Abstract: A Wien filter includes a cylindrical yoke, a plurality of magnetic poles arranged at intervals along an inner periphery of the yoke, the magnetic poles each joined at one end thereof to the yoke, a coil wound on each of the plurality of magnetic poles, and an electrode disposed at the other end of each of the plurality of magnetic poles, with an insulator between the electrode and the magnetic pole. The magnetic poles each has a recess at the other end thereof, and the insulator and the electrode may be disposed in the recess.

Abstract: According to the present invention, a desired one of multiple beams can be aligned with a small-diameter aperture quickly. A multi-electron beam inspection apparatus includes a beam selection aperture substrate including a first passage hole that passes all the multiple electron beams, a second passage hole through which one of the multiple electron beams is able to pass, a first slit, and a second slit not parallel to the first slit, an aperture moving unit moving the beam selection aperture substrate, a first detector detecting a current of a beam having passed through the first slit and a current of a beam having passed through the second slit, of the multiple electron beams, and a second detector detecting multiple secondary electron beams including reflected electrons, discharged from a substrate, due to application of the multiple electron beams, having passed through the first passage hole, to the substrate. The substrate is inspected based on an output signal from the second detector.

Abstract: According to one aspect of the present invention, a ? stage mechanism includes a fixed shaft; a plurality of bearings in which outer rings roll on an outer peripheral surface of the fixed shaft; a plurality of cylindrical members supported in a state of being inserted inside inner rings of the plurality of bearings; and a table that is arranged on the plurality of cylindrical members and moves in a rotational direction about a center of the fixed shaft by the plurality of bearings rolling on an outer peripheral surface of the fixed shaft.

Abstract: According to one aspect of the present invention, a 8 stage mechanism includes a fixed shaft; a plurality of bearings in which outer rings roll on an outer peripheral surface of the fixed shaft; a plurality of cylindrical members supported in a state of being inserted inside inner rings of the plurality of bearings; and a table that is arranged on the plurality of cylindrical members and moves in a rotational direction about a center of the fixed shaft by the plurality of bearings rolling on an outer peripheral surface of the fixed shaft.

Abstract: A stage mechanism includes a wedge with an inclined surface having a predetermined angle with respect to a horizontal direction, a roller relatively rolling on the inclined surface of the wedge by relative horizontal movement of the wedge, a fine movement mechanism supporting the roller, going up and down in accordance with up and down movement of the roller which relatively rolls on the inclined surfaces by the relative horizontal movement of the wedge, and capable of going up and down more finely than the up and down movement of the roller, a table supported by the fine movement mechanism, and an elastic body connected to the table, restraining horizontal movement of the table, and applying an elastic force, in at least one of upward and downward directions, to the table.

Abstract: A stage mechanism includes a wedge with an inclined surface having a predetermined angle with respect to a horizontal direction, a roller relatively rolling on the inclined surface of the wedge by relative horizontal movement of the wedge, a fine movement mechanism supporting the roller, going up and down in accordance with up and down movement of the roller which relatively rolls on the inclined surfaces by the relative horizontal movement of the wedge, and capable of going up and down more finely than the up and down movement of the roller, a table supported by the fine movement mechanism, and an elastic body connected to the table, restraining horizontal movement of the table, and applying an elastic force, in at least one of upward and downward directions, to the table.

Abstract: According to one aspect of the present invention, a charged particle beam image acquisition apparatus includes a rectangular parallelepiped chamber where a target object is disposed; a primary electron optical column placed on an upper surface of the chamber so that a point of intersection between two diagonal lines on the upper surface of the chamber is located at a center of a horizontal section of the primary electron optical column, a primary charged particle beam optics irradiating the target object with a primary charged particle beam being disposed in the primary electron optical column; and a secondary electron optical column connected to a lower portion of the primary electron optical column, a secondary charged particle beam optics being disposed in the secondary electron optical column and a secondary charged particle beam passing through the secondary charged particle beam optics.

Abstract: According to one aspect of the present invention, a charged particle beam image acquisition apparatus includes a rectangular parallelepiped chamber where a target object is disposed; a primary electron optical column placed on an upper surface of the chamber so that a point of intersection between two diagonal lines on the upper surface of the chamber is located at a center of a horizontal section of the primary electron optical column, a primary charged particle beam optics irradiating the target object with a primary charged particle beam being disposed in the primary electron optical column; and a secondary electron optical column connected to a lower portion of the primary electron optical column, a secondary charged particle beam optics being disposed in the secondary electron optical column and a secondary charged particle beam passing through the secondary charged particle beam optics.

Abstract: According to one embodiment, a transfer apparatus includes a base, a first linear motion member, a second linear motion member, a moving conveyor, an extraction arm, and a holding part. The first linear motion member is supported by the base and is movable in a first direction. The second linear motion member is supported by the first liner motion member and is movable in a second direction crossing the first direction. The moving conveyor is supported by the second linear motion member and includes a belt for conveying an article. The extraction arm is provided on a side of the moving conveyor, extracts the article and places the article on the belt. The holding part is provided at an end of the extraction arm and holds the article.

Abstract: Provide a cooking device capable of processing food with a simple configuration while inhibiting oxidation of food and also inhibiting pressure inside a cooking container from rising excessively. A cooking device processes food in an accommodation space by a processing tool rotated by a motor while an air in the accommodation space in which the processing tool to process the food is arranged is exhausted and includes a driving device (a closing member) and a check valve. The driving device opens/closes the accommodation space. The check valve allows an outflow of the air out of the accommodation space when the air in the accommodation space closed by the driving device is exhausted and also stops an opposite flow of the air after the air is exhausted.

