Abstract: An improved apparatus for use in replacing a polishing pad is disclosed. processing system includes: a polishing device configured to polish a workpiece; a pad break-in device configured to perform a pad break-in process of a polishing pad; and a pad transporting device configured to transport a pad structure from the pad break-in device to the polishing device. The pad structure includes at least the polishing pad. The pad transporting device includes a liquid receiving tray arranged under the holding hand and configured to receive liquid dropped from the pad structure.

Abstract: A wide range monitor apparatus for the output from a nuclear reactor has a logarithmic count rate measuring circuit and a Campbel measuring circuit corresponding to different neutron flux density ranges of the neutron flux output from a neutron detector. The apparatus monitors the nuclear reactor output as a single output which has a linearity with the neutron flux density over a wide range thereof. A logic circuit combines two comparison discrimination signals obtained by comparing low and high comparison voltages corresponding to the hysteresis width in an overlap region of the outputs from the two measuring circuits with detection output voltages from the two measuring circuits. One of the outputs from the two measuring circuits is selected in accordance with the logical level signal obtained by combining the two comparison discrimination signals by the logic circuit.

Abstract: A preamplifier for a wide range neutron flux monitoring system is disclosed. The preamplifier contains first to fifth amplifiers and a selection switch. The first amplifier for high frequency band amplification has a low input impedance circuit. The second amplifier for low frequency band amplification has a high input impedance circuit. Either of the first and second amplifiers can provide a path for the neutron flux level signal derived from a detector according to the frequency of the neutron flux level signal. The third amplifier (pulse amplifier) amplifies the output signal of the first amplifier and transfers the amplified signal to a pulse signal counting system. The lower frequency band Campbell signal is applied to the Campbelling system, through the second amplifier, the fourth amplifier (low frequency band Campbelling amplifier), and the selection switch.