Abstract: In a method for oil-extracting treatment of wastes for extracting oil by heating wastes contained in a waste containing chamber in a manner to be shut off from air, an inert gas is injected into the waste containing chamber after termination of thermal decomposition of the wastes to force out the combustible gas within said waste containing chamber and said waste containing chamber is then opened, so as to prevent an explosion due to mixing of the residual combustible gas within the waste containing chamber and air after the termination of thermal decomposition of the wastes.

Abstract: A method of forming resist pattern is disclosed. After the resist pattern is formed, an ion beam is irradiated on the resist pattern. The energy of the ion beam is controlled in every segments of the resist pattern by a predicted deviation data stored beforehand, so that the unfavorable deviation of the resist pattern is minimized.

Abstract: A process is disclosed for preparing a mask, such as a photo-mask, used in a selective etching process in the manufacture of a semiconductor device or a protective mask for use in a process for selectively providing a porous layer of silicon or for anodic oxidation of a metal layer, in which ions accelerated at a predetermined voltage are implanted into a photo-resist film to a predetermined dose level.