Abstract: Provided is an EUV transmissive membrane including a main layer having an EUV transmittance of 85% or more at a wavelength of 13.5 nm, wherein the main layer is composed of a monolayer or a composite layer of two or more layers, and a protective layer that covers at least one side of the main layer, wherein the protective layer includes at least one selected from the group consisting of amorphous carbon, Cu, Al, and an organic resist as a main component.

Abstract: There is provided an EUV transmissive membrane including: a main layer composed of metallic beryllium that has a first surface and a second surface; and a pair of surface layers provided on the first surface and the second surface of the main layer, each containing at least one fluoride selected from beryllium fluoride, beryllium fluoride nitride, beryllium fluoride oxide, and beryllium fluoride nitride oxide.

Abstract: There is provided an EUV transmissive membrane having an EUV transmittance of 80.0% or more at a wavelength of 13.5 nm and including a main layer having an IR emissivity of 2.0% or more at a wavelength of 2 µm and a protective layer that covers at least one side of the main layer and has an IR transmittance of 70% or more at a wavelength of 2 µm.

Abstract: Provided is an EUV transmissive membrane including a main layer composed of metallic beryllium and a protective layer composed of beryllium nitride that covers at least one side of the main layer.

Abstract: A heat-resistance element includes: a heat-resistant substrate including a ceramic material; one or more power wires embedded in the heat-resistant substrate; and a coil structure that is configured by a coil wire extending between start and end points and includes coil segments. The coil segment includes or corresponds to one winding of the coil wire. The coil segment includes: a first conductor extending along the power wire; a second conductor arranged farther from the one or more power wires than the first conductor, the second conductor extending along the power wire; a first connection wire coupling the first and second conductors in the same coil segment; and a second connection wire coupling first and second conductors of adjacent coil segments in the circumferential direction, all of which are embedded in the heat-resistant substrate, and at least the first conductor and the second conductor are not exposed from the heat-resistant substrate.

Abstract: A heat pipe disclosed herein may include a tubular body sealing a working fluid therein; and a wick disposed on at least a part of inside of the tubular body. The tubular body may include a ceramic portion constituted of a ceramic material. An axial length of the ceramic portion may be equal to or greater than L/2, where L is an axial length of the tubular body.

Abstract: A heat-resistant device for current detection may include a heat-resistant substrate including a ceramic material; a group of power wirings embedded in the heat-resistant substrate; and a coil structure. The coil structure may include a coil wiring in which coil units each including or corresponding to one turn of the coil wiring are arranged in a circumferential direction around the group of power wirings. The coil unit may include: a first conductor; a second conductor; a first connection wiring; and a second connection wiring which may be embedded in the heat-resistant substrate. At least the first conductor and the second conductor may not be exposed outside of the heat-resistant substrate. The respective first conductors may be spaced by the substantially same minimum distance from an outer circumferential line surrounding the group of power wirings in a plane orthogonal to the extending direction of the group of power wirings.

Abstract: A heat-resistance element includes: a heat-resistant substrate including a ceramic material; one or more power wires embedded in the heat-resistant substrate; and a coil structure that is configured by a coil wire extending between start and end points and includes coil segments. The coil segment includes or corresponds to one winding of the coil wire. The coil segment includes: a first conductor extending along the power wire; a second conductor arranged farther from the one or more power wires than the first conductor, the second conductor extending along the power wire; a first connection wire coupling the first and second conductors in the same coil segment; and a second connection wire coupling first and second conductors of adjacent coil segments in the circumferential direction, all of which are embedded in the heat-resistant substrate, and at least the first conductor and the second conductor are not exposed from the heat-resistant substrate.

Abstract: A heat-resistant device for current detection may include a heat-resistant substrate including a ceramic material; a group of power wirings embedded in the heat-resistant substrate; and a coil structure. The coil structure may include a coil wiring in which coil units each including or corresponding to one turn of the coil wiring are arranged in a circumferential direction around the group of power wirings. The coil unit may include: a first conductor; a second conductor; a first connection wiring; and a second connection wiring which may be embedded in the heat-resistant substrate. At least the first conductor and the second conductor may not be exposed outside of the heat-resistant substrate. The respective first conductors may be spaced by the substantially same minimum distance from an outer circumferential line surrounding the group of power wirings in a plane orthogonal to the extending direction of the group of power wirings.

Abstract: A piezoelectric/electrostrictive element includes a substrate, an adhesive layer, a first conductive layer, an anchor portion and a second conductive layer. The substrate contains a ceramic as a main component. The substrate has a main surface. The adhesive layer is formed on the main surface of the substrate. The adhesive layer contains a metal oxide as a main component. The first conductive layer is formed on the adhesive layer. The anchor portion is formed on the adhesive layer. The anchor portion is embedded in the conductive layer. The anchor portion contains glass as a main component. The second conductive layer is disposed opposite to the first conductive layer with the substrate located in-between.

Abstract: A piezoelectric/electrostrictive element includes a substrate, an adhesive layer, a first conductive layer, an anchor portion and a second conductive layer. The substrate contains a ceramic as a main component. The substrate has a main surface. The adhesive layer is formed on the main surface of the substrate. The adhesive layer contains a metal oxide as a main component. The first conductive layer is formed on the adhesive layer. The anchor portion is formed on the adhesive layer. The anchor portion is embedded in the conductive layer. The anchor portion contains glass as a main component. The second conductive layer is disposed opposite to the first conductive layer with the substrate located in-between.

