Abstract: A processing apparatus includes an articulated robot having an arm distal-end portion to which a processing tool configured with a cutting edge portion and a profiling portion and a shape measurement unit are attached, and a processor. The processor, in a workpiece set state, recognizes, by measuring a shape of the workpiece using the shape measurement unit, a tilt of a profiled surface portion of the workpiece and a position of a process portion of the workpiece to generate processing-target-portion information based on the position of the process portion, generates processing-point information indicating a processing point, moves the arm distal-end portion to the processing point based on the processing-point information, controls an orientation of the processing tool in accordance with the tilt of the profiled surface portion of the workpiece to perform the specified processing on the workpiece using the processing tool.

Abstract: A processing apparatus 1 includes: a workpiece-set-position recognition unit 114 that moves an arm distal-end portion to a specified position measurement point to measure a shape of a workpiece in a workpiece set state in which the workpiece is positioned by a workpiece positioning unit, and thereby recognizes a set position of the workpiece; a processing-point-information generation unit 115 that, based on the set position of the workpiece and processing-target-portion information 124 indicating a position of a target portion of the workpiece for specified processing, generates processing-point information 125 indicating a processing point which is a movement point of the arm distal-end portion to perform the specified processing on the workpiece using a processing tool in the workpiece set state; and a workpiece-processing control unit 116 that moves the arm distal-end portion to the processing point based on the processing-point information 125 to perform the specified processing on the workpiece using the

Abstract: A processing apparatus 1 includes: a workpiece-set-position recognition unit 114 that moves an arm distal-end portion to a specified position measurement point to measure a shape of a workpiece in a workpiece set state in which the workpiece is positioned by a workpiece positioning unit, and thereby recognizes a set position of the workpiece; a processing-point-information generation unit 115 that, based on the set position of the workpiece and processing-target-portion information 124 indicating a position of a target portion of the workpiece for specified processing, generates processing-point information 125 indicating a processing point which is a movement point of the arm distal-end portion to perform the specified processing on the workpiece using a processing tool in the workpiece set state; and a workpiece-processing control unit 116 that moves the arm distal-end portion to the processing point based on the processing-point information 125 to perform the specified processing on the workpiece using the

Abstract: Each of first scale coils arranged at a cyclic interval &lgr;1/2 of a magnetic encoder is connected by each of connecting wires to a corresponding one of second scale coils arranged at a different cyclic interval &lgr;2/2 thereof. Each of the connecting wires includes two parallel conductors placed in such a way as to be close to each other. The connecting wires are set so that at any position on the scale, the length of the connecting wire has an equal value. Thus, the signal levels of received signals, which are attenuated by electric currents flowing through the two conductors in opposite directions, can be controlled in such a manner as to be equal to each other. Consequently, the influence of the position of a detection coil on the scale, which is exerted on the signal level of the received signal, is reduced.

Abstract: A linear scale type measuring device capable of canceling an error caused by inclination of an encoder, a moire error, is disclosed. A linear encoder disposed relative to a scale includes two sensors A and B which are arranged such that they are inclined at a predetermined angle &thgr; with regard to the scale. At the time of measurement, a detection value corresponding to that with no inclination can be obtained by an operation based on detection values from the sensors A and B, and the known angle &thgr;, even when the encoder is further inclined by any angle &dgr;.

Abstract: In an electronic caliper, a detecting circuit 112 detects displacement of a grid with respect to a scale, on the basis of a signal from a transducer 110. A CPU 114 displays the detected position on a display device 124. The CPU 114 performs error detection on the transducer, only when the relative speed of the grid with respect the scale is zero, or becomes equal to or smaller than a predetermined value. Since error detection is performed only at a predetermined timing, power consumption can be reduced.

Abstract: An encoder unit is disposed facing a scale. The encoder unit is constructed such that a processing circuit and a read head are integrally formed on one and the same semiconductor substrate. This construction results in size reduction and integral formation of the encoder unit.

Abstract: A linear scale type measuring device capable of canceling an error caused by inclination of an encoder, a moire error, is disclosed. A linear encoder disposed relative to a scale includes two sensors A and B which are arranged such that they are inclined at a predetermined angle &thgr; with regard to the scale. At the time of measurement, a detection value corresponding to that with no inclination can be obtained by an operation based on detection values from the sensors A and B, and the known angle &thgr;, even when the encoder is further inclined by any angle &dgr;.

Abstract: Each of first scale coils arranged at a cyclic interval &lgr;1/2 of a magnetic encoder is connected by each of connecting wires to a corresponding one of second scale coils arranged at a different cyclic interval &lgr;2/2 thereof. Each of the connecting wires includes two parallel conductors placed in such a way as to be close to each other. The connecting wires are set so that at any position on the scale, the length of the connecting wire has an equal value. Thus, the signal levels of received signals, which are attenuated by electric currents flowing through the two conductors in opposite directions, can be controlled in such a manner as to be equal to each other. Consequently, the influence of the position of a detection coil on the scale, which is exerted on the signal level of the received signal, is reduced.

Abstract: An electromagnetic induction position detector has a detection head and a scale which are placed so as to be opposed to each other with a predetermined gap in a relatively movable manner. The detection head has a driving coil which generates a primary varying magnetic flux, and a receiving coil which detects a magnetic pattern changed in a predetermined spatial period and in a direction of the relative movement. The scale 2 has a magnetic modulating section which modulates the primary varying magnetic flux to generate the magnetic pattern. The scale 2 has a plate-shaped resin substrate 30. Metal foil 61 of a predetermined pattern which prevents the resin substrate 30 from being expanded or contracted, and suppresses an eddy current formed on a face of the scale opposite to a face on which the magnetic modulating section is formed.

