Abstract: An inspection device inspects a humidity sensor having a sensor portion and a circuit portion, which are integrated into one chip. The inspection device includes: an inspection chamber for accommodating a wafer, in which a plurality of humidity sensors are disposed as a sensor chip in a wafer state; a probe for contacting an electrode pad of the circuit portion; a tester electrically connected to the probe for inspecting electric properties of the humidity sensor; and a temperature-humidity control portion for controlling a temperature and a humidity in the inspection chamber.

Abstract: A moisture sensor device includes a sensor portion having a capacitance that is varied in accordance with surrounding humidity, a signal processor for processing a detection signal of the sensor portion and outputting the signal corresponding to the humidity, a heating portion for heating the sensor portion, and a controller for controlling heating of the heating portion so that the capacitance of the sensor portion is substantially equal to a value under predetermined humidity at least during a self-diagnosis period.

Abstract: A capacitance of a capacitor member, which varies according to a dynamic force such as an acceleration force imposed on the capacitor member, is detected by a detecting circuit. The detecting circuit is composed of an operational amplifier and a switched capacitor circuit connected in parallel to each other. A reset time (t), during which a feedback capacitor in the switched capacitor circuit is discharged, is set to satisfy the following formula: t>(?C+m)/n, where ?C is an initial capacitance of the capacitor member, and n and m are constant factors having values in certain ranges. By setting the reset time (t) according to the above formula, an amount of acceleration imposed on the capacitor member is accurately detected even when the capacitor member has a certain level of the initial capacitance.

Abstract: A capacitive humidity sensor includes a semiconductor substrate, a protective layer and a humidity sensitive section including a pair of comb electrodes and a humidity sensitive layer having a dielectric constant, which changes in accordance with humidity. The comb electrodes are disposed on one surface of the semiconductor substrate through the protective layer to face each other with a predetermined gap. An interface between the protective layer and the humidity sensitive layer is planarized so that the sensor prevents a hysteresis in a variation of capacitance. For example, a surface of the protective layer can be made flat by polishing.

Abstract: A capacitive humidity sensor for detecting a humidity change includes a first sensor element having a first capacitance, a second sensor element having a second capacitance and connected in series with the first sensor element, and a humidity sensitive layer having a dielectric constant, which changes in accordance with humidity. The first and the second capacitances change with respect to the humidity change at a different rate. The humidity is detected using the different capacitances of the first and the second sensor elements. The humidity sensitive layer is formed to each sensor element so that each sensor element can be effectively protected.

Abstract: A capacitance type humidity sensor includes: a detection substrate including a detection portion on a first side of the detection substrate; and a circuit board including a circuit portion. The detection portion detects humidity on the basis of capacitance change of the detection portion. The circuit portion processes the capacitance change as an electric signal. The detection substrate further includes a sensor pad on a second side of the detection substrate. The sensor pad is electrically connected to the detection portion through a conductor in a through hole of the detection substrate.

Abstract: A capacitance type physical quantity detector includes a sensor unit of which the capacitance varies depending upon a change in the physical quantity and a C-V converter unit which converts a change in the capacitance of said sensor unit into a voltage. The C-V converter unit includes an operational amplifier, a feedback capacitor, switching means connected in parallel with said feedback capacitor, a reference voltage-generating circuit for applying a reference voltage to the operational amplifier, and a drive voltage-generating circuit for applying a drive voltage to said sensor unit. At least any one of the feedback capacitance of said feedback capacitor, the reference voltage formed by said reference voltage-generating circuit or the drive voltage formed by said drive voltage-generating circuit varies depending upon the temperature to correct temperature characteristics of the sensor unit.

Abstract: A capacitance device includes a dielectric film, the first electrode and the second electrode. One of the two electrodes is divided into a plurality of electrode portions. Each of the divided electrode portions is connected with each other through switching transistors so that appropriate portions contributing to the capacitance can be selected. The device can vary its capacitance with high accuracy.

Abstract: An apparatus is provided for concurrently detecting a plurality of physical quantities to be detected. The apparatus comprises plural sensing units, plural processors, and controller. The sensing units are formed on the same substrate to form a single sensor. Each sensing unit senses each physical quantity to output a voltage signal changing depending on each physical quantity sensed. Each of the processors samples and holds, at a predetermined frequency, the voltage signal outputted by each of the sensing units. Hence sampled and held voltage signals are produced and outputted from the apparatus as information indicative of the plurality of physical quantities. In the sampling and holding processing, a controller controls the plural processors so that the processors perform sampling operations at predetermined different phases shifted from each other during an interval defined by the predetermined frequency.

