Abstract: An imprint apparatus including a substrate holding unit including a plurality of holding regions whose pressures to a substrate are independently controlled, and configured to hold the substrate on the plurality of holding regions, a first obtaining unit configured to obtain first information about a pressing force applied to a mold when the mold and an imprint material on the substrate are brought into contact with each other, and a control unit configured to control, based on the first information obtained by the first obtaining unit, the pressure between the substrate and each of the plurality of holding regions in a state in which the mold and the imprint material on the substrate are in contact with each other such that deformation that occurs in the substrate due to the pressing force falls within an allowable range.

Abstract: Provided is a liquid crystal polyester fiber comprising a liquid crystal polyester, wherein a maximum value of a crystallite size of 20×10?10 m or larger. The maximum value is obtained by D=K·?/? cos ? (wherein D represents a crystallite size, ? represents a wavelength of the measurement X-ray, ? represents a half-value width (radian), ? represents a diffraction angle, and K represents a Scherrer constant (0.9)) based on a diffraction peak on a 110 plane of an X-ray diffraction spectrum measured by a wide angle X-ray diffraction method using X-ray having a wavelength of 1×10?10 m.

Abstract: The present invention provides an imprint apparatus that forms a pattern of an imprint material on a substrate using a mold, the apparatus comprising: a supplier configured to supply the imprint material as a plurality of droplets onto the substrate; and a controller configured to control the supplier based on information indicating a target arrangement of the imprint material to be supplied as the plurality of droplets onto a predetermined region of the substrate, wherein the plurality of droplets in the target arrangement include a first droplet group including a plurality of first droplet arrays, a second droplet group including a plurality of second droplet arrays, and a third droplet array.

Abstract: A template for imprint comprises a main body having a bottom surface, a middle surface on a portion protruding relative to the bottom surface, and a pattern surface on a portion protruding relative to the middle surface, the pattern surface having an uneven pattern, wherein an outer edge of the pattern surface has a jigsaw shape, wherein a light-shielding member having a light transmittance lower than a light transmittance of the main body is disposed on the middle surface to surround the outer edge of the pattern surface in a plan view as viewed from the pattern surface, and wherein an outer edge of light-shielding member defines four sides having a shape in which a center of each side bulges outward with respect to a rectangle surrounding the outer edge of the pattern surface in the plan view, and wherein the shape of each side bulges outwardly in a stepwise manner from the ends of each side to the center of each side.

Abstract: The present invention provides an imprint apparatus that forms an imprint material on a substrate using a mold, comprising: a light irradiator configured to irradiate the substrate with light that changes a viscosity of the imprint material without curing the imprint material; a supplier configured to supply the imprint material onto the substrate; and a controller configured to, after controlling a supply process of supplying the imprint material to a plurality of shot regions in the substrate, control a forming process of forming the imprint material using the mold and curing the imprint material for each shot region, wherein the supply process includes first processing of sequentially supplying the imprint material to the plurality of shot regions by the supplier, and second processing of irradiating, with the light, a shot region to which the imprint material has been supplied.

Abstract: A template for imprint comprises a main body having a bottom surface, a middle surface on a portion protruding relative to the bottom surface, and a pattern surface on a portion protruding relative to the middle surface, the pattern surface having an uneven pattern, wherein an outer edge of the pattern surface has a jigsaw shape, wherein a light-shielding member having a light transmittance lower than a light transmittance of the main body is disposed on the middle surface to surround the outer edge of the pattern surface in a plan view as viewed from the pattern surface, and wherein the light-shielding member is disposed at least in an entire region within a depressed portion of an outer edge of the jigsaw shape.

Abstract: A cured product includes a condensed silicone resin cured product and satisfies (1) and (2): (1) In a solid state 29Si-nuclear magnetic resonance spectrum of a condensed silicone resin cured product, there is a peak assigned to silicon atoms of a T unit (silicon atoms bonded to three oxygen atoms); and (2) In a Kratky Plot, from a wavenumber qMax of a maximum peak position in the range of wavenumbers of 0.01 to 0.17 ??1 of the X-ray, a parameter dMax obtained by formula (A) is 170 ? or less.

Abstract: Provided is a detection apparatus that detects a mark with a periodic structure and includes an illumination optical system configured to irradiate light on the mark; a light receiving optical system configured to receive a diffracted light from the mark when a relative position between the illumination optical system and the mark is changed in the measurement direction; and a photodetector configured to detect the diffracted light from the light receiving optical system. Here, a numerical aperture of the light receiving optical system in the measurement direction is larger than a numerical aperture of the light receiving optical system in the non-measurement direction in the plane on which the mark is formed.

Abstract: An apparatus includes an optical system configured to irradiate a surface of a substrate with a beam, a control unit configured to control a position of the irradiation of the beam, and a first measurement unit and a second measurement unit each configured to measure a position of a mark formed on the substrate. The second measurement unit is placed at a position closer to an optical axis of the optical system than the first measurement unit is. Based on a position measurement value measured by the first measurement unit and position measurement values measured at different timings by the second measurement unit, the control unit controls the position of the beam irradiated to the substrate. The position measurement values measured at the different timings are values obtained from the same mark or values obtained from two marks adjacent to a common shot area.

Abstract: A stage apparatus includes first, second, third, and fourth stages arranged along a plane defined by first and second axes orthogonal to each other, each of the first to fourth stages holding an article and being subjected to scanning along the plane, and a controller configured to control the scanning of the first to fourth stages in synchronization such that a pair of the first and second stages and a pair of the third and fourth stages are respectively positioned symmetrically to each other with respect to the first axis and a pair of the first and third stages and a pair of the second and fourth stages are respectively positioned symmetrically to each other with respect to the second axis.

