Abstract: A robot arm apparatus includes an arm mechanism including a base member and a link pivotally connected to the base member for pivotal motion in a horizontal plane through a rotational shaft. The link holds a regular circular transport object at its distal end. The apparatus also includes an edge detector, provided on the base member, that detects two edges of the regular circular transport object as the link pivotally rotates with respect to the base member, a pivotal angle detector that detects a pivotal angle of the link with respect to the base member, and a center position calculator that calculates a center position of the regular circular transport object with respect to the link. The calculation is based on two pivotal angles detected by the pivotal angle detector when the edge detector detects the two edges of the regular circular transport object.

Abstract: A wafer detecting apparatus detects storage states of a plurality of wafers stored in a wafer container. The plurality of wafers are stored substantially horizontal in slots in the wafer container to be transferred in and out of a front opening of the wafer container. The wafer detecting apparatus includes a vertically extending illumination device that emits light through the front opening onto the plurality of wafers and an imaging device that receives the light reflected from the plurality of wafers. The imaging device is arranged substantially directly in front of the wafer container and the illumination device is arranged in at least one of left and right sides of the imaging device.

Abstract: A wafer detecting apparatus detects storage states of a plurality of wafers stored in a wafer container. The plurality of wafers are stored substantially horizontal in slots in the wafer container to be transferred in and out of a front opening of the wafer container. The wafer detecting apparatus includes a vertically extending illumination device that emits light through the front opening onto the plurality of wafers and an imaging device that receives the light reflected from the plurality of wafers. The imaging device is arranged substantially directly in front of the wafer container and the illumination device is arranged in at least one of left and right sides of the imaging device.

Abstract: A robot arm apparatus includes an arm mechanism including a base member and a link pivotally connected to the base member for pivotal motion in a horizontal plane through a rotational shaft. The link holds a regular circular transport object at its distal end. The apparatus also includes an edge detector, provided on the base member, that detects two edges of the regular circular transport object as the link pivotally rotates with respect to the base member, a pivotal angle detector that detects a pivotal angle of the link with respect to the base member, and a center position calculator that calculates a center position of the regular circular transport object with respect to the link. The calculation is based on two pivotal angles detected by the pivotal angle detector when the edge detector detects the two edges of the regular circular transport object.

Abstract: Disclosed herein is a mapping mechanism for carrying out mapping for a FOUP which includes a wafer receiving section on which a plurality of wafers can be placed at a plurality of stages in a heightwise direction and a lid member mounted for opening and closing movement, including: a light emitting member and a light receiving member provided outside the FOUP; and a window member provided on a light path between the light emitting member and the light receiving member which can cross at least part of the wafers placed on the stage portions of the wafer receiving section; the light being caused to pass over all of the stages of the wafer receiving section of the FOUP to carry out the mapping for the FOUP.

Abstract: Disclosed herein is a conveying mechanism disposed in a conveying vessel which includes: a moving member which can move in a horizontal moving direction; a rotary table attached to the moving member such that the rotary table can turn in a horizontal turning direction and move in the vertical direction; and two arm mechanisms which can bend and stretch in a horizontal operating direction relative to the rotary table. Also disclosed herein is a reference position correcting device for the conveying mechanism and methods of correcting reference positions of the conveying mechanism. The reference position correcting device includes: a light emitter for emitting a sensing light beam; a light detector for receiving the sensing light beam; and a correcting device.

Abstract: A conveying mechanism (22) is disposed in a conveying vessel (10). The conveying mechanism includes: a moving member (38) which can move in a horizontal moving direction; a rotary table (48) attached to the moving member such that the rotary table can turn in a horizontal turning direction and move in the vertical direction; and two arm mechanisms which can bend and stretch in a horizontal operating direction relative to the rotary table. A reference position correcting device for the conveying mechanism includes: a light emitter (66) for emitting a sensing light beam (L); a light detector (68) for receiving the sensing light beam; and correcting means (62). The light emitter and the light detector are fixedly positioned on the conveying vessel.