Abstract: There is provided an induced current position transducer having an improved signal intensity and durability to gap variations. This can be achieved by preventing harmful diffusion of magnetic fluxes to reduce a loss due to leakage fluxes and forming an efficient closed magnetic path between a magnetic field generator and a magnetic flux sensor. A high permeable substance is disposed in a target magnetic path on members of a read head and a scale. This arrangement can suppress a loss due to leakage fluxes caused from diffusion of magnetic fluxes occurred in the conventional winding structure, improving a signal intensity of a magnetic flux and reducing an affection from an external magnetic flux.

Abstract: An induction type tranducer is formed to be a substrate having a multilayer structure. The substrate has a multilayer structure including six layers, a first layer through sixth layer. An exciting coil is formed at the first layer. Detecting coils are formed at the second layer and the third layer. A wiring layer is formed at the fifth layer at the opposite side of the scale from the core layer. A signal processing IC is formed at the sixth layer. A magnetic shield layer, which insulates magnetic flux from the exciting coil, is formed at the fourth layer between the exciting coil and the signal processing IC.

Abstract: A linear scale type measuring device capable of canceling an error caused by inclination of an encoder, a moire error, is disclosed. A linear encoder disposed relative to a scale includes two sensors A and B which are arranged such that they are inclined at a predetermined angle &thgr; with regard to the scale. At the time of measurement, a detection value corresponding to that with no inclination can be obtained by an operation based on detection values from the sensors A and B, and the known angle &thgr;, even when the encoder is further inclined by any angle &dgr;.

Abstract: A detect ion unit 10, which is disposed in opposite relation to a scale 12, includes a transmission coil 10a and a detection coil 10b. A metal film 10g formed of two opposing metal films is provided between a silicon substrate and the transmission coil 10a, one of the two metal films is connected to a drive circuit 10c, and the other is connected to the transmission coil 10a. The metal film 10g provides the capacitance C of an LC resonance circuit, so that a chip capacitor is made unnecessary. The metal film 10g may be formed of a magnetic material.

Abstract: In an electronic caliper, a detecting circuit 112 detects displacement of a grid with respect to a scale, on the basis of a signal from a transducer 110. A CPU 114 displays the detected position on a display device 124. The CPU 114 performs error detection on the transducer, only when the relative speed of the grid with respect the scale is zero, or becomes equal to or smaller than a predetermined value. Since error detection is performed only at a predetermined timing, power consumption can be reduced.

Abstract: An encoder unit 10 is disposed facing a scale 12. The encoder unit 10 is constructed such that a processing circuit 14 and a read head 16 are integrally formed on one and the same semiconductor substrate. This accrues to size reduction and integral formation of the encoder unit.

Abstract: An induction type transducer is formed to be a substrate 162 having a multilayer structure. The substrate 162 has a multilayer structure including six layers, a first layer 162a through sixth layer 162f. An exciting coil is formed at the first layer 162a. Detecting coils are formed at the second layer 162b and the third layer 162c. A wiring layer is formed at the fifth layer 162e at the opposite side of the scale from the core layer 161. A signal processing IC 166 is formed at the sixth layer 162f. A magnetic sheild layer, which insulates magnetic flux from the exciting coil, is formed at the fourth layer 162d between the exciting coil and the signal processing IC 166.

Abstract: There is provided an induced current position transducer having an improved signal intensity and durability to gap variations. This can be achieved by preventing harmful diffusion of magnetic fluxes to reduce a loss due to leakage fluxes and forming an efficient closed magnetic path between a magnetic field generator and a magnetic flux sensor. A high permeable substance is disposed in a target magnetic path on members of a read head and a scale. This arrangement can suppress a loss due to leakage fluxes caused from diffusion of magnetic fluxes occurred in the conventional winding structure, improving a signal intensity of a magnetic flux and reducing an affection from an external magnetic flux.

Abstract: A detection unit 10, which is disposed in opposite relation to a scale 12, includes a transmission coil 10a and a detection coil 10b. A metal film 10g formed of two opposing metal films is provided between a silicon substrate and the transmission coil 10a, one of the two metal films is connected to a drive circuit 10c, and the other is connected to the transmission coil 10a. The metal film 10g provides the capacitance C of an LC resonance circuit, so that a chip capacitor is made unnecessary. The metal film 10g may be formed of a magnetic material.

Abstract: An inductive linear encoder (10) has a position sensor (1) and scale (2) which are movably disposed relative to each other. The sensor (1) is with a drive wire (3) to which an alternating current is supplied, and one set of detection wires (4a-4d) at right angles to the drive wire (3) in the same plane. The scale (2) is configured including an elongate substrate (7) having its surface on which a series combination of conductive closed loop patterns (8) are periodically arranged at equal intervals. These conductive closed loop (8) are linearly laid out on the substrate (7) in the relative movement direction. Each loop (8) consists essentially of a reception conductor segment (8a) and signal transmit conductor segments (8b, 8c) integral with the former (8a). The receive conductor segment (8a) is responsible for generation of an induced current due to a first variable magnetic field creatable from the drive coil (3).