Patents by Inventor Toshihiko Shiota

Toshihiko Shiota has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Gas absorber
    Patent number: 4826805
    Abstract: An absorber that is capable of efficient absorption of SiF.sub.4 and/or BCl.sub.3 present in gases that are discharged from semiconductor fabrication plants, ceramic producing plants and other plants is disclosed. The absorber contains an alkali agent, water and a superabsorbent as effective components. This absorber, when used to treat an effluent gas, attains as high reaction rate as in the conventional wet process and can be handled as easily as in the dry process.
    Type: Grant
    Filed: October 7, 1987
    Date of Patent: May 2, 1989
    Assignees: Ebara Research Co., Ltd., Ebara Corporation
    Inventors: Akira Fukunaga, Hidenobu Arimitsu, Yoshiharu Yasuhara, Toshihiko Shiota