Abstract: A capacitive type humidity sensor includes: a semiconductor substrate; a plurality of humidity devices having a capacitance variable in accordance with a humidity; a standard capacitance device having a standard capacitance, a capacitance change of which in accordance with the humidity is smaller than that of the capacitance of each humidity device; and a CV converter circuit for converting a capacitance difference between the capacitance of each humidity device and the standard capacitance of the standard capacitance device to a signal voltage. The humidity devices, the standard capacitance device and the CV converter circuit are disposed on one side of the substrate.

Abstract: A capacitance of a capacitor member, which varies according to a dynamic force such as an acceleration force imposed on the capacitor member, is detected by a detecting circuit. The detecting circuit is composed of an operational amplifier and a switched capacitor circuit connected in parallel to each other. A reset time (t), during which a feedback capacitor in the switched capacitor circuit is discharged, is set to satisfy the following formula: t>(?C+m)/n, where ?C is an initial capacitance of the capacitor member, and n and m are constant factors having values in certain ranges. By setting the reset time (t) according to the above formula, an amount of acceleration imposed on the capacitor member is accurately detected even when the capacitor member has a certain level of the initial capacitance.

Abstract: In a switched capacitor filter circuit, a switching transistor is connected to an operational amplifier for input of a switching control signal to the operational amplifier. A noise compensation transistor is provided between the switching transistor and the operational amplifier. The drain and the source of the noise compensation transistor are connected to each other. The noise compensation transistor is applied with an inverted signal of the switching signal, and generates feedthrough noise of the polarity inverted from that generated by the switching transistor in order to cancel the feedthrough noise.

Abstract: An apparatus is provided for concurrently detecting a plurality of physical quantities to be detected. The apparatus comprises plural sensing units, plural processors, and controller. The sensing units are formed on the same substrate to form a single sensor. Each sensing unit senses each physical quantity to output a voltage signal changing depending on each physical quantity sensed. Each of the processors samples and holds, at a predetermined frequency, the voltage signal outputted by each of the sensing units. Hence sampled and held voltage signals are produced and outputted from the apparatus as information indicative of the plurality of physical quantities. In the sampling and holding processing, a controller controls the plural processors so that the processors perform sampling operations at predetermined different phases shifted from each other during an interval defined by the predetermined frequency.

Abstract: An oscillator includes first, second and third inverters (1, 2, 3) connected in series. A feedback path is connected from the output terminal of the third inverter (3) to the input terminal of the first inverter 1 through a resistor (5) while a second feedback path is connected from the output terminal of the second inverter (2) to the input terminal of the first inverter (1) through a capacitor (4). The second feedback path further includes a resistor (6) having a temperature coefficient larger than that of resistor (5) is inserted to adjust the charge/discharge trigger voltage and charge/discharge time of the capacitor (4).

Abstract: A control signal generator transmits a first signal to a movable electrode and a fixed electrode to detect a change in a capacitance formed between the movable electrode and the fixed electrode during a normal physical quantity detection timing interval. Also, the control signal generator transmits a second signal to the movable electrode and the fixed electrode instead of the first signal to move the movable electrode for diagnosing a malfunction of each of a plurality of physical quantity detection portions during a self diagnosis timing interval. The control signal generator transmits the second signal to the movable electrode and the fixed electrode of each physical quantity detection portion during a different timing intervals.

Abstract: In a switched capacitor filter circuit, a switching transistor is connected to an operational amplifier for input of a switching control signal to the operational amplifier. A noise compensation transistor is provided between the switching transistor and the operational amplifier. The drain and the source of the noise compensation transistor are connected to each other. The noise compensation transistor is applied with an inverted signal of the switching signal, and generates feedthrough noise of the polarity inverted from that generated by the switching transistor in order to cancel the feedthrough noise.

Abstract: A control signal generator transmits a first signal to a movable electrode and a fixed electrode to detect a change in a capacitance formed between the movable electrode and the fixed electrode during a normal physical quantity detection timing interval. Also, the control signal generator transmits a second signal to the movable electrode and the fixed electrode instead of the first signal to move the movable electrode for diagnosing a malfunction of each of a plurality of physical quantity detection portions during a self diagnosis timing interval. The control signal generator transmits the second signal to the movable electrode and the fixed electrode of each physical quantity detection portion during a different timing intervals.