Patents by Inventor Toshihiko Kanno

Toshihiko Kanno has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Server apparatus, manufacturing apparatus, group management system, information processing method, and storage medium
    Patent number: 8843905
    Abstract: The present invention transmits upgrade information as appropriate from a server apparatus to one or more manufacturing apparatuses for performing a predetermined semiconductor process on processing target substrates. A server apparatus is provided with an upgrade information receiving portion that receives upgrade information, which is information for upgrading an execution software program for controlling the manufacturing apparatus; a state information storage portion in which state information, which is information relating to a state of the manufacturing apparatus, is stored; a transmission judging portion that judges whether or not to transmit the upgrade information to the manufacturing apparatus, using the state information; and a transmitting portion that transmits the upgrade information to the manufacturing apparatus to which the transmission judging portion has judged to transmit the upgrade information.
    Type: Grant
    Filed: November 1, 2007
    Date of Patent: September 23, 2014
    Assignee: Tokyo Electron Limited
    Inventors: Kohei Nara, Toshihiko Kanno
  • Server apparatus, manufacturing apparatus, group management system, information processing method, and storage medium
    Publication number: 20080134168
    Abstract: The present invention transmits upgrade information as appropriate from a server apparatus to one or more manufacturing apparatuses for performing a predetermined semiconductor process on processing target substrates. A server apparatus is provided with an upgrade information receiving portion that receives upgrade information, which is information for upgrading an execution software program for controlling the manufacturing apparatus; a state information storage portion in which state information, which is information relating to a state of the manufacturing apparatus, is stored; a transmission judging portion that judges whether or not to transmit the upgrade information to the manufacturing apparatus, using the state information; and a transmitting portion that transmits the upgrade information to the manufacturing apparatus to which the transmission judging portion has judged to transmit the upgrade information.
    Type: Application
    Filed: November 1, 2007
    Publication date: June 5, 2008
    Inventors: Kohei Nara, Toshihiko Kanno