detect a position of an outer circumference of the substrate held by the stage and a position of an inner circumference of the edge ring held by the first pin.Type: GrantFiled: February 26, 2021Date of Patent: March 5, 2024Assignee: TOKYO ELECTRON LIMITEDInventor: Toshiaki Toyomaki
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Publication number: 20240047254Abstract: A substrate transfer system includes a load lock module, an atmospheric transfer module having a first sidewall adjacent to the load lock module and a second sidewall remote from the load lock module, the atmospheric transfer module being connected to the load lock module, and a substrate transfer robot disposed in the atmospheric transfer module. The substrate transfer robot includes a base configured to reciprocate along the first sidewall, a substrate transfer arm disposed on the base, and a flow rectifier surrounding the base, the flow rectifier being configured, upon movement of the base, to create an obliquely downward air flow in a direction opposite to a moving direction of the base.Type: ApplicationFiled: April 26, 2023Publication date: February 8, 2024Applicant: Tokyo Electron LimitedInventors: Norihiko Amikura, Toshiaki Toyomaki
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Publication number: 20240030011Abstract: This substrate transfer system is provided with: a load-lock module; an atmospheric transfer module having a first sidewall, a second sidewall and a third sidewall, the first sidewall extending along a first direction and connected to the load-lock module, the second sidewall extending along a second direction perpendicular to the first direction, the third sidewall being disposed on an opposite side of the second sidewall; a first load port extending outward from the second sidewall along the first direction; and a second load port extending outward from the third sidewall along the first direction.Type: ApplicationFiled: July 21, 2023Publication date: January 25, 2024Applicant: Tokyo Electron LimitedInventors: Toshiaki TOYOMAKI, Norihiko AMIKURA, Seiichi KAISE, Masatomo KITA
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Publication number: 20230365351Abstract: There is an abnormality detection method for a transfer device including an arm having a substrate holder to hold a substrate, an elevating mechanism to raise and lower the arm, a position detector to detect a position of the substrate holder, a suction hole formed at the substrate holder, and a pressure detector to detect a pressure of a suction passage communicating with the suction hole, the method comprising: controlling the arm to move the substrate holder to a position below the substrate; controlling the elevating mechanism to raise the arm and the substrate holder; detecting contact between the substrate and the substrate holder based on a pressure change detected by the pressure detector; detecting, by using the position detector, a position of the substrate holder at the time of detecting the contact; and detecting an abnormal state of the transfer device based on the detected position.Type: ApplicationFiled: May 15, 2023Publication date: November 16, 2023Applicant: Tokyo Electron LimitedInventor: Toshiaki TOYOMAKI
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Publication number: 20230290660Abstract: A container for consumables includes multiple holding portions, a partition plate and a fixer. The multiple holding portions are configured to respectively accommodate the consumables, each of which is loaded into and unloaded from one direction. The partition plate includes a first portion formed to be disposed between a light emitting part and a light receiving part of a detector, and the partition plate is accommodated in one of the multiple holding portions. The fixer is configured to fix the container so that the consumables are arranged on a transfer path to be loaded into and unloaded from the multiple holding portions.Type: ApplicationFiled: May 18, 2023Publication date: September 14, 2023Inventors: Toshiaki TOYOMAKI, Seiichi KAISE, Masahiro NUMAKURA, Yuki TAKEYAMA
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Publication number: 20230282492Abstract: A substrate processing system includes a first substrate processing chamber, a first substrate transfer chamber connected to the first substrate processing chamber, a second substrate processing chamber, and a second substrate transfer chamber connected to the second substrate processing chamber. The substrate processing system further includes a buffer chamber connected between the first substrate transfer chamber and the second substrate transfer chamber, the buffer chamber having at least one substrate holder. At least a part of the buffer chamber and at least one of the first substrate transfer chamber or the second substrate transfer chamber are vertically overlapped with each other.Type: ApplicationFiled: May 15, 2023Publication date: September 7, 2023Applicant: Tokyo Electron LimitedInventor: Toshiaki TOYOMAKI
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Patent number: 11735448Abstract: A container for consumables includes multiple holding portions, a partition plate and a fixer. The multiple holding portions are configured to respectively accommodate the consumables, each of which is loaded into and unloaded from one direction. The partition plate includes a first portion formed to be disposed between a light emitting part and a light receiving part of a detector, and the partition plate is accommodated in one of the multiple holding portions. The fixer is configured to fix the container so that the consumables are arranged on a transfer path to be loaded into and unloaded from the multiple holding portions.Type: GrantFiled: March 5, 2020Date of Patent: August 22, 2023Assignee: TOKYO ELECTRON LIMITEDInventors: Toshiaki Toyomaki, Seiichi Kaise, Masahiro Numakura, Yuki Takeyama
