Patents by Inventor Toshihiko NAKAHATA

Toshihiko NAKAHATA has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Deposition method and deposition apparatus
    Patent number: 11972932
    Abstract: [Object] To improve step coverage of a coating film [Solving Means] A deposition apparatus that includes a first electrode, a second electrode, a first power supply source, a second power supply source, and a phase adjuster is used. The first power supply source includes a first high-frequency power source and a first matching circuit, the first high-frequency power source outputting first high-frequency power, the first matching circuit being connected between the first high-frequency power source and the first electrode. The second power supply source includes a second matching circuit that outputs second high-frequency power, the second high-frequency power having the same period as the first high-frequency power and being lower than the first high-frequency power.
    Type: Grant
    Filed: November 9, 2021
    Date of Patent: April 30, 2024
    Assignee: Ulvac, Inc.
    Inventors: Toshihiko Nakahata, Kazuyoshi Hashimoto, Harumasa Yamaguchi
  • DEPOSITION METHOD AND DEPOSITION APPARATUS
    Publication number: 20240038502
    Abstract: [Object] To improve step coverage of a coating film [Solving Means] A deposition apparatus that includes a first electrode, a second electrode, a first power supply source, a second power supply source, and a phase adjuster is used. The first power supply source includes a first high-frequency power source and a first matching circuit, the first high-frequency power source outputting first high-frequency power, the first matching circuit being connected between the first high-frequency power source and the first electrode. The second power supply source includes a second matching circuit that outputs second high-frequency power, the second high-frequency power having the same period as the first high-frequency power and being lower than the first high-frequency power.
    Type: Application
    Filed: November 9, 2021
    Publication date: February 1, 2024
    Inventors: Toshihiko NAKAHATA, Kazuyoshi HASHIMOTO, Harumasa YAMAGUCHI