Abstract: A humidity measuring device is equipped with a measurement unit including a temperature sensing element, a humidity sensing element, a casing including an accommodating section in which the measurement unit is accommodated, and a display unit including a display device which is fixed to the casing. A coupling tube connected in the middle between tube portions through which the gas flows enables gas to flow between one of the tube portions and another of the tube portions. The coupling tube includes an orifice, a filter is mounted in the coupling tube, and the casing includes a first tube and a second tube to connect the coupling tube and the accommodating section, and to enable the gas to flow between the coupling tube and the accommodating section.

Abstract: A humidity measuring device is equipped with a temperature and humidity measurement unit including a temperature sensing element that measures temperature and a humidity sensing element that measures humidity, a casing having an accommodating section in which the temperature and humidity measurement unit is accommodated, and a supply tube that supplies a gas at a measurement location into the accommodating section, and a display unit having a display device, and which is fixed to the casing. The display unit further includes a display control unit that controls the display device to thereby cause the display device to display at least one of the humidity of the gas measured by the humidity sensing element, or a dew point temperature of the gas calculated based on the temperature of the gas measured by the temperature sensing element, and the humidity of the gas measured by the humidity sensing element.

Abstract: A solenoid valve system includes a supply solenoid valve, a plurality of exhaust solenoid valves, and a valve control section controlling opening and closing operation of the supply solenoid valve and the plurality of exhaust solenoid valves using PWM or PFM. The plurality of exhaust solenoid valves are disposed in parallel with each other. The supply solenoid valve and the plurality of exhaust solenoid valves have substantially identical flow rate characteristics. The number of the plurality of the exhaust solenoid valves is twice the number of the supply solenoid valve.

Abstract: A solenoid valve system includes a supply solenoid valve, a plurality of exhaust solenoid valves, and a valve control section controlling opening and closing operation of the supply solenoid valve and the plurality of exhaust solenoid valves using PWM or PFM. The plurality of exhaust solenoid valves are disposed in parallel with each other. The supply solenoid valve and the plurality of exhaust solenoid valves have substantially identical flow rate characteristics. The number of the plurality of the exhaust solenoid valves is twice the number of the supply solenoid valve.

Abstract: A measurement flow path is formed in a detector that makes up a thermal type flow sensor. A temperature sensor is disposed on an upstream side, and a heater is disposed on a downstream side in a fluid flow direction of the measurement flow path. Furthermore, a heat transfer preventing wall is disposed between the temperature sensor and the heater. Preferably, a rectifying means such as an orifice or the like is disposed on the downstream side of the heat transfer preventing wall, and between the temperature sensor and the heater.

Abstract: A measurement flow path is formed in a detector that makes up a thermal type flow sensor. A temperature sensor is disposed on an upstream side, and a heater is disposed on a downstream side in a fluid flow direction of the measurement flow path. Furthermore, a heat transfer preventing wall is disposed between the temperature sensor and the heater. Preferably, a rectifying means such as an orifice or the like is disposed on the downstream side of the heat transfer preventing wall, and between the temperature sensor and the heater.

Abstract: In a flow sensor, a horizontal dimension Xt between short side wall portions facing respective sides of a vortex generator is longer than a vertical dimension Yt between long side wall portions facing respective ends of the vortex generator. The short side wall portions are formed linearly or in straight lines along the vortex generator, whereas the long side wall portions are curved at a predetermined radius of curvature.