Abstract: A polishing apparatus capable of acquiring accurate film thickness distribution information is disclosed. The polishing apparatus includes a polishing table, a plurality of film thickness sensors, and a controller. The controller analyzes film thickness distribution information of a substrate while identifying a notch position of the substrate based on the measured film thickness information, and outputs visualization information of the film thickness distribution with the notch position as a reference position.

Abstract: An improved apparatus for use in replacing a polishing pad is disclosed. processing system includes: a polishing device configured to polish a workpiece; a pad break-in device configured to perform a pad break-in process of a polishing pad; and a pad transporting device configured to transport a pad structure from the pad break-in device to the polishing device. The pad structure includes at least the polishing pad. The pad transporting device includes a liquid receiving tray arranged under the holding hand and configured to receive liquid dropped from the pad structure.

Abstract: A polishing apparatus capable of preventing condensation on an inner surface of a transparent window provided in a polishing pad and capable of achieving accurate measuring of a film thickness is disclosed. The polishing apparatus includes: a polishing pad having a polishing surface; a polishing head configured to press a workpiece against the polishing surface; a transparent window disposed in the polishing pad; a polishing table configured to support the polishing pad; an optical sensor head located below the transparent window and configured to direct light to the workpiece through the transparent window and receive reflected light from the workpiece through the transparent window; and a cooling device configured to cool a space between the transparent window and the optical sensor head.

Abstract: A polishing apparatus capable of acquiring accurate film thickness distribution information is disclosed. The polishing apparatus includes a polishing table, a plurality of film thickness sensors, and a controller. The controller analyzes film thickness distribution information of a substrate while identifying a notch position of the substrate based on the measured film thickness information, and outputs visualization information of the film thickness distribution with the notch position as a reference position.

Abstract: An illumination device includes a first light source, a first optical member configured to transmit light emitted from the first light source, a second optical member placed between the first light source and the first optical member and configured to transmit light emitted from the first light source, an air-movement mechanism configured to move air suctioned from a first space as an internal space closer to the first light source than the second optical member is and including the first light source, to a second space as a space between the first and second optical members, and a second light source different from the first light source, wherein a member included in a flow path of the air-movement mechanism is thermally connected to the second light source.

Abstract: A lighting device that protects a member related to light emission from heat associated with light emission includes a light source, a first optical member configured to transmit light emitted by the light source, a second optical member, arranged between the light source and the first optical member, configured to transmit light emitted by the light source, and an air-sending mechanism configured to send air suctioned from a first space that is an inner space on a side nearer to the light source than the second optical member and includes the light source to a second space that is a space between the first optical member and the second optical member.

Abstract: An illumination device includes a first light source, a first optical member configured to transmit light emitted from the first light source, a second optical member placed between the first light source and the first optical member and configured to transmit light emitted from the first light source, an air-movement mechanism configured to move air suctioned from a first space as an internal space closer to the first light source than the second optical member is and including the first light source, to a second space as a space between the first and second optical members, and a second light source different from the first light source, wherein a member included in a flow path of the air-movement mechanism is thermally connected to the second light source.

Abstract: A rotation restricting structure includes a main body a rotator rotatable with respect to the main body, and a rotation restricting member which restricts rotation of the rotator, wherein the rotator includes a rotating plate which rotates with rotation of the rotator with respect to the main body, one of the rotating plate or the main body has a protrusion portion, the rotation restricting member has a contacting portion contactable with the protrusion portion and a rotational shaft which is pivotally supported by the other of the rotating plate or the main body, the protrusion portion contacts the contacting portion by rotation of the rotator, thereby the rotational angle range of the rotator being restricted, and a position of the contacting portion provided on the rotation restricting member is different from a position of the rotational shaft provided on the rotation restricting member.

Abstract: A resistance measuring module for measuring electric resistance of a substrate holder is provided. The substrate holder has an electric contact configured to feed a current to a held substrate and contactable with the substrate. The substrate holder is able to hold a testing substrate for measurement of electric resistance of the substrate holder, and is configured such that the electric contact comes into contact with the testing substrate in a state where the testing substrate is held. The resistance measuring module includes: a test probe contactable with the testing substrate held in the substrate holder; and a resistance measuring instrument for measurement of a resistance value between the electric contact and the probe via the testing substrate.

Abstract: A rotation restricting structure includes a main body a rotator rotatable with respect to the main body, and a rotation restricting member which restricts rotation of the rotator, wherein the rotator includes a rotating plate which rotates with rotation of the rotator with respect to the main body, one of the rotating plate or the main body has a protrusion portion, the rotation restricting member has a contacting portion contactable with the protrusion portion and a rotational shaft which is pivotally supported by the other of the rotating plate or the main body, the protrusion portion contacts the contacting portion by rotation of the rotator, thereby the rotational angle range of the rotator being restricted, and a position of the contacting portion provided on the rotation restricting member is different from a position of the rotational shaft provided on the rotation restricting member.