Abstract: There is provided a piezoelectric/electrostrictive element having little decease of Qm even in a high electric field in the case of a piezoelectric element. The piezoelectric/electrostrictive body is characterized in that the rate of Qm in an electric field of 10 V/mm is 30% or more with respect to Qm in an electric field of 1 V/mm.

Abstract: A piezoelectric/electrostrictive membrane element is provided, including a ceramic substrate, a membranous piezoelectric/electrostrictive portion including a piezoelectric/electrostrictive body made of a large number of crystal particles having a lead zirconate titanate based piezoelectric/electrostrictive ceramic composition, and membranous electrodes electrically connected to the piezoelectric/electrostrictive portion. The crystal particles include crystal main body portions, and surface layer portions arranged in at least a part of the outer periphery of crystal main body portions and having a crystal structure which is different from that of the crystal main body portions. The piezoelectric/electrostrictive portion is bonded in a solid state to the substrate directly or via electrodes.

Abstract: Provided is a piezoelectric/electrostrictive ceramic which produces large electric-field induced strain without performing an aging treatment for a long period of time. A piezoelectric/electrostrictive ceramic sintered body in which the ratio of the number of ions at A sites to the number of ions at B sites in a perovskite structure is at least 0.94 to at most 0.99 is subjected to an oxygen heat treatment at a temperature of 600 to 1050° C. for 2 to 100 hours under an atmosphere with an oxygen partial pressure of 0.05 to 1.0 atm.

Abstract: A piezoelectric/electrostrictive film type device including a thin substrate made of ceramic and a piezoelectric/electrostrictive operating portion disposed on the substrate and constituted by successively laminating a lower electrode film, a piezoelectric/electrostrictive film containing a large number of crystal particles constituted of a piezoelectric/electrostrictive composition, and an upper electrode film. The piezoelectric/electrostrictive composition contains one or more alkali metal elements selected from the group consisting of lithium, potassium, and sodium, and one or more metal elements selected from the group consisting of niobium, tantalum, antimony, and silver. Circle equivalent diameters of 90% or more of the large number of crystal particles are in a range of 0.3 to 50 ?m.

Abstract: There is disclosed a piezoelectric/electrostrictive porcelain composition capable of manufacturing, at a comparatively low sintering temperature, a piezoelectric/electrostrictive body which is dense and superior in crystallinity and which has satisfactory piezoelectric/electrostrictive characteristics so that deviation of the composition is not easily generated. The piezoelectric/electrostrictive porcelain composition contains as a major component a piezoelectric/electrostrictive porcelain composition component including a PbMg1/3Nb2/3O3—PbZrO3—PbTiO3 ternary solid solution system composition and NiO or including a Pb(Mg, Ni)1/3Nb2/3O3—PbZrO3—PbTiO3 ternary solid solution system composition, and further contains lead germanate.

Abstract: There is provided a piezoelectric element/electrostrictive element having little decease of Qm even in a high electric field in the case of a piezoelectric element. The piezoelectric body/electrostrictive body is characterized in that the rate of Qm in an electric field of 10 V/mm is 30% or more with respect to Qm in an electric field of 1 V/mm.

Abstract: The piezoelectric/electrostrictive properties and mechanical durability of a piezoelectric/electrostrictive ceramic can be improved. A piezoelectric/electrostrictive device has a laminated structure in which an electrode film, a piezoelectric/electrostrictive film, an electrode film, an piezoelectric/electrostrictive film, and an electrode film are laminated in the order mentioned on a thin portion of a substrate. The piezoelectric/electrostrictive films are ceramic films with a matrix of perovskite oxide that contains lead (Pb) as an A-site component and nickel (Ni), aluminum (Al), niobium (Nb), zirconium (Zr), and titanium (Ti) as B-site components. The piezoelectric/electrostrictive films are formed by firing as a unit the substrate that contains aluminum oxide and an intermediate coating film of perovskite oxide that contains components other than aluminum so that aluminum oxide is diffused from the substrate to the intermediate coating film.

Abstract: The piezoelectric/electrostrictive properties and mechanical durability of a piezoelectric/electrostrictive ceramic can be improved. A piezoelectric/electrostrictive device has a laminated structure in which an electrode film, a piezoelectric/electrostrictive film, an electrode film, an piezoelectric/electrostrictive film, and an electrode film are laminated in the order mentioned on a thin portion of a substrate. The piezoelectric/electrostrictive films are ceramic films with a matrix of perovskite oxide that contains lead (Pb) as an A-site component and nickel (Ni), aluminum (Al), niobium (Nb), zirconium (Zr), and titanium (Ti) as B-site components. The piezoelectric/electrostrictive films are formed by firing as a unit the substrate that contains aluminum oxide and an intermediate coating film of perovskite oxide that contains components other than aluminum so that aluminum oxide is diffused from the substrate to the intermediate coating film.

Abstract: Piezoelectric/electrostrictive ceramics are provided, which exhibit only a small change in properties after polarization, high insulating properties, and narrow variations in durability. A piezoelectric/electrostrictive element has a laminated structure in which an electrode film, a piezoelectric/electrostrictive film, another electrode film, another piezoelectric/electrostrictive film, and another electrode film are laminated in order of mention on a thin portion of a substrate. The piezoelectric/electrostrictive films are ceramic films that include a perovskite oxide containing lead as an A-site component and magnesium, nickel, niobium, titanium, and zirconium as B-site components. Crystal grains in the piezoelectric/electrostrictive films have a core/shell structure with the shell portion having a higher concentration of nickel than the core portion and with the core portion having a higher concentration of magnesium than the shell portion.