Abstract: In an electromagnetic fuel injection valve in which: a suction tubular part projecting toward an inside of a nonmagnetic cylindrical body is provided to a front end portion of a stationary core; and a front end of the suction tubular part and a rear end of a movable core are opposed to each other in the inside of the nonmagnetic cylindrical body, an annular gap allowing influx of pressure fluid used for a check of liquid-tightness between the nonmagnetic cylindrical body and the stationary core is provided between an outer peripheral surface of the suction tubular part and an inner peripheral surface of the nonmagnetic cylindrical body. Accordingly, it enables a quick and efficient judgment to be made on a check on liquid-tightness of a welded part by applying fluid pressure to the inside of the valve housing after the valve housing of the electromagnetic fuel injection valve is produced.

Abstract: In an electromagnetic fuel injection valve in which: a suction tubular part projecting toward an inside of a nonmagnetic cylindrical body is provided to a front end portion of a stationary core; and a front end of the suction tubular part and a rear end of a movable core are opposed to each other in the inside of the nonmagnetic cylindrical body, an annular gap allowing influx of pressure fluid used for a check of liquid-tightness between the nonmagnetic cylindrical body and the stationary core is provided between an outer peripheral surface of the suction tubular part and an inner peripheral surface of the nonmagnetic cylindrical body. Accordingly, it enables a quick and efficient judgment to be made on a check on liquid-tightness of a welded part by applying fluid pressure to the inside of the valve housing after the valve housing of the electromagnetic fuel injection valve is produced.

Abstract: This invention relates to a highly precise and efficient color filter producing apparatus, which is provided with at least a set of drawing heads for respectively generating ink jets of red, green and blue colors, movement means for moving, with a substrate on which a color filter is to be formed by drawing with said ink jets, in a plane having a predetermined distance from the drawing heads, displacement detection means for detecting relative displacement between the substrate and the drawing heads in directions of six freedoms, means for detecting the reaching position on the substrate of the ink jet discharged from the drawing head, and alignment means for effecting alignment between the substrate and the drawing heads in directions of six freedoms, based on the results of detection of the reaching position and of the relative displacement between the substrate and the drawing head in directions of six freedoms.

Abstract: This invention relates to a highly precise and efficient color filter producing apparatus, which is provided with at least a set of drawing heads for respectively generating ink jets of red, green and blue colors, movement device for moving, with a substrate on which a color filter is to be formed by drawing with said ink jets, in a plane having a predetermined distance from the drawing heads, displacement detection device for detecting relative displacement between the substrate and the drawing heads in directions of six degrees of freedom, device for detecting the reaching position on the substrate of the ink jet discharged from the drawing head, and alignment device for effecting alignment between the substrate and the drawing heads in directions of six degrees of freedom, based on the results of detection of the reaching position and of the relative displacement between the substrate and the drawing head in directions of six degrees of freedom.

Abstract: A moving magnet type multi-phase linear motor which can suppress vibration of its own and can attain efficient cooling includes support members supporting two end portions of coils and arranged along the coil arrangement direction, pipes for supplying a coolant which are arranged in the support members, a stationary element fixed using a fixing member arranged at substantially the central portions of the coils to extend along the coil arrangement direction, and a movable element which has a substantially C-shaped section in a direction perpendicular to the coil arrangement direction.

Abstract: An exposure apparatus for manufacturing semiconductors is provided in order to make stages for carrying a wafer compact and to increase their rigidity. The apparatus has an exposure optical system, stages for carrying a wafer, a section for moving the stages relative to the exposure optical system, and first and second measurement sections. The first measurement section measures the positions of the stages, including the positions of the stages when the wafer is exposed to incident radiation. The second measurement means measures at least the positions of the stages at a wafer replacement position, where the first measurement means cannot be used for measurement.

Abstract: A device for positioning control includes a movable stage; an acceleration sensor disposed on the movable table; a feedback loop for controlling movement of the movable table; and an acceleration feedback loop provided in relation to an acceleration signal from the acceleration sensor, wherein the acceleration feedback loop is provided as an internal loop to the feedback loop.

Abstract: A device for controlling positioning of a movable object includes a system for storing therein a provisional target position for the movement of the movable object, the storing system being arranged to store therein the provisional target position by providing an offset with respect to a final target position at which the movable object is to be finally positioned, and a control unit for controlling movement of the movable object, the controlling unit being effective to move the movable object so that, at least during a particular section of the movement, the movable object aims at the provisional target position, and the controlling unit being also effective to introduce, at a predetermined timing, the final target position so that the movable object is moved while aiming at the final target position.

Abstract: A tool move control method is disclosed. It comprises the steps of setting an interference area for an object which should not be interfered with a tool when a tool rapid move is instructed by a start point and a terminal point for the tool movement, setting an entry prohibit quadrant for prohibiting the tool entry and two or more of quadrants for permitting a move of the tool in the interference area, and controlling a move mode of the tool according to quadrants belonging to the start point and the terminal point in such a manner as to avoid the entry prohibit quadrant. A tool move control apparatus is also disclosed.

Abstract: An actuator made of a material having a shape memory effect includes a plurality of materials having a shape memory effect and a heat insulator member. The plurality of materials having a shape memory effect are disposed with the heat insulator member interposed therebetween, and the plurality of materials and the insulator member are joined together.

Abstract: A process for producing a translucent .beta.-sialon sintered product, which comprises mixing fine powders of silicon nitride and aluminum nitride having a high purity of at least 99% and a particle size of at most 200 microns and fine powders of aluminum oxide and silicon oxide having a high purity of at least 99% in such a proportion as to form .beta.-sialon of the formula Si.sub.6-z Al.sub.z O.sub.z N.sub.8-z where z is from 1 to 4.2, and hot-pressing the mixture in a nitrogen atmosphere at a temperature of from 1500.degree. to 1850.degree. C. under pressure of from 10 to 1500 kg/cm.sup.2.