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Patent number: 11721564Abstract: A substrate processing system includes a first substrate processing chamber, a first substrate transfer chamber connected to the first substrate processing chamber, a second substrate processing chamber, and a second substrate transfer chamber connected to the second substrate processing chamber. The substrate processing system further includes a buffer chamber connected between the first substrate transfer chamber and the second substrate transfer chamber, the buffer chamber having at least one substrate holder. At least a part of the buffer chamber and at least one of the first substrate transfer chamber or the second substrate transfer chamber are vertically overlapped with each other.Type: GrantFiled: April 7, 2020Date of Patent: August 8, 2023Assignee: TOKYO ELECTRON LIMITEDInventor: Toshiaki Toyomaki
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Patent number: 11705355Abstract: A substrate transfer system includes a load lock module, an atmospheric transfer module having a first sidewall adjacent to the load lock module and a second sidewall remote from the load lock module, the atmospheric transfer module being connected to the load lock module, and a substrate transfer robot disposed in the atmospheric transfer module. The substrate transfer robot includes a base configured to reciprocate along the first sidewall, a substrate transfer arm disposed on the base, and a flow rectifier surrounding the base, the flow rectifier being configured, upon movement of the base, to create an obliquely downward air flow in a direction opposite to a moving direction of the base.Type: GrantFiled: December 3, 2021Date of Patent: July 18, 2023Assignee: TOKYO ELECTRON LIMITEDInventors: Norihiko Amikura, Toshiaki Toyomaki
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Patent number: 11631607Abstract: A carrier includes a jig and a case. The jig is configured to hold at least one consumable to be loaded into or unloaded from a container. The case is configured to store the jig and the consumable held by the jig.Type: GrantFiled: February 5, 2020Date of Patent: April 18, 2023Assignee: TOKYO ELECTRON LIMITEDInventors: Toshiaki Toyomaki, Seiichi Kaise
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Publication number: 20220277981Abstract: According to an aspect of the present disclosure, there is provided a transfer system comprising a transfer robot configured to transfer a transfer target object by an end effector based on an operation instruction, and a controller configured to output the operation instruction to the transfer robot, wherein at least any one of the end effector and the transfer target object has at least any one of a sensor and a camera, the controller calculates a relative position between the end effector and the transfer target object based on at least any one of a detected result of the sensor and a captured result of the camera, and the controller determines a teaching position of the end effector with respect to the transfer target object based on the relative position, and outputs the operation instruction to the transfer robot such that the end effector is disposed at the teaching position.Type: ApplicationFiled: February 25, 2022Publication date: September 1, 2022Applicant: Tokyo Electron LimitedInventors: Norihiko AMIKURA, Toshiaki TOYOMAKI, Masatomo KITA
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Publication number: 20220093438Abstract: A substrate transfer system includes a load lock module, an atmospheric transfer module having a first sidewall adjacent to the load lock module and a second sidewall remote from the load lock module, the atmospheric transfer module being connected to the load lock module, and a substrate transfer robot disposed in the atmospheric transfer module. The substrate transfer robot includes a base configured to reciprocate along the first sidewall, a substrate transfer arm disposed on the base, and a flow rectifier surrounding the base, the flow rectifier being configured, upon movement of the base, to create an obliquely downward air flow in a direction opposite to a moving direction of the base.Type: ApplicationFiled: December 3, 2021Publication date: March 24, 2022Applicant: TOYOTA ELECTRON LIMITEDInventors: Norihiko AMIKURA, Toshiaki TOYOMAKI
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Publication number: 20220051928Abstract: A transfer device for simultaneously or separately transferring a wafer and a consumable part having a circular shape is disclosed. The consumable part is disposed in a wafer processing module, and the outer diameter of the consumable part is larger than the outer diameter of the wafer. The transfer device comprises an end effector configured to place the wafer and the consumable part thereon simultaneously or separately, an arm configured to move the end effector, and a controller configured to control the arm, to place the consumable part on the end effector such that the center of gravity of the consumable part coincides with a first position when transferring the consumable part, and to place the wafer on the end effector such that the center of gravity of the wafer coincides with a second position between the first position and front ends of the end effector when transferring the wafer.Type: ApplicationFiled: August 16, 2021Publication date: February 17, 2022Applicant: Tokyo Electron LimitedInventors: Norihiko AMIKURA, Masatomo KITA, Masahiro DOGOME, Takami FUKASAWA, Daisuke HAYASHI, Toshiaki TOYOMAKI
