Patents by Inventor Toshikazu Arihisa

Toshikazu Arihisa has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Apparatus for cleaning both sides of substrate
    Patent number: 6276378
    Abstract: An apparatus for cleaning both sides of a substrate, incorporating a spin chuck for holding a substrate such that contact with at least a central portion of the substrate is prevented, a motor having a hollow shaft connected to the spin chuck to transmit rotating force to the spin chuck, a front-side cleaning mechanism for cleaning a surface of the substrate held by the spin chuck, and a back-side cleaning mechanism for rinsing a back side of the substrate held by the spin chuck, wherein the back-side cleaning mechanism is disposed to face the back side of the substrate held by the spin chuck through hollow portions of the hollow shaft.
    Type: Grant
    Filed: August 11, 2000
    Date of Patent: August 21, 2001
    Assignee: Tokyo Electron Limited
    Inventors: Hiroki Taniyama, Toshikazu Arihisa
  • Apparatus for cleaning both sides of substrate
    Patent number: 6115867
    Abstract: An apparatus for cleaning both sides of a substrate, incorporating a spin chuck for holding a substrate such that contact with at least a central portion of the substrate is prevented, a motor having a hollow shaft connected to the spin chuck to transmit rotating force to the spin chuck, a front-side cleaning mechanism for cleaning a surface of the substrate held by the spin chuck, and a back-side cleaning mechanism for rinsing a back side of the substrate held by the spin chuck, wherein the back-side cleaning mechanism is disposed to face the back side of the substrate held by the spin chuck through hollow portions of the hollow shaft.
    Type: Grant
    Filed: August 17, 1998
    Date of Patent: September 12, 2000
    Assignee: Tokyo Electron Limited
    Inventors: Satoshi Nakashima, Takanori Miyazaki, Hiroki Taniyama, Toshikazu Arihisa