Abstract: A method for forming a precoat film on a metal surface in a chamber before forming a silicon-containing film having an identical composition system with that of the precoat film on a substrate in the chamber using a PECVD method, wherein the precoat film is formed using a PEALD method in which a first gas and a second gas are supplied into the chamber by shifting timing of supply, the PEALD method comprises an adsorption step comprising supplying the first gas into the chamber so that the source gas component adsorbs on the metal surface, a first purge step comprising discharging an excessive source gas component not adsorbed on the metal surface, and a precoat film forming step comprising supplying the second gas into the chamber and applying high-frequency power to generate plasma in the reactant gas component in the second gas.

Abstract: A method for forming a precoat film on a metal surface in a chamber before forming a silicon-containing film having an identical composition system with that of the precoat film on a substrate in the chamber using a PECVD method, wherein the precoat film is formed using a PEALD method in which a first gas and a second gas are supplied into the chamber by shifting timing of supply, the PEALD method comprises an adsorption step comprising supplying the first gas into the chamber so that the source gas component adsorbs on the metal surface, a first purge step comprising discharging an excessive source gas component not adsorbed on the metal surface, and a precoat film forming step comprising supplying the second gas into the chamber and applying high-frequency power to generate plasma in the reactant gas component in the second gas.

Abstract: A cutting tool is provided which includes a steel metal body and a cemented carbide cutting tip secured to the metal body by a metallic layer. The metallic layer has a high-strength metallic portion and a high-toughness metallic portion. The high-strength metallic portion is made of a metal having a thermal expansion rate between a thermal expansion rate of the metal body and the thermal expansion rate of the cutting tip. The high-toughness metallic portion is located between edge portions of a securing region of the metal body and the cutting tip and has toughness larger than that of the high-strength metallic portion.

Abstract: An outer cutter assembly for an electric shaver comprises an outer shearing foil, a base frame on which the outer shearing foil is mounted with its peripheral edge supported thereby. The outer shearing foil is formed with a plurality of hair entrance peripheral perforations arranged along the periphery thereof to be in hair shearing relation with an inner blade. A comb forming member is located between the peripheral edge of the outer shearing foil and the upper end of the base frame to have its lower portion connected to the base frame. The comb forming member is provided at its upper portion with a comb having teeth defining between the adjacent ones thereof slits each being in open communication with each of the peripheral perforations and being located inside thereof to be in alignment with each of a plurality of webs which separates the peripheral perforations from one another.