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Patent number: 11227785Abstract: A substrate transfer system includes a load lock module, an atmospheric transfer module having a first sidewall adjacent to the load lock module and a second sidewall remote from the load lock module, the atmospheric transfer module being connected to the load lock module, and a substrate transfer robot disposed in the atmospheric transfer module. The substrate transfer robot includes a base configured to reciprocate along the first sidewall, a substrate transfer arm disposed on the base, and a flow rectifier surrounding the base, the flow rectifier being configured, upon movement of the base, to create an obliquely downward air flow in a direction opposite to a moving direction of the base.Type: GrantFiled: February 26, 2021Date of Patent: January 18, 2022Assignee: TOKYO ELECTRON LIMITEDInventors: Norihiko Amikura, Toshiaki Toyomaki
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Publication number: 20210280447Abstract: A substrate transfer system includes a load lock module, an atmospheric transfer module having a first sidewall adjacent to the load lock module and a second sidewall remote from the load lock module, the atmospheric transfer module being connected to the load lock module, and a substrate transfer robot disposed in the atmospheric transfer module. The substrate transfer robot includes a base configured to reciprocate along the first sidewall, a substrate transfer arm disposed on the base, and a flow rectifier surrounding the base, the flow rectifier being configured, upon movement of the base, to create an obliquely downward air flow in a direction opposite to a moving direction of the base.Type: ApplicationFiled: February 26, 2021Publication date: September 9, 2021Applicant: TOKYO ELECTRON LIMITEDInventors: Norihiko AMIKURA, Toshiaki TOYOMAKI
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Publication number: 20210272783Abstract: A positioning apparatus includes a stage configured to hold a substrate, a first pin configured to hold an edge ring and a second pin separately provided from the first pin and configured to hold the edge ring. The positioning apparatus further includes a rotation mechanism configured to rotate the stage and the first pin, an elevating mechanism configured to raise and lower at least one of the first pin and the second pin and a detection mechanism configured to detect a position of an outer circumference of the substrate held by the stage and a position of an inner circumference of the edge ring held by the first pin.Type: ApplicationFiled: February 26, 2021Publication date: September 2, 2021Applicant: TOKYO ELECTRON LIMITEDInventor: Toshiaki TOYOMAKI
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Publication number: 20210252694Abstract: A method and system for teaching a transfer device including a substrate holder and a first detector disposed at the substrate holder is disclosed. The method comprises detecting a vertical position of an object by the first detector while moving the substrate holder in a vertical direction, and setting a teaching position of the substrate holder in the vertical direction based on the detected vertical position of the object; and setting a teaching position of the substrate holder in a horizontal direction based on a horizontal position of the substrate holder at which the substrate holder is detected by a second detector while moving the substrate holder in the horizontal direction, the second detector being disposed at a position different from a position of the transfer device.Type: ApplicationFiled: February 10, 2021Publication date: August 19, 2021Applicant: TOKYO ELECTRON LIMITEDInventor: Toshiaki TOYOMAKI
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Publication number: 20200321227Abstract: A substrate processing system includes a first substrate processing chamber, a first substrate transfer chamber connected to the first substrate processing chamber, a second substrate processing chamber, and a second substrate transfer chamber connected to the second substrate processing chamber. The substrate processing system further includes a buffer chamber connected between the first substrate transfer chamber and the second substrate transfer chamber, the buffer chamber having at least one substrate holder. At least a part of the buffer chamber and at least one of the first substrate transfer chamber or the second substrate transfer chamber are vertically overlapped with each other.Type: ApplicationFiled: April 7, 2020Publication date: October 8, 2020Applicant: TOKYO ELECTRON LIMITEDInventor: Toshiaki TOYOMAKI
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Publication number: 20200286752Abstract: A container for consumables includes multiple holding portions, a partition plate and a fixer. The multiple holding portions are configured to respectively accommodate the consumables, each of which is loaded into and unloaded from one direction. The partition plate includes a first portion formed to be disposed between a light emitting part and a light receiving part of a detector, and the partition plate is accommodated in one of the multiple holding portions. The fixer is configured to fix the container so that the consumables are arranged on a transfer path to be loaded into and unloaded from the multiple holding portions.Type: ApplicationFiled: March 5, 2020Publication date: September 10, 2020Applicant: TOKYO ELECTRON LIMITEDInventors: Toshiaki TOYOMAKI, Seiichi KAISE, Masahiro NUMAKURA, Yuki TAKEYAMA
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Publication number: 20200251372Abstract: A carrier includes a jig and a case. The jig is configured to hold at least one consumable to be loaded into or unloaded from a container. The case is configured to store the jig and the consumable held by the jig.Type: ApplicationFiled: February 5, 2020Publication date: August 6, 2020Applicant: TOKYO ELECTRON LIMITEDInventors: Toshiaki TOYOMAKI, Seiichi KAISE