Patents by Inventor Toshihiro OHNO

Toshihiro OHNO has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Substrate processing apparatus, substrate processing method and substrate processing program
    Patent number: 10128121
    Abstract: A substrate processing apparatus is provided that includes a control part configured to control a substrate process in accordance with a processing procedure set in a process recipe. The process recipe is linked to a plurality of partial recipes obtained by dividing the processing procedure into functions. The control part controls the substrate process in accordance with processing procedures set in the linked plurality of partial recipes.
    Type: Grant
    Filed: May 18, 2015
    Date of Patent: November 13, 2018
    Assignee: TOKYO ELECTRON LIMITED
    Inventors: Mitsuru Sasaki, Tatsuya Miura, Toshihiro Ohno, Kazumune Ono, Shoko Endo, Ryu Kitahara
  • SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING PROGRAM
    Publication number: 20170040177
    Abstract: A substrate processing apparatus is provided that includes a control part configured to control a substrate process in accordance with a processing procedure set in a process recipe. The process recipe is linked to a plurality of partial recipes obtained by dividing the processing procedure into functions. The control part controls the substrate process in accordance with processing procedures set in the linked plurality of partial recipes.
    Type: Application
    Filed: May 18, 2015
    Publication date: February 9, 2017
    Inventors: Mitsuru SASAKI, Tatsuya MIURA, Toshihiro OHNO, Kazumune ONO, Shoko ENDO, Ryu KITAHARA