Abstract: A lot-base management host computer performs management of wafers with a lot as a unit by managing a process condition for each lot, a correspondence between a carrier ID and a lot ID, and a correspondence between a slot ID and a wafer ID in each lot. A wafer-base management host computer performs management for each wafer in a lot by managing a process condition corresponding to a wafer number in a lot. Further, a converted condition instructing section transmits data acquired from the lot-base management host computer and the wafer-base management host computer to a semiconductor fabrication apparatus. The wafer-base management host computer stores a process condition for each level and a machine number of a semiconductor fabrication apparatus in use in the form of a matrix as an experimental level master and issues a process condition as instructions to the semiconductor fabrication apparatus through the converted condition instructing section according to the experimental level master.

Abstract: In a semiconductor device manufacturing system including a plurality of semiconductor device manufacturing equipment, a control circuit is connected to the semiconductor device manufacturing equipment. Also, a lot status memory for storing status of lots of semiconductor wafers, a branch content memory for storing branch information of the lots of semiconductor wafers, and a determination level memory for storing determination levels of the lots of semiconductor wafers are connected to the control circuit.

Abstract: A manufacturing control system, having a data base storing a procedure table for managing the sequence of manufacturing processes and manufacturing conditions in industrial products to be manufactured, and for controlling a manufacturing line of industrial products on the basis of the contents of the procedure table. The system includes a modify instruction classifying unit for receiving a data modify instruction for modifying the data managed in the data base and classifying the data modify instruction by an instruction pattern. A data modifying unit searches for the data to be modified by the data modify instruction from the data base depending on the classification by said modify instruction classifying unit and automatically modifying all the data to be modified according to the data modify instruction.