Abstract: Provide a cooking device capable of processing food with a simple configuration while inhibiting oxidation of food and also inhibiting pressure inside a cooking container from rising excessively. A cooking device processes food in an accommodation space by a processing tool rotated by a motor while an air in the accommodation space in which the processing tool to process the food is arranged is exhausted and includes a driving device (a closing member) and a check valve. The driving device opens/closes the accommodation space. The check valve allows an outflow of the air out of the accommodation space when the air in the accommodation space closed by the driving device is exhausted and also stops an opposite flow of the air after the air is exhausted.

Abstract: According to one embodiment, a transfer apparatus includes a base, a first linear motion member, a second linear motion member, a moving conveyor, an extraction arm, and a holding part. The first linear motion member is supported by the base and is movable in a first direction. The second linear motion member is supported by the first liner motion member and is movable in a second direction crossing the first direction. The moving conveyor is supported by the second linear motion member and includes a belt for conveying an article. The extraction arm is provided on a side of the moving conveyor, extracts the article and places the article on the belt. The holding part is provided at an end of the extraction arm and holds the article.

Abstract: According to one embodiment, in an electronic apparatus, a first pair of electrodes has a first electrode and a second electrode. A second pair of electrodes is disposed in parallel with the first pair, and has a third electrode and a fourth electrode. A third pair of electrodes is disposed between the first pair and the second pair in parallel with the first pair and the second pair, and has a fifth electrode and a sixth electrode. A first wire electrically connects the first electrode and the second electrode. A second wire electrically connects the third electrode and the fourth electrode. A third wire electrically connects the fifth electrode and the sixth electrode. A gel covers the first wire, the second wire, and the third wire. A first detection unit detects a break status of the first wire or the second wire.

Abstract: According to one embodiment, an assist control apparatus includes a driving mechanism, an acquisition unit, an estimation unit and a drive unit. The driving mechanism is attached to a leg of a user. The acquisition unit is configured to acquire a status signal indicating a motion of an arm of the user. The estimation unit is configured to determine an assistance timing which is a timing for assisting an action of the user based on changes in the status signal. The drive unit is configured to drive the driving mechanism to generate an assistance power to assist the action of the user in accordance with the assistance timing.

Abstract: Provide a cooking device capable of processing food with a simple configuration while inhibiting oxidation of food and also inhibiting pressure inside a cooking container from rising excessively. A cooking device processes food in an accommodation space by a processing tool rotated by a motor while an air in the accommodation space in which the processing tool to process the food is arranged is exhausted and includes a driving device (a closing member) and a check valve. The driving device opens/closes the accommodation space. The check valve allows an outflow of the air out of the accommodation space when the air in the accommodation space closed by the driving device is exhausted and also stops an opposite flow of the air after the air is exhausted.

Abstract: According to one embodiment, in an electronic apparatus, a first pair of electrodes has a first electrode and a second electrode. A second pair of electrodes is disposed in parallel with the first pair, and has a third electrode and a fourth electrode. A third pair of electrodes is disposed between the first pair and the second pair in parallel with the first pair and the second pair, and has a fifth electrode and a sixth electrode. A first wire electrically connects the first electrode and the second electrode. A second wire electrically connects the third electrode and the fourth electrode. A third wire electrically connects the fifth electrode and the sixth electrode. A gel covers the first wire, the second wire, and the third wire. A first detection unit detects a break status of the first wire or the second wire.

Abstract: A piezoelectric motor includes: a base; first and second piezoelectric elements that are provided symmetrically on the base to face with each other, the first and second piezoelectric elements actuating in opposite directions; first and second displacement enlarging mechanisms that respectively enlarge actuating displacements of the first and second piezoelectric elements through first and second levers that rotate around first and second fulcrums fixed to the base; first and second leaf springs that are respectively coupled to action points of the first and second levers at one ends thereof; and an actuating portion that is coupled to the other ends of the first and second leaf springs and swings in accordance with actuation of the first and the second piezoelectric elements, the actuating portion being urged against a driven member to actuate the driven member with a frictional force.

Abstract: A camera unit includes a soft substrate on which electrode regions and an image pickup device region are disposed, a driving electrode group disposed on one of the electrode regions, an image pickup device disposed on the image pickup device region, stationary unit frame attaching portions disposed at positions surrounding the image pickup device region, a stationary unit frame attached to the stationary unit frame attaching portions, and movable units disposed in the stationary unit frame. The soft substrate is bent along bending positions between the electrode regions and the image pickup device region, the electrode regions are fixed on sides of the stationary unit frame inwardly thereof, and the image pickup device region is fixed on an end surface of the stationary unit frame toward the movable units.

Abstract: A piezoelectric motor includes: a driven member having a substantially spherical shape; a base; a support member provided on the base; a gimbal frame that is provided on a periphery of the driven member; a first bearing that couples the gimbal frame to the support member to be rotatable around a first rotation axis; a second bearing that couples the driven member to the gimbal frame to be rotatable around a second rotation axis that is orthogonal to the first rotation axis; a plurality of piezoelectric elements, each of which has one end fixed onto the base and the other end disposed to be in contact with an actuation portion that abuts the driven member; and an elastic portion that is formed on the gimbal frame, the elastic portion being displaceable in a direction orthogonal to the first rotation axis and the second rotation axis.

Abstract: A piezoelectric motor includes: a plurality of piezoelectric units, respectively in contact with a driven target, disposed separately from each other, and configured to drive the driven target; and a magnet configured to apply a preload force to each of the plurality of piezoelectric units by magnetically attracting the driven target in the absence of direct contact with the driven target.