Abstract: A lighting device that protects a member related to light emission from heat associated with light emission includes a light source, a first optical member configured to transmit light emitted by the light source, a second optical member, arranged between the light source and the first optical member, configured to transmit light emitted by the light source, and an air-sending mechanism configured to send air suctioned from a first space that is an inner space on a side nearer to the light source than the second optical member and includes the light source to a second space that is a space between the first optical member and the second optical member.

Abstract: The illumination apparatus includes a housing holding an optical member, a light emitter housed in the housing and including a light source configured to emit illumination light projected frontward through the optical member, an emission control substrate disposed behind the light emitter and on which electronic components for controlling emission of the light source are mounted, and a heat radiating member configured to cause heat transmitted from the light source to an outer face of the light emitter to radiate. The heat radiating member includes a lower face portion, a side face portion and a rear face portion disposed so as to respectively face a lower face and a side face of the light emitter and the emission control substrate.

Abstract: An illumination device capable of enhancing design thereof and facilitating removable mounting operation of optical accessories. A bounce adapter 10 and a color filter 20 are mountable to a strobe device 300 so that the bounce adapter 10 and color filter 20 are arranged in a front part of a light emitting unit 350. A top surface 350a of the light emitting unit 350 is provided with an attachment rib 355a to be engaged with the bounce adapter 10 and the color filter 20. A bottom cover 353 of the light emitting unit 350 is provided with holes 354a, 354d to be engaged with the bounce adapter 10 and holes 354b, 354c to be engaged with the color filter 20.

Abstract: A resistance measuring module for measuring electric resistance of a substrate holder is provided. The substrate holder has an electric contact configured to feed a current to a held substrate and contactable with the substrate. The substrate holder is able to hold a testing substrate for measurement of electric resistance of the substrate holder, and is configured such that the electric contact comes into contact with the testing substrate in a state where the testing substrate is held. The resistance measuring module includes: a test probe contactable with the testing substrate held in the substrate holder; and a resistance measuring instrument for measurement of a resistance value between the electric contact and the probe via the testing substrate.

Abstract: An illumination apparatus includes a light source, a light-receiving unit, and a light guide unit formed in an arc shape. The light guide unit includes a light incidence section on which light from the light source is incident. The light incidence section is disposed on an outer circumferential side of the light guide unit, and faces the light source. The light guide unit further includes a first reflecting section having a first and a second region, and a second reflecting section having first and second surfaces. The first surface reflects the light incident from the light incidence section toward the first region, and the second surface reflects the light incident from the light incidence section toward the second region. The light-receiving unit is disposed at a position between the first and the second surfaces.

Abstract: An Sn alloy plating apparatus is disclosed. The apparatus includes a plating bath configured to store an Sn alloy plating solution therein with an insoluble anode and a substrate immersed in the Sn alloy plating solution, an Sn dissolving having an anion exchange membrane therein which isolates an anode chamber, in which an Sn anode is disposed, and a cathode chamber, in which a cathode is disposed, from each other, a pure water supply structure configured to supply pure water to the anode chamber and the cathode chamber, a methanesulfonic acid solution supply structure configured to supply a methanesulfonic acid solution, containing a methanesulfonic acid, to the anode chamber and the cathode chamber, and an Sn replenisher supply structure configured to supply an Sn replenisher, produced in the anode chamber and containing Sn ions and a methanesulfonic acid, to the plating bath.

Abstract: The illumination apparatus includes a housing holding an optical member, a light emitter housed in the housing and including a light source configured to emit illumination light projected frontward through the optical member, an emission control substrate disposed behind the light emitter and on which electronic components for controlling emission of the light source are mounted, and a heat radiating member configured to cause heat transmitted from the light source to an outer face of the light emitter to radiate. The heat radiating member includes a lower face portion, a side face portion and a rear face portion disposed so as to respectively face a lower face and a side face of the light emitter and the emission control substrate.

Abstract: A setting unit sets a smaller limitation angle for rotation of a second case rotated by a driving unit relative to a first case when information output from a sensor disposed in a back surface of a first case indicates that an object does not exist in a certain range when compared with a case where the information output from the sensor indicates that an object exists in the certain range.

Abstract: An illumination device capable of enhancing design thereof and facilitating removable mounting operation of optical accessories. A bounce adapter 10 and a color filter 20 are mountable to a strobe device 300 so that the bounce adapter 10 and color filter 20 are arranged in a front part of a light emitting unit 350. A top surface 350a of the light emitting unit 350 is provided with an attachment rib 355a to be engaged with the bounce adapter 10 and the color filter 20. A bottom cover 353 of the light emitting unit 350 is provided with holes 354a, 354d to be engaged with the bounce adapter 10 and holes 354b, 354c to be engaged with the color filter 20.

Abstract: There is provided an illumination device that is prevented from being increased in size. The illumination device includes a first light source, a second light source, a main capacitor configured to store electric charge for causing the first light source and the second light source to emit light, a first coil electrically connected between the first light source and the main capacitor, and a second coil electrically connected between the second light source and the main capacitor. A radial direction of the first coil and a radial direction of the second coil are parallel to a vertical direction of the illumination device, the first coil and the second coil are aligned with the main capacitor in a horizontal direction of the illumination device, and the first coil is aligned with the second coil in a direction orthogonal to the horizontal direction of the illumination device.