Abstract: A semiconductor device is provided which comprises a thin film transistor (TFT) comprising a gate electrode formed on an insulating substrate, a gate insulating film formed on the gate electrode, and a pair of electrodes having a semiconductor layer and an ohmic contact layer therebetween; and a gate wiring connected to the gate electrode, and a signal wiring connected to one of the pair of electrodes, wherein the gate wiring and the signal wiring are arranged in superposition in the film thickness direction with an interlayer insulating layer therebetween to have a plurality of crossings with each other and the interlayer insulating layer has a plurality of steps overstriding a lower wiring at the crossings. A radiation detection device and a radiation detection system that have the semiconductor device are also provided.

Abstract: A semiconductor device is provided which comprises a thin film transistor (TFT) comprising a gate electrode formed on an insulating substrate, a gate insulating film formed on the gate electrode, and a pair of electrodes having a semiconductor layer and an ohmic contact layer therebetween; and a gate wiring connected to the gate electrode, and a signal wiring connected to one of the pair of electrodes, wherein the gate wiring and the signal wiring are arranged in superposition in the film thickness direction with an interlayer insulating layer therebetween to have a plurality of crossings with each other and the interlayer insulating layer has a plurality of steps overstriding a lower wiring at the crossings. A radiation detection device and a radiation detection system that have the semiconductor device are also provided.