Patents by Inventor Toshiharu Matsueda

Toshiharu Matsueda has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Dopant of arsenic, method for the preparation thereof and method for doping of semiconductor therewith
    Patent number: 4929572
    Abstract: The dopant body of arsenic for doping of a semiconductor substrate, e.g., silicon wafer, is a sintered body of a powder mixture comprising silicon arsenide, silica and, optionally, arsenic oxide in a specified proportion. The dopant body can be easily prepared and has various advantages over conventional elementary arsenic powder or a shaped body of silicon arsenide alone in respect of the high mechanical strength of the dopant body and absence of the problem of environmental contamination.
    Type: Grant
    Filed: July 17, 1989
    Date of Patent: May 29, 1990
    Assignees: Furukawa Co., Ltd., Shin-Etsu Chemical Co., Ltd.
    Inventors: Shigeaki Saito, Toshiharu Matsueda, Yoshihiro Kubota, Masaaki Iguchi