Abstract: The present invention provides a detection apparatus including a detector configured to detect a mark including a plurality of patterns arrayed on an object in a first direction, the apparatus comprising a support configured to support at least a part of the detector, wherein the support is configured to support the at least the part such that a displacement of the at least the part in a second direction corresponding to the first direction is smaller than a displacement of the at least the part in a third direction perpendicular to the second direction.

Abstract: Provided is a drawing apparatus including a plurality of drawing devices each of which is configured to draw a pattern on a substrate with a plurality of charged particle beams, the plurality of drawing devices performing respective drawings in parallel, the drawing apparatus comprising: a measuring device configured to measure a flatness of the substrate, wherein each of the plurality of drawing devices comprises: a charged particle optical system configured to irradiate the substrate with the plurality of charged particle beams; and a controller configured to control an operation of the charged particle optical system so as to compensate for distortion of the pattern which is determined by data of inclination of a charged particle beam of the charged particle beams with respect to an axis of the charged particle optical system and data of the flatness measured by the measuring device.

Abstract: Disclosed are a liquid heating unit capable of monitoring the temperature of the liquid storage tank or pipe in which liquid is heated by transmission of the radiated light, a liquid processing apparatus including the same, and a liquid processing method. The liquid heating unit includes: a lamp heater radiating light; a cylindrical member made of material transmitting the radiated light and having a cylindrical shape in which the lamp heater is able to be inserted and penetrated into an internal space thereof; a liquid pipe placed along an outer periphery of the cylindrical member and configured to heat liquid flowing therein using the radiated light; a reflection plate that covers the liquid pipe from the outside and reflects the radiated light; and a first temperature sensor attached to an outer surface of the reflection plate.

Abstract: The present invention provides an optical apparatus which detects an image of a mark on a substrate, the apparatus including an optical system configured to form an image of the mark, a detector configured to detect the image, wherein the optical system includes an aperture stop, an aperture, corresponding to a first field of view and a second field of view of the detector, being formed in the aperture stop, a light-shielding member, and a driving mechanism configured to position the light-shielding member so that one of the first field of view and the second field of view is valid, and a part of the other is invalid.

Abstract: Disclosed are a liquid heating unit capable of monitoring the temperature of the liquid storage tank or pipe in which liquid is heated by permeation of the radiated light, a liquid processing apparatus including the same, and a liquid processing method. The liquid heating unit includes: a lamp heater radiating light; a cylindrical member having a cylindrical shape made of material permeating the radiated light configured to insert and penetrate the lamp heater into an internal space; a liquid conduction part placed along an outer periphery of the cylindrical member and configured to heat liquid flowing therein by using the radiated light; a reflection plate covering the liquid conduction part from the outside and reflecting the radiated light; and a first temperature sensor attached to an outer surface of the reflection plate.

Abstract: An apparatus for manufacturing a resin-impregnated cured sheet includes conveyance means for conveying a long uncured fiber sheet which is obtained by using short fibers to make paper and which contains uncured resin, wherein the conveyance means is equipped with at least one rotation belt set comprising a drive roll, a follower roll, and an endless belt which is put on and around the drive roll and follower roll; resin curing means for curing the uncured resin of the uncured fiber sheet; a winding device in which a trimming cutter for trimming both side edges of the resin-impregnated cured sheet; a press roll for retaining a winding face pressure; and a winding shaft are arranged in order along a running path of the resin-impregnated cured sheet.

Abstract: An object of the present invention is to provide an apparatus and a method for manufacturing a windable carbonaceous material sheet, which is obtained by continuously curing a long uncured fiber sheet which is obtained by using short fibers to make paper and which contains uncured resin to produce a resin-impregnated cured sheet, and then continuously carbonizing it, and its production process. For the object, a long uncured fiber sheet (1a) is conveyed by conveyance means which is equipped with one rotation belt set (2) comprising a drive roll (2a), a follower roll (2b), and an endless belt (2c) which is put on and around these rolls (2a, 2b). A resin-impregnated cured sheet (1b) is produced by heating and pressurizing the uncured fiber sheet (1a) by resin curing means (3) which is arranged so as to nip the uncured fiber sheet through the endless belt (2c).

Abstract: A stage apparatus includes a base, a stage movable on the base in first and second directions, a first member movable relative to the base in the first direction, and a second member movable relative to the base in the second direction. The first member is placed on the second member. With this arrangement, drive reaction-forces generated due to movement of the stage can be canceled by moving the first and second members, resulting in a smaller space needed for accommodating a canceling mechanism.

Abstract: An object of the present invention is to provide an apparatus and a method for manufacturing a windable carbonaceous material sheet, which is obtained by continuously curing a long uncured fiber sheet which is obtained by using short fibers to make paper and which contains uncured resin to produce a resin-impregnated cured sheet, and then continuously carbonizing it, and its production process. For the object, a long uncured fiber sheet (1a) is conveyed by conveyance means which is equipped with one rotation belt set (2) comprising a drive roll (2a), a follower roll (2b), and an endless belt (2c) which is put on and around these rolls (2a, 2b). A resin-impregnated cured sheet (1b) is produced by heating and pressurizing the uncured fiber sheet (1a) by resin curing means (3) which is arranged so as to nip the uncured fiber sheet through the endless belt (2c).

Abstract: A stage apparatus includes a base, a stage movable on the base in first and second directions, a first member movable relative to the base in the first direction, and a second member movable relative to the base in the second direction. The first member is placed on the second member. With this arrangement, drive reaction-forces generated due to movement of the stage can be canceled by moving the first and second members, resulting in a smaller space needed for accommodating a canceling mechanism.