Patents by Inventor Toshiki Shinke

Toshiki Shinke has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • OPTICAL MEASUREMENT APPARATUS AND OPTICAL MEASUREMENT METHOD
    Publication number: 20190353523
    Abstract: an optical measurement apparatus includes: a probe including a transmissive optical member having a reference surface, the probe being configured to irradiate a sample with light through the reference surface, and receive a first reflected light from the reference surface, a second reflected light from a front side of the sample, and a third reflected light from a back side of the sample; and a calculator configured to calculate a first distance from the reference surface to the front side of the sample with use of a first reflection interference light to be generated by the first reflected light and the second reflected light, and to calculate a thickness of the sample with use of a second reflection interference light to be generated by the second reflected light and the third reflected light.
    Type: Application
    Filed: May 17, 2019
    Publication date: November 21, 2019
    Inventors: Toshiki SHINKE, Shiro KAWAGUCHI, Nobuyuki INOUE
  • Optical measurement apparatus and optical measurement method
    Patent number: 10480997
    Abstract: An optical measurement apparatus includes: a probe including a transmissive optical member having a reference surface, the probe being configured to irradiate a sample with light through the reference surface, and receive a first reflected light from the reference surface, a second reflected light from a front side of the sample, and a third reflected light from a back side of the sample; and a calculator configured to calculate a first distance from the reference surface to the front side of the sample with use of a first reflection interference light to be generated by the first reflected light and the second reflected light, and to calculate a thickness of the sample with use of a second reflection interference light to be generated by the second reflected light and the third reflected light.
    Type: Grant
    Filed: May 17, 2019
    Date of Patent: November 19, 2019
    Assignee: Otsuka Electronics Co., Ltd.
    Inventors: Toshiki Shinke, Shiro Kawaguchi, Nobuyuki Inoue