Abstract: A thermal processing apparatus, performing processing accompanied with heating on a substrate, having an upper lamp group directed toward a prescribed direction and a lower lamp group perpendicularly intersecting with the upper lamp group is provided with a lower reflector between the upper and lower lamp groups. The lower reflector is so provided as to reflect light from lamps, included in the lower lamp group, present on both end regions in relation to the direction of arrangement. Thus, the thermal processing apparatus can efficiently irradiate an auxiliary ring with reflected light from the lower lamp group and improve temperature uniformity when heating the substrate.

Abstract: A thermal processing apparatus, performing processing accompanied with heating on a substrate, having an upper lamp group directed toward a prescribed direction and a lower lamp group perpendicularly intersecting with the upper lamp group is provided with a lower reflector between the upper and lower lamp groups. The lower reflector is so provided as to reflect light from lamps, included in the lower lamp group, present on both end regions in relation to the direction of arrangement. Thus, the thermal processing apparatus can efficiently irradiate an auxiliary ring with reflected light from the lower lamp group and improve temperature uniformity when heating the substrate.

Abstract: In a separator for separating a stripping sheet from a composite film formed by a base sheet and the stripping sheet which are superposed with each other, the composite film is first so carried and arranged that its forward end portion extends over a separating clearance formed in a support, and then a blade is pushed into the separating clearance for thrusting the composite film into the separating clearance in a bent state. Thus, the forward end portion of the composite film is separated (i.e., delaminated). Thereafter the base sheet and the stripping sheet are independently sucked/held on the delaminated forward end portion, and the stripping sheet is completely separated from the base sheet while widening the space between the held positions of these sheets. Due to the aforementioned structure and operation, the composite film can be separated in a simple structure with minimum force, and the separator can be reduced in size and power.