Patents by Inventor Toshikatu Matsuya

Toshikatu Matsuya has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Optical members and blanks of synthetic silica glass and method for their production
    Patent number: 5325230
    Abstract: The invention relates to lenses, prisms or other optical members which are subjected to high-power ultraviolet light having a wavelength of about 360 nm or less, or ionizing radiation, particularly optical members for use in laser exposure apparatus for lithography, and to blanks for such optical members. The homogeneity of the refractive index distribution and the resistance to optical deterioration when the optical members are exposed for a long period of time to short wavelength ultraviolet light from a laser beam are improved. The optical members are made of high-purity synthetic silica glass material containing at least about 50 wt. ppm of OH groups, and are doped with hydrogen.
    Type: Grant
    Filed: December 6, 1991
    Date of Patent: June 28, 1994
    Assignees: Shin-Etsu Quartz Products Co., Ltd., Heraeus Quarzglas GmbH
    Inventors: Shigeru Yamagata, Kyoichi Inaki, Toshikatu Matsuya, Ralf Takke, Stephan Thomas, Heinz Fabian
  • Optical members and blanks or synthetic silica glass and method for their production
    Patent number: 5086352
    Abstract: The invention relates to lenses, prisms or other optical members which are subjected to high-power ultraviolet light having a wavelength of about 360 nm or less, or ionizing radiation, particularly optical members for use in laser exposure apparatus for lithography, and to blanks for such optical members. The homogeneity of the refractive index distribution and the resistance to optical deterioration when the optical members are exposed for a long period of time to short wavelength ultraviolet light from a laser beam are improved. The optical members are made of high-purity synthetic silica glass material containing at least about 50 wt. ppm of OH groups, and are doped with hydrogen.
    Type: Grant
    Filed: June 8, 1990
    Date of Patent: February 4, 1992
    Assignees: Shin-Etsu Quartz Products Co., Ltd., Heraeus Quarzglas GmbH
    Inventors: Shigeru Yamagata, Kyoichi Inaki, Toshikatu Matsuya, Ralf Takke, Stephan Thomas, Heinz Fabian