Abstract: In a direction detecting device, a transmitting wave generator encodes a transmitting signal with a code having a high autocorrelation so as to generate a transmitting wave. A transmitter transmits the transmitting wave and a plurality of receiver elements receives a reflected wave reflected by an object. A direction calculating unit calculates a direction of the object based on a phase difference between a correlation value calculated based on the reflected wave received by one of the receiver elements and a correlation value calculated based on the reflected wave received by another one of the receiver elements, a distance between the one of the receiver elements and the another one of the receiver elements, and a wavelength of the transmitting wave.

Abstract: An ultrasonic sensor includes a transmitting device, a receiving device, and a circuit device. The circuit device determines that the receiving device receives an ultrasonic wave reflected from an object, when an output voltage of the receiving device is equal to or greater than a first threshold. The circuit device includes a humidity detection section configured to detect an ambient humidity of the transmitting and receiving devices and a threshold adjustment section configured to calculate, based on the detected ambient humidity, a sound pressure of the ultrasonic wave that is received by the receiving device after propagating over a round-trip distance between the ultrasonic sensor and the object. The threshold adjustment section reduces the first threshold, when the output voltage corresponding to the calculated sound pressure is less than a second threshold that is greater the first threshold.

Abstract: A washer nozzle-equipped camera apparatus includes a camera and a washer nozzle. The washer nozzle has a window spray outlet for spraying a washer fluid, supplied from a supply unit such as a pump, on a window of a vehicle. The washer nozzle further has a window duct for carrying the washer fluid to the window spray outlet. The washer nozzle further has a camera spray outlet for spraying the washer fluid on a lens of the camera. The washer nozzle further has a camera duct for carrying the washer fluid to the camera spray outlet.

Abstract: In a direction detecting device, a transmitting wave generator encodes a transmitting signal with a code having a high autocorrelation so as to generate a transmitting wave. A transmitter transmits the transmitting wave and a plurality of receiver elements receives a reflected wave reflected by an object. A direction calculating unit calculates a direction of the object based on a phase difference between a correlation value calculated based on the reflected wave received by one of the receiver elements and a correlation value calculated based on the reflected wave received by another one of the receiver elements, a distance between the one of the receiver elements and the another one of the receiver elements, and a wavelength of the transmitting wave.

Abstract: A humidity sensor includes: a substrate; a pair of electrodes on the substrate; a humidity sensitive member between the electrodes having a capacitance changeable in accordance with humidity; an output element connecting to the electrodes in order to detect a capacitance of the humidity sensitive member and outputting a signal corresponding to the capacitance; and a setting member for setting a maximum amount of moisture in the humidity sensitive member to be a standard maximum amount of moisture. The humidity sensitive member is capable of absorbing a moisture up to the maximum amount of moisture. The setting member includes at least one of an element for reducing the maximum amount of moisture and an element for increasing the maximum amount of moisture.

Abstract: A capacitive humidity sensor includes: a humidity sensing element with a humidity sensitive film and electrodes; and a processing circuit. The film has a dielectric constant variable in accordance with moisture. The electrodes detect capacitance of the film and outputs a signal corresponding to the capacitance. The processing circuit processes the signal. The film is made of inorganic material having fine pores for adsorbing the moisture. A diameter of the fine pores is set to be a predetermined diameter so that capillary tube aggregation phenomenon occurs at a predetermined relative humidity. The capacitance of the film has a change rate with respect to the relative humidity. The change rate in case of the relative humidity higher than the predetermined relative humidity is larger than that in case of the relative humidity lower than the predetermined relative humidity.

Abstract: A capacitive humidity sensor includes a semiconductor substrate, a protective layer and a humidity sensitive section including a pair of comb electrodes and a humidity sensitive layer having a dielectric constant, which changes in accordance with humidity. The comb electrodes are disposed on one surface of the semiconductor substrate through the protective layer to face each other with a predetermined gap. An interface between the protective layer and the humidity sensitive layer is planarized so that the sensor prevents a hysteresis in a variation of capacitance. For example, a surface of the protective layer can be made flat by polishing.

Abstract: The invention provides a humidity-sensitive element using, as a humidity-sensitive film, a polyimide having a molecular structure capable of forming a network structure at a high density, exhibiting less drift after being left standing at a high temperature and a high humidity and having excellent characteristics. A humidity-sensitive element according to the invention uses the polyimide obtained by dehydrating and ring closing a polyamide acid forming a network structure in which terminals of basic molecular chains are interconnected with one another, as a humidity-sensitive film. The humidity-sensitive element of the invention suitably uses a polyimide, in which terminals of basic molecular chains are interconnected with one another by use of triamine or a tricarboxylic acid, as a humidity sensitive film.

Abstract: A capacitance device includes a dielectric film, the first electrode and the second electrode. One of the two electrodes is divided into a plurality of electrode portions. Each of the divided electrode portions is connected with each other through switching transistors so that appropriate portions contributing to the capacitance can be selected. The device can vary its capacitance with high accuracy.

Abstract: A capacitance type physical quantity detector includes a sensor unit of which the capacitance varies depending upon a change in the physical quantity and a C-V converter unit which converts a change in the capacitance of said sensor unit into a voltage. The C-V converter unit includes an operational amplifier, a feedback capacitor, switching means connected in parallel with said feedback capacitor, a reference voltage-generating circuit for applying a reference voltage to the operational amplifier, and a drive voltage-generating circuit for applying a drive voltage to said sensor unit. At least any one of the feedback capacitance of said feedback capacitor, the reference voltage formed by said reference voltage-generating circuit or the drive voltage formed by said drive voltage-generating circuit varies depending upon the temperature to correct temperature characteristics of the sensor unit.

Abstract: An inspection device inspects a humidity sensor having a sensor portion and a circuit portion, which are integrated into one chip. The inspection device includes: an inspection chamber for accommodating a wafer, in which a plurality of humidity sensors are disposed as a sensor chip in a wafer state; a probe for contacting an electrode pad of the circuit portion; a tester electrically connected to the probe for inspecting electric properties of the humidity sensor; and a temperature-humidity control portion for controlling a temperature and a humidity in the inspection chamber.

Abstract: A humidity sensor includes: a substrate; a pair of electrodes on the substrate; a humidity sensitive member between the electrodes having a capacitance changeable in accordance with humidity; an output element connecting to the electrodes in order to detect a capacitance of the humidity sensitive member and outputting a signal corresponding to the capacitance; and a setting member for setting a maximum amount of moisture in the humidity sensitive member to be a standard maximum amount of moisture. The humidity sensitive member is capable of absorbing a moisture up to the maximum amount of moisture. The setting member includes at least one of an element for reducing the maximum amount of moisture and an element for increasing the maximum amount of moisture.

Abstract: A capacitive humidity sensor for detecting a humidity change includes a first sensor element having a first capacitance, a second sensor element having a second capacitance and connected in series with the first sensor element, and a humidity sensitive layer having a dielectric constant, which changes in accordance with humidity. The first and the second capacitances change with respect to the humidity change at a different rate. The humidity is detected using the different capacitances of the first and the second sensor elements. The humidity sensitive layer is formed to each sensor element so that each sensor element can be effectively protected.

Abstract: An inspection device inspects a humidity sensor having a sensor portion and a circuit portion, which are integrated into one chip. The inspection device includes: an inspection chamber for accommodating a wafer, in which a plurality of humidity sensors are disposed as a sensor chip in a wafer state; a probe for contacting an electrode pad of the circuit portion; a tester electrically connected to the probe for inspecting electric properties of the humidity sensor; and a temperature-humidity control portion for controlling a temperature and a humidity in the inspection chamber.

Abstract: A capacitance type humidity sensor includes: a detection substrate including a detection portion on a first side of the detection substrate; and a circuit board including a circuit portion. The detection portion detects humidity on the basis of capacitance change of the detection portion. The circuit portion processes the capacitance change as an electric signal. The detection substrate further includes a sensor pad on a second side of the detection substrate. The sensor pad is electrically connected to the detection portion through a conductor in a through hole of the detection substrate.

Abstract: A moisture sensor device includes a sensor portion having a capacitance that is varied in accordance with surrounding humidity, a signal processor for processing a detection signal of the sensor portion and outputting the signal corresponding to the humidity, a heating portion for heating the sensor portion, and a controller for controlling heating of the heating portion so that the capacitance of the sensor portion is substantially equal to a value under predetermined humidity at least during a self-diagnosis period.

Abstract: A manufacturing method of a humidity sensor having a moisture-sensitive film formed of a polymer membrane is disclosed. The method involves performing a first heat treatment process in which the polymer membrane is heat treated at a temperature that is at least approximately equal to a glass transition temperature of the polymer membrane. The method also involves performing a second heat treatment process in which the polymer membrane is heat treated at a temperature that is at most approximately equal to the glass transition temperature of the polymer membrane in a predetermined ambient humidity.

Abstract: An inspection device inspects a humidity sensor having a sensor portion and a circuit portion, which are integrated into one chip. The inspection device includes: an inspection chamber for accommodating a wafer, in which a plurality of humidity sensors are disposed as a sensor chip in a wafer state; a probe for contacting an electrode pad of the circuit portion; a tester electrically connected to the probe for inspecting electric properties of the humidity sensor; and a temperature-humidity control portion for controlling a temperature and a humidity in the inspection chamber.

Abstract: A moisture sensor device includes a sensor portion having a capacitance that is varied in accordance with surrounding humidity, a signal processor for processing a detection signal of the sensor portion and outputting the signal corresponding to the humidity, a heating portion for heating the sensor portion, and a controller for controlling heating of the heating portion so that the capacitance of the sensor portion is substantially equal to a value under predetermined humidity at least during a self-diagnosis period.

Abstract: A capacitive humidity sensor for detecting a humidity change includes a first sensor element having a first capacitance, a second sensor element having a second capacitance and connected in series with the first sensor element, and a humidity sensitive layer having a dielectric constant, which changes in accordance with humidity. The first and the second capacitances change with respect to the humidity change at a different rate. The humidity is detected using the different capacitances of the first and the second sensor elements. The humidity sensitive layer is formed to each sensor element so that each sensor element can